Ripple surface generated on hydrogenated amorphous carbon nitride films

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• 作者：Chengbing Wang ; Shengrong Yang ; Junyan Zhang
• 关键词：Carbon nitride films ; Ripple morphology
• 刊名：Applied Surface Science
• 出版年：2007
• 期刊代码：6_01694332
• 类别：ms
• 出版时间：15 February 2007
• 卷：253
• 期：8
• 页码：4099-4102
• 文件大小：536 K

摘要

It is reported for the first time that the periodical ripple surface feature at micrometer-scale was observed on hydrogenated amorphous carbon nitride films deposited by pulse plasma chemical vapor deposition (CVD) technique. Nitrogen incorporation to hydrogenated amorphous carbon films and the different growing environments of pulse dc plasma discharge perhaps played crucial role in the surface morphology transformation of hydrogenated amorphous carbon nitride films.