Structural and mechanical characterization of Cr-Ta-N hard coatings prepared by reactive magnetron sputtering

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• 作者：Saha ; R. ; Inturi ; R.B. ; Barnard ; J.A.
• 关键词：Hard coatings ; Thin films ; Chromium nitride ; Tantalum nitride
• 刊名：Surface and Coatings Technology
• 出版年：1996
• 期刊代码：106_02578972
• 类别：ms
• 出版时间：July, 1996
• 卷：82
• 期：1-2
• 页码：42-47
• 文件大小：489 K

摘要

The tribological and mechanical properties of hard coating materials may be improved through alloying. In this study, Cr-N coatings are alloyed with Ta and the resulting structure and mechanical properties were studied. Cr-Ta-N coatings with a range of Ta concentrations were deposited on oxidized silicon substrates in a reactive Ar + N₂ atmosphere by using a d.c. magnetron sputtering unit. Pure Cr-N and Ta-N films were also deposited for comparison purposes. The composition and structure of the coatings were evaluated by electron microprobe analyzer and X-ray diffraction respectively. The hardness and elastic moduli of the coatings were measured by nanoindentation as a function of composition and nitrogen partial pressure.