Gallium nitride growth on sapphire/GaN templates at high pressure and high temperatures
详细信息查看全文 | 推荐本文 |
摘要
In this paper the results of directional high-pressure growth of GaN on sapphire/GaN MOCVD templates are described. The use of a baffle plate is presented, in order to obtain the flat crystallization front at the substrate. The GaN growth rate as a function of the applied temperature gradient and time is analyzed in detail. The optimal temperature gradient for the fastest growth is determined. The changes of the growth rate with time are explained. The defect selective etching method and transmission electron microscopy are used to determine the dislocation density in the deposited GaN material. All results are compared to those obtained for directional growth of GaN on pressure grown GaN crystals (platelets).

© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号

地址:北京市海淀区学院路29号 邮编:100083

电话:办公室:(+86 10)66554848;文献借阅、咨询服务、科技查新:66554700