精密加工平台隔振系统多频振动控制
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摘要
近年来,随着精密加工与精密测量等技术的发展,微振动对加工精度和测量灵敏度的影响变得十分突出;传统的被动隔振器由于结构和参数固定,不能满足复杂激励环境下的隔振要求;主动隔振能量消耗大,且高频易失稳;以磁流变弹性体为代表的半主动控制技术不仅具有功耗低、稳定性好等特点,还能根据外界激励变化实时调节参数,成为振动控制领域的研究热点。针对精密加工平台系统中存在的多频振动问题和隔振系统的非线性,提出采用磁流变弹性体隔振器和分频模糊控制相结合的方法;建立了磁流变弹性体隔振系统动力学模型,推导适用于磁流变弹性体隔振系统的半主动控制条件,针对多频振动设计不依赖于系统模型的分频模糊控制器。通过控制试验验证了所设计控制器的有效性;与常规模糊控制器相比,所提方法对多频振动具有更好的抑制。
Recently, with the development of precision machining and precision measurement technology, how to reduce the micro-vibration in precision fabrication platforms has attracted more attention. The existing micro-vibration control methods mainly are the passive and active vibration isolation methods. However, the mentioned two methods have their own limitations. As the structure and parameters are fixed, the traditional passive vibration isolator has a poor adaptability for various kinds of vibrations. The active one with high power consumption is unstable for high frequency vibration isolation. As a typical semi-active control technology, magnetorheological elastomer(MRE) with the advantages of low power consumption and good stability has become a hotspot in vibration control fields, whose parameters such as stiffness and damping in real time can be adjusted according to the external excitation. In the paper,a MRE isolator combined with a fuzzy controller(FC) was used to suppress the vibration of the platform under multi-frequency excitations and to deal with the nonlinearity of the isolation system. The model of MRE isolation was established, and the semi-active control conditions applicable to the MRE vibration isolation system were derived. Considering the high nonlinearity of the MRE isolator and the multiple frequency excitation, a frequency-division FC was designed. The effectiveness of the designed controller was verified by control experiments. The designed controller is independent of the system's precise model and can maintain the vibration attenuation performance at a satisfactory level.
Recently, with the development of precision machining and precision measurement technology, how to reduce the micro-vibration in precision fabrication platforms has attracted more attention. The existing micro-vibration control methods mainly are the passive and active vibration isolation methods. However, the mentioned two methods have their own limitations. As the structure and parameters are fixed, the traditional passive vibration isolator has a poor adaptability for various kinds of vibrations. The active one with high power consumption is unstable for high frequency vibration isolation. As a typical semi-active control technology, magnetorheological elastomer(MRE) with the advantages of low power consumption and good stability has become a hotspot in vibration control fields, whose parameters such as stiffness and damping in real time can be adjusted according to the external excitation. In the paper,a MRE isolator combined with a fuzzy controller(FC) was used to suppress the vibration of the platform under multi-frequency excitations and to deal with the nonlinearity of the isolation system. The model of MRE isolation was established, and the semi-active control conditions applicable to the MRE vibration isolation system were derived. Considering the high nonlinearity of the MRE isolator and the multiple frequency excitation, a frequency-division FC was designed. The effectiveness of the designed controller was verified by control experiments. The designed controller is independent of the system's precise model and can maintain the vibration attenuation performance at a satisfactory level.
引文
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[15] DU H P,LI W H,ZHANG N.Semi-active variable stiffness vibration control of vehicle seat suspension using an MR elastomer isolator[J].Smart Materials and Structures,2011,20(10):105003.
[16] YU Y,ROYEL S,LI J C.Magnetorheological elastomer base isolator for earthquake response mitigation on building structures:modeling and second-order sliding mode control [J].Earthquake and Structures,2016,11(6):943-966.
[17] FU J,YU M,XING Z W.PID control for magnetorheological elastomer absorber with impact load[J].Applied Mechanics & Materials,2011,121:1734-1738.
[18] JUNG H J,EEM S H,JANG D D,et al.Seismic performance analysis of a smart base-isolation system considering dynamics of MR elastomers[J].Journal of Intelligent Material Systems & Structures,2011,22(13):1439-1450.
[19] YANG J,SUN S S,TIAN T F,et al.Development of a novel multi-layer MRE isolator for suppression of building vibrations under seismic events[J].Mechanical Systems and Signal Processing,2016,70/71:811-820.
[20] FU Jie,LI Peidong,WANG Yuan,et al.Model-free fuzzy control of magnetorheological elastomer vibration isolation system:analysis and experimental evaluation[J].Smart Materials and Structures,2016,25(3):035030.
