集成光学迈克尔逊干涉型加速度地震检波器
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摘要
为了提高地震检波器的检测灵敏度,增强其性能可靠性,使其体积微型化,利用集成光学原理设计研制了迈克尔逊干涉芯片,并与光纤-质量块简谐振子、光源、光电探测器制成迈克尔逊干涉型加速度地震检波器,检波器具有灵敏度高、频带宽、重量轻、抗电磁干扰等优点,设计参数相位检测灵敏度Δ/a 为1 1×10-2 rad/(m s-2),测试结果表明,在工作频带0~1065 Hz内,振动与检波器输出信号吻合良好,达到设计要求.
For high resolution application in seismic detection, the geophone should be small in size, reliable and sensitive. An integrated optic Michelson interference acceleration seismic geophone has been studied and fabricated. The device is realized by an light source, a photodetector, and Michelson interference integrated optical chips, which are hybrid integrated. The main design parameters of the geophone system are as following: phase detection sensitivity Δ/a is 1.1×10 -2 rad/(m·s -2); work frequency band is 0～1065 Hz.
For high resolution application in seismic detection, the geophone should be small in size, reliable and sensitive. An integrated optic Michelson interference acceleration seismic geophone has been studied and fabricated. The device is realized by an light source, a photodetector, and Michelson interference integrated optical chips, which are hybrid integrated. The main design parameters of the geophone system are as following: phase detection sensitivity Δ/a is 1.1×10 -2 rad/(m·s -2); work frequency band is 0～1065 Hz.
引文
1 CaiheChen,GuilanDing,DelongZhang et al..Michelsonfiberoptic accelerometer[J].Rev.Sci.Instr.,1998,69(9):3123~3126
2 CaiheChen,DelongZhang,GuilanDing et al..BroadbandMichelson fiber optic accelerometer[J].Appl.Opt.,1999,38(4):628~630
3 FengPing,ChenCaihe,DingGuilan et al..The integratedoptic chip of the hybrid integrated optical accelerometer[J].ActaPhotonicaSinica,2000,29(Z1):430~433 冯 萍,陈才和,丁桂兰等.混合型集成光学加速度计集成光学芯片[J].光子学报,2000,29(Z1):431~433
4 HuangHui,HuHongzhang,LiYunna et al..IntegratedopticalTE/TM polarization splitter onLiNbO3 using titaniumdiffusion[J].ChineseJ.Lasers,2002,A29(3):249~252 黄 晖,胡鸿璋,李云娜等.集成光学TM/TE模分离器的研制[J].中国激光,2002,A29(3):249~252
5 LouLifang,ShengZhongyan,YaoKuihong et al..PECVDdeposition and characterization of thick silica film for opticalwaveguide[J].ActaOpticaSinica,2004,24(1):24~28 娄丽芳,盛钟延,姚奎鸿等.厚二氧化硅光波导薄膜制备及其特性分析[J].光学学报,2004,24(1):24~28
6 LiChun,AnYuying,ZengXiaodong.LiNbO3 electrooptictuning optical parametric oscillator[J].ActaOpticaSinica,2004,24(2):172~174 李 春,安毓英,曾晓东.LiNbO3电光调谐光学参变振荡器[J].光学学报,2004,24(2):172~174
7 TangDuoqiang,ZhangHaibin,HuHongzhang et al..Temperature property of integratedAOTF and its high accuracydigital control[J].ChineseJ.Lasers,2003,30(7):629~632 唐多强,张海斌,胡鸿璋等集成光学声光可调谐滤波器的温度特性及其精密数字控制[J].中国激光,2003,30(7):629~632
8 HuHongzhang,ZhangMei,XiaoLifeng.The characteristicsanalysis of an integrated optical acoustooptic tunable filter based onspectrometer[J].ActaOpticaSinica,2004,24(2):195~198 胡鸿璋,张 梅,肖立峰.集成光学声光可调谐光谱仪的特性分析[J].光学学报,2004,24(2):195~198
9 YangXudong,XuXinguang,ShaoYaopeng et al..Photovoltaic effect in doped photorefractiveLiNbO3 crystal[J].ActaOpticaSinica,2003,23(4):398~401 杨旭东,许心光,邵耀鹏等.掺杂光折变LiNbO3晶体光伏效应特性[J].光学学报,2003,23(4):398~401
10 XieHaiyan,HuHongzhang,ZhangShengjiaet al..Study andfabrication of integrated optical polarization independentreflector[J].ChineseJ.Lasers,2003,30(8):691~694 谢海宴,胡鸿璋,张胜甲等.偏振无关集成光学模反射镜的研制[J].中国激光,2003,30(8):691~694
11 QiHongji,ChengChuanfu,YuanJingmei et al..Morphologyanalysis of titanic thin film prepared by ion beam sputtering[J].ActaOpticaSinica,2003,23(4):480~484 齐红基,程传福,袁景梅等.用离子束溅射方法制备的钛薄膜表面形貌分析[J].光学学报,2003,23(4):480~484
12 LiaoWeijun,ChenXianfeng,ZengXianglonget al..Analyticalstudy of electrooptic modulator using annealed protonexchanged planar waveguide[J].ActaOpticaSinica,2003,23(7):865~869 廖尉钧,陈险峰,曾祥龙等.退火质子交换平面波导型电光调制器的研究[J].光学学报,2003,23(7):865~869
13 FangXiaoyong,CaoMaosheng.Theoretical study of laseracceleration sensor[J].ActaOpticaSinica,2003,23(9):1133~1137 房晓勇,曹茂盛.激光加速度传感器的理论研究[J].光学学报,2003,23(9):1133~1137
14 WanZhiyu,ChenGang,WenZhongquan et al..A hybridintegrated micro fiber spectrometer design, simulation andprimary experiments[J].ActaOpticaSinica,2003,23(6):740~744 温志渝,陈 刚,温中泉等.混合集成微型光纤光谱仪的设计模拟及实验[J].光学学报,2003,23(6):740~744
15 EnDe,ChenCaihe,CuiYuminet al..Study and fabrication onintegrated planar optic disk pickup[J].ActaPhotonicaSinica,2004,33(5):529~532 恩 德,陈才和,崔宇明等.集成光学平板光盘读出头的研制[J].光子学报,2004,33(5):529~532
2 CaiheChen,DelongZhang,GuilanDing et al..BroadbandMichelson fiber optic accelerometer[J].Appl.Opt.,1999,38(4):628~630
3 FengPing,ChenCaihe,DingGuilan et al..The integratedoptic chip of the hybrid integrated optical accelerometer[J].ActaPhotonicaSinica,2000,29(Z1):430~433 冯 萍,陈才和,丁桂兰等.混合型集成光学加速度计集成光学芯片[J].光子学报,2000,29(Z1):431~433
4 HuangHui,HuHongzhang,LiYunna et al..IntegratedopticalTE/TM polarization splitter onLiNbO3 using titaniumdiffusion[J].ChineseJ.Lasers,2002,A29(3):249~252 黄 晖,胡鸿璋,李云娜等.集成光学TM/TE模分离器的研制[J].中国激光,2002,A29(3):249~252
5 LouLifang,ShengZhongyan,YaoKuihong et al..PECVDdeposition and characterization of thick silica film for opticalwaveguide[J].ActaOpticaSinica,2004,24(1):24~28 娄丽芳,盛钟延,姚奎鸿等.厚二氧化硅光波导薄膜制备及其特性分析[J].光学学报,2004,24(1):24~28
6 LiChun,AnYuying,ZengXiaodong.LiNbO3 electrooptictuning optical parametric oscillator[J].ActaOpticaSinica,2004,24(2):172~174 李 春,安毓英,曾晓东.LiNbO3电光调谐光学参变振荡器[J].光学学报,2004,24(2):172~174
7 TangDuoqiang,ZhangHaibin,HuHongzhang et al..Temperature property of integratedAOTF and its high accuracydigital control[J].ChineseJ.Lasers,2003,30(7):629~632 唐多强,张海斌,胡鸿璋等集成光学声光可调谐滤波器的温度特性及其精密数字控制[J].中国激光,2003,30(7):629~632
8 HuHongzhang,ZhangMei,XiaoLifeng.The characteristicsanalysis of an integrated optical acoustooptic tunable filter based onspectrometer[J].ActaOpticaSinica,2004,24(2):195~198 胡鸿璋,张 梅,肖立峰.集成光学声光可调谐光谱仪的特性分析[J].光学学报,2004,24(2):195~198
9 YangXudong,XuXinguang,ShaoYaopeng et al..Photovoltaic effect in doped photorefractiveLiNbO3 crystal[J].ActaOpticaSinica,2003,23(4):398~401 杨旭东,许心光,邵耀鹏等.掺杂光折变LiNbO3晶体光伏效应特性[J].光学学报,2003,23(4):398~401
10 XieHaiyan,HuHongzhang,ZhangShengjiaet al..Study andfabrication of integrated optical polarization independentreflector[J].ChineseJ.Lasers,2003,30(8):691~694 谢海宴,胡鸿璋,张胜甲等.偏振无关集成光学模反射镜的研制[J].中国激光,2003,30(8):691~694
11 QiHongji,ChengChuanfu,YuanJingmei et al..Morphologyanalysis of titanic thin film prepared by ion beam sputtering[J].ActaOpticaSinica,2003,23(4):480~484 齐红基,程传福,袁景梅等.用离子束溅射方法制备的钛薄膜表面形貌分析[J].光学学报,2003,23(4):480~484
12 LiaoWeijun,ChenXianfeng,ZengXianglonget al..Analyticalstudy of electrooptic modulator using annealed protonexchanged planar waveguide[J].ActaOpticaSinica,2003,23(7):865~869 廖尉钧,陈险峰,曾祥龙等.退火质子交换平面波导型电光调制器的研究[J].光学学报,2003,23(7):865~869
13 FangXiaoyong,CaoMaosheng.Theoretical study of laseracceleration sensor[J].ActaOpticaSinica,2003,23(9):1133~1137 房晓勇,曹茂盛.激光加速度传感器的理论研究[J].光学学报,2003,23(9):1133~1137
14 WanZhiyu,ChenGang,WenZhongquan et al..A hybridintegrated micro fiber spectrometer design, simulation andprimary experiments[J].ActaOpticaSinica,2003,23(6):740~744 温志渝,陈 刚,温中泉等.混合集成微型光纤光谱仪的设计模拟及实验[J].光学学报,2003,23(6):740~744
15 EnDe,ChenCaihe,CuiYuminet al..Study and fabrication onintegrated planar optic disk pickup[J].ActaPhotonicaSinica,2004,33(5):529~532 恩 德,陈才和,崔宇明等.集成光学平板光盘读出头的研制[J].光子学报,2004,33(5):529~532
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