离轴非球面的条纹反射检测技术
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摘要
条纹反射测量技术具有动态范围大、灵敏度高的特点,通过高精度的系统标定可以获得很高的测量精度。本文研究将条纹反射测量技术应用于离轴非球面反射镜粗抛光阶段的面形检测,使用激光跟踪仪建立检测系统坐标系,然后将相机和显示屏的实测标定数据代入坐标系并在Zemax软件中建立测量装置的理想模型,通过光线追迹得到理想的屏幕像素点位置,采用相移技术可以得到实测时屏幕像素点位置,从而计算得到被测镜面形的斜率误差,最后积分得到检测结果。文中采用该方法对一块SiC离轴非球面镜进行了实测,并与三坐标测量机的结果进行对比,验证了方法的可行性,可用于指导离轴非球面镜粗抛光阶段的加工。
In this paper, the FRT(fringe reflection technique) is used for the off-axis aspheric surface measurement during the manufacture stage of the beginning of polish, duo to its advantage of large dynamic range and high sensitivity. The measurement system coordinate and ray trace model are build using the laser tracker, and the calibration results of the camera calibration and screen calibration are introduced into the Zemax model and the ideal screen pixel point position can be got by ray tracing. The measurement of screen pixel point position is obtained by phase-shifting technique. The slope error of the surface is calculated and final results are got by integration. The measurement results of a Si C off-axis mirror obtained by the presented method and the CMM are compared and feasibility is verified. This method can be used to guide the manufacture of off-axis aspheric surface during the beginning of the polish.
In this paper, the FRT(fringe reflection technique) is used for the off-axis aspheric surface measurement during the manufacture stage of the beginning of polish, duo to its advantage of large dynamic range and high sensitivity. The measurement system coordinate and ray trace model are build using the laser tracker, and the calibration results of the camera calibration and screen calibration are introduced into the Zemax model and the ideal screen pixel point position can be got by ray tracing. The measurement of screen pixel point position is obtained by phase-shifting technique. The slope error of the surface is calculated and final results are got by integration. The measurement results of a Si C off-axis mirror obtained by the presented method and the CMM are compared and feasibility is verified. This method can be used to guide the manufacture of off-axis aspheric surface during the beginning of the polish.
引文
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[4]Cheng H B.Touch trigger probe measurement accuracy of aspheric mirror during fine lapping process[J].Chinese Journal of Mechanical Engineering,2005,41(8):228–232.程灏波.精研磨阶段非球面面形接触式测量误差补偿技术[J].机械工程学报,2005,41(8):228–232.
[5]Lin C Q,Jing H W,Kuang L,et al.Measuring technique for off-axis aspherical mirror in fine grinding process using coordinate measurement machine[J].High Power Laser and Particle Beams,2012,24(11):2665–2668.林长青,景洪伟,匡龙,等.离轴非球面镜精磨阶段的三坐标检测技术[J].强激光与离子束,2012,24(11):2665–2668.
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[7]Su P,Parks R E,Wang L R,et al.Software configurable optical test system:a computerized reverse Hartmann test[J].Applied Optics,2010,49(23):4404–4412.
[8]Huang R,Su P,Burgea J H.Deflectometry measurement of Daniel K.Inouye solar telescope primary mirror[J].Proceedings of the SPIE,2015,9575:957515.
[9]Yuan T,Zhang F,Tao X P,et al.Test of optical mirror surface using fringe reflection system[J].Acta Photonica Sinica,2015,44(9):0912004.袁婷,张峰,陶小平,等.条纹反射法检测光学反射镜面形[J].光学学报,2015,44(9):0912004.
[10]Yang L J,Li D H,E K W,et al.Surface measurement of optical element based on the pre–calibrating camera[J].Optics&Optoelectronic Technology,2016,14(3):42–48.杨丽杰,李大海,鄂可伟,等.基于空间直线预标定检测光学元件面形的研究[J].光学与光电技术,2016,14(3):42–48.
[11]Xiao J,Wei X D,Lu Z W.A fast surface shape measurement method for the parabolic trough solar concentrator based on deflectometry[J].Chinese Journal of Lasers,2013,40(12):1208006.肖君,魏秀东,卢振武.基于偏折原理的太阳能槽式聚光器面形快速检测方法[J].中国激光,2013,40(12):1208006.
[12]Zhao W C,Fan B,Wu F,et al.Experimental analysis of reflector test based on phase measuring deflectometry[J].Acta Optica Sinica,2013,33(1):0112002.赵文川,范斌,伍凡,等.基于PMD的反射镜面检测实验分析[J].光学学报,2013,33(1):0112002.
[13]Liu Y K,Su X Y,Wu Q Y.Three-dimensional shape measurement for specular surface based on fringe reflection[J].Acta Optica Sinica,2006,26(11):1636–1640.刘元坤,苏显渝,吴庆阳.基于条纹反射的类镜面三维面形测量方法[J].光学学报,2006,26(11):1636–1640.
[14]Huang R,Su P,Burge J H,et al.High-accuracy aspheric x-ray mirror metrology using software configurable optical test system/deflectometry[J].Optical Engineering,2015,54(8):084103.
[15]Jing H L,Su X Y,Liu Y K.Shape reconstruction methods from gradient field[J].Laser Journal,2007,28(6):41–43.荆海龙,苏显渝,刘元坤.基于梯度数据的三维面形重建方法[J].激光杂志,2007,28(6):41–43.
