Precision Structural Engineering of Self-Rolled-up 3D Nanomembranes Guided by Transient Quasi-Static FEM Modeling
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- 作者：Wen Huang ; Seid Koric ; Xin Yu ; K. Jimmy Hsia ; Xiuling Li
- 刊名：Nano Letters
- 出版年：2014
- 出版时间：November 12, 2014
- 年：2014
- 卷：14
- 期：11
- 页码：6293-6297
- 全文大小：281K
- ISSN：1530-6992
文摘
Micro- and nanoscale tubular structures can be formed by strain-induced self-rolled-up nanomembranes. Precision engineering of the shape and dimension determines the performance of devices based on this platform for electronic, optical, and biological applications. A transient quasi-static finite element method (FEM) with moving boundary conditions is proposed as a general approach to design diverse types of three-dimensional (3D) rolled-up geometries. This method captures the dynamic release process of membranes through etching driven by mismatch strain and accurately predicts the final dimensions of rolled-up structures. Guided by the FEM modeling, experimental demonstration using silicon nitride membranes was achieved with unprecedented precision including controlling fractional turns of a rolled-up membrane, anisotropic rolling to form helical structures, and local stress control for 3D hierarchical architectures.