[21] FU J,LI P,LIAO G,et al.Development and dynamic characterization of a mixed mode magnetorheological elastomer isolator[J].IEEE Transactions on Magnetics,2016,53(1):1-4.
[ 2 ] 中华人民共和国住房和城乡建设部.建筑工程容许振动标准:GB 50868—2013[S].北京:中国计划出版社,2013.
[ 3 ] AMICK H,SENNEWALD B,PARDUE N C.Analytical experimental study of vibration of a room-sized airspring-supported slab[J].Noise Control Engineering Journal,1998,46(2):39-47.
[ 4 ] GU G Y,ZHU L M,SU C Y.High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer[J].Smart Materials and Structures,2014,23(10):10500710.
[ 5 ] JU B X,YU M,FU J,et al.A novel porous magnetorheological elastomer:preparation and evaluation[J].Smart Materials and Structures,2012,21(3):035001.
[ 6 ] LIAO G J,GONG X L,XUAN S H,et al.Development of a real-time tunable stiffness and damping vibration isolator based on magnetorheological elastomer[J].Journal of Intelligent Material Systems & Structures,2012,23(1):25-33.
[ 7 ] 索思,徐赵东,朱俊涛.基于磁流变弹性体的平台竖向隔振研究[J].地震工程与工程振动,2015,35(5):61-67.SUO Si,XU Zhaodong,ZHU Juntao.Study on vertical vibration isolation of platform based on magnetorheological elastomer[J].Journal of Earthquake Engineering and Engineering Vibration,2015,35(5):61-67.
[ 8 ] PANG H,XUAN S,SUN C,et al.A novel energy absorber based on magnetorheological gel[J].Smart Materials and Structures,2017,26(10):105017.
[ 9 ] 陈泽强,朱炜,芮筱亭,等.基于磁流变弹性体的坦克发动机减振研究[J].噪声与振动控制,2017,37(1):72-75.CHEN Zeqiang,ZHU Wei,RUI Xiaoting,et al.Study on vibration reduction of the tank engines based on MRE[J].Noise and Vibration Control,2017,37(1):72-75.
[10] 朱秘,余淼,浮洁,等.基于磁流变弹性体的缓冲装置设计及其冲击响应特性研究[J].振动与冲击,2017,36(4):172-177.ZHU Mi,YU Miao,FU Jie,et al.An experimental study on shock response characteristicsof magnetorheological elastomer-based buffer [J].Journal of Vibration and Shock,2017,36(4):172-177.
[11] FU J,WANG Y,LI P D,et al.Research on hybrid Isolation system for micro-nano-fabrication platform[J].Advances in Mechanical Engineering,2014:243247.
[12] BEHROUZ M.WANG X J,GORDANINEJAD F.Performance of a new magnetorheological elastomer isolation system[J].Smart Materials and Structures,2014,23(4):045014.
[13] OPIE S,YIM W.Design and control of a real-time variable modulus vibration isolator[J].Journal of Intelligent Material Systems & Structures,2011,22(2):113-125.
[14] KOO J H,JANG D D,USMAN M,et al.A feasibility study on smart base isolation systems using magneto-rheological elastomers[J].Structural Engineering & Mechanics,2009,32(6):755-770.
[15] DU H P,LI W H,ZHANG N.Semi-active variable stiffness vibration control of vehicle seat suspension using an MR elastomer isolator[J].Smart Materials and Structures,2011,20(10):105003.
[16] YU Y,ROYEL S,LI J C.Magnetorheological elastomer base isolator for earthquake response mitigation on building structures:modeling and second-order sliding mode control [J].Earthquake and Structures,2016,11(6):943-966.
[17] FU J,YU M,XING Z W.PID control for magnetorheological elastomer absorber with impact load[J].Applied Mechanics & Materials,2011,121:1734-1738.
[18] JUNG H J,EEM S H,JANG D D,et al.Seismic performance analysis of a smart base-isolation system considering dynamics of MR elastomers[J].Journal of Intelligent Material Systems & Structures,2011,22(13):1439-1450.
[19] YANG J,SUN S S,TIAN T F,et al.Development of a novel multi-layer MRE isolator for suppression of building vibrations under seismic events[J].Mechanical Systems and Signal Processing,2016,70/71:811-820.
[20] FU Jie,LI Peidong,WANG Yuan,et al.Model-free fuzzy control of magnetorheological elastomer vibration isolation system:analysis and experimental evaluation[J].Smart Materials and Structures,2016,25(3):035030.
[21] FU J,LI P,LIAO G,et al.Development and dynamic characterization of a mixed mode magnetorheological elastomer isolator[J].IEEE Transactions on Magnetics,2016,53(1):1-4.