[16]Jing H L,Su X Y,Liu Y K.Specular surface measurement based on fringe reflection and analysis of 3D shape reconstruction technique[J].Opto-Electronic Engineering,2008,35(10):37–42.荆海龙,苏显渝,刘元坤.基于条纹反射的镜面测量及三维重建算法分析[J].光电工程,2008,35(10):37–42.
[17]Parks R E,Kuhn W P.Optical alignment using the point source microscope[J].Proceedings of SPIE,2005,5877:102–116.
[18]Su X Y,Chen W J.Reliability-guided phase unwrapping algorithm:a review[J].Optics and Lasers in Engineering,2004,42(3):245–261.
[2]Lin J,Cui Q F,Zhu H.Research of broad width off-axis three mirror optical system[J].Acta Optica Sinica,2013,33(7):0722002.林晶,崔庆丰,朱浩.宽幅离轴三反光学系统研究[J].光学学报,2013,33(7):0722002.
[3]Wu Z H,Yuan L J,Zhu Y T,et al.Technology of wavefront retrieval for off-axis aspheric surface in the stage of fine-grinding and rough-polishing[J].Acta Photonica Sinica,2017,46(3):123–129.武中华,袁吕军,朱永田,等,离轴非球面在细磨与粗抛阶段的波面再现技术[J].光子学报,2017,46(3):123–129.
[4]Cheng H B.Touch trigger probe measurement accuracy of aspheric mirror during fine lapping process[J].Chinese Journal of Mechanical Engineering,2005,41(8):228–232.程灏波.精研磨阶段非球面面形接触式测量误差补偿技术[J].机械工程学报,2005,41(8):228–232.
[5]Lin C Q,Jing H W,Kuang L,et al.Measuring technique for off-axis aspherical mirror in fine grinding process using coordinate measurement machine[J].High Power Laser and Particle Beams,2012,24(11):2665–2668.林长青,景洪伟,匡龙,等.离轴非球面镜精磨阶段的三坐标检测技术[J].强激光与离子束,2012,24(11):2665–2668.
[6]Li J,Wu F,Wu S B,et al.Using a laser tracker to measure the surface of off-axis aspheric mirror during grinding[J].Acta Optica Sinica,2012,32(1):0112002.李杰,伍凡,吴时彬,等.使用激光跟踪仪测量研磨阶段离轴非球面面形[J].光学学报,2012,32(1):0112002.
[7]Su P,Parks R E,Wang L R,et al.Software configurable optical test system:a computerized reverse Hartmann test[J].Applied Optics,2010,49(23):4404–4412.
[8]Huang R,Su P,Burgea J H.Deflectometry measurement of Daniel K.Inouye solar telescope primary mirror[J].Proceedings of the SPIE,2015,9575:957515.
[9]Yuan T,Zhang F,Tao X P,et al.Test of optical mirror surface using fringe reflection system[J].Acta Photonica Sinica,2015,44(9):0912004.袁婷,张峰,陶小平,等.条纹反射法检测光学反射镜面形[J].光学学报,2015,44(9):0912004.
[10]Yang L J,Li D H,E K W,et al.Surface measurement of optical element based on the pre–calibrating camera[J].Optics&Optoelectronic Technology,2016,14(3):42–48.杨丽杰,李大海,鄂可伟,等.基于空间直线预标定检测光学元件面形的研究[J].光学与光电技术,2016,14(3):42–48.
[11]Xiao J,Wei X D,Lu Z W.A fast surface shape measurement method for the parabolic trough solar concentrator based on deflectometry[J].Chinese Journal of Lasers,2013,40(12):1208006.肖君,魏秀东,卢振武.基于偏折原理的太阳能槽式聚光器面形快速检测方法[J].中国激光,2013,40(12):1208006.
[12]Zhao W C,Fan B,Wu F,et al.Experimental analysis of reflector test based on phase measuring deflectometry[J].Acta Optica Sinica,2013,33(1):0112002.赵文川,范斌,伍凡,等.基于PMD的反射镜面检测实验分析[J].光学学报,2013,33(1):0112002.
[13]Liu Y K,Su X Y,Wu Q Y.Three-dimensional shape measurement for specular surface based on fringe reflection[J].Acta Optica Sinica,2006,26(11):1636–1640.刘元坤,苏显渝,吴庆阳.基于条纹反射的类镜面三维面形测量方法[J].光学学报,2006,26(11):1636–1640.
[14]Huang R,Su P,Burge J H,et al.High-accuracy aspheric x-ray mirror metrology using software configurable optical test system/deflectometry[J].Optical Engineering,2015,54(8):084103.
[15]Jing H L,Su X Y,Liu Y K.Shape reconstruction methods from gradient field[J].Laser Journal,2007,28(6):41–43.荆海龙,苏显渝,刘元坤.基于梯度数据的三维面形重建方法[J].激光杂志,2007,28(6):41–43.
[16]Jing H L,Su X Y,Liu Y K.Specular surface measurement based on fringe reflection and analysis of 3D shape reconstruction technique[J].Opto-Electronic Engineering,2008,35(10):37–42.荆海龙,苏显渝,刘元坤.基于条纹反射的镜面测量及三维重建算法分析[J].光电工程,2008,35(10):37–42.
[17]Parks R E,Kuhn W P.Optical alignment using the point source microscope[J].Proceedings of SPIE,2005,5877:102–116.
[18]Su X Y,Chen W J.Reliability-guided phase unwrapping algorithm:a review[J].Optics and Lasers in Engineering,2004,42(3):245–261.