TiAlSiN sputtered coatings were characterized for solar selective applications.
In situ synchrotron radiation XRD were studies show the occurrence of multiple stable phases.
A high selectivity of 24.63 has been achieved for the coatings annealed at 700 °C.
Existence of XRD phases were also confirmed by XPS measurements.
At high temperature annealing the mechanical properties of films were governed by the utmost surfaces of the films.