Photoinduced processes in thin films of MoO₃ and mixed V₂O₅: MoO₃ oxides

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• 作者：T. V. Sviridova ; L. Yu. Sadovskaya…
• 关键词：molybdenum oxide ; vanadium oxide ; photopolymerization ; photolithography ; thin films ; inorganic photoresist materials
• 刊名：Russian Journal of Physical Chemistry B, Focus on Physics
• 出版年：2016
• 出版时间：July 2016
• 年：2016
• 卷：10
• 期：4
• 页码：561-565
• 全文大小：545 KB
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Physical Chemistry
  Russian Library of Science
  
• 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
• ISSN：1990-7923
• 卷排序：10

文摘

Photoinduced processes in thin films of MoO₃ and mixed V₂O₅: MoO₃ oxides prepared by polycondensation of the respective oxoacids under solvothermal conditions are studied using Raman spectroscopy, ESR, and AFM. It is shown that, under UV irradiation, the photoinduced polycondensation occurs in the oxide films, leading to the formation of the oxygen bridges, an effect that opens up the possibility of developing a new photolithographic process.