端面腐蚀的双法布里-珀罗光纤温度传感器
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摘要
针对环境测温,特别是在复杂环境中温度传感器的小体积、低成本、抗干扰以及高灵敏度的要求,提出了基于端面腐蚀的双法布里-珀罗光纤温度传感探头。以长为2cm的光子晶体光纤作为第一个F-P腔体,在它的一个端面熔接普通单模光纤,熔接面形成第一个反射镜面;然后,在它另一个端面熔接多模光纤,熔接面形成第二个反射镜面;最后,以多模光纤作为第二个F-P腔体,并用氢氟酸将其刻蚀成探针结构,同时在腔体末端形成了第三个反射镜面。以此复合结构作为传感探头,结合多光束干涉的传感原理,构造了双F-P结构的波长调制型传感器,并搭建了温度传感测试系统。测试结果表明:在28～81℃内,随着温度增加,该传感器的反射光谱波长逐渐红移,温度与波长偏移量的线性相关系数高达0.998 37;该传感器传感性能良好,灵敏度达64.6pm/℃。该传感器在复杂环境中对小范围温度测量具有潜在的应用价值。
To fulfill the requirements of small volume,low cost,anti-interference ability,high sensitivity,and real-time and accurate temperature measurement in a complex environment,a double Fabry-Pérot(F-P)fiber optical temperature sensor based on end-face corrosion was proposed.The sensor was fabricated by fusion Endlessly Photonic Crystal Fiber(EPCF)with a Multi-Mode Fiber(MMF).There are three F-P reflectors:one between the Single-Mode Fiber(SMF)and EPCF,one between EPCF and MMF,and one at the interface of MMF and air.The first F-P cavity was formed by the fusion of a SMF and a 2-cm EPCF,the second F-P cavity was formed by fusion splicing an MMF and EPCF;finally,aprobe structure was obtained by hydrofluoric acid etching.A wavelength modulation sensor with double F-P structure was constructed by using the composite structure as the sensing probe and the multi-beam interference sensing principle.Simultaneously,a temperature sensing test system was constructed.Results show that in the range of 28-81 ℃,the wavelengths of the reflection spectra appear red-shifted with increasing temperature,and the linearity between temperature and wavelength shift is 0.998 37.The sensor has high sensitivity,which reaches up to64.6 pm/℃.These sensors may have a potential application for small-range temperature measurements in complex environments.
To fulfill the requirements of small volume,low cost,anti-interference ability,high sensitivity,and real-time and accurate temperature measurement in a complex environment