Properties of SnO₂ films fabricated using a rectangular filtered vacuum arc plasma source

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• 作者：V.N. Zhitomirsky ; E. Ç ; etinö ; rg&#xfc ; R.L. Boxman ; S. Goldsmith
• 关键词：Filtered vacuum arc deposition ; Rectangular macroparticle filter ; SnO₂ films ; Resistivity ; Optical properties ; Tin oxide ; Thin films
• 刊名：Thin Solid Films
• 出版年：2008
• 期刊代码：78_00406090
• 类别：ph
• 出版时间：2 June 2008
• 卷：516
• 期：15
• 页码：5079-5086
• 文件大小：793 K

摘要

Transparent and conducting SnO₂ films of 57–200nm thickness were deposited on microscope glass slide substrates, using a rectangular filtered vacuum arc deposition system. The 40 glass slides were equally distributed on a 400 × 420mm substrate carriage, and were exposed to a Sn plasma beam, produced by a rectangular vacuum arc plasma gun with a Sn cathode, and passed through a rectangular magnetic macroparticle filter towards the substrates. The carriage with the substrates was transported past the 94 × 494mm filter outlet. The SnO₂ films were fabricated on the glass substrates at room temperature by maintaining the chamber oxygen background pressure at 0.52Pa. The film composition, and electrical and optical properties were studied as a function of the film thickness. The films were stored under ambient air conditions, and their electrical resistance was measured as a function of storage time over a period of several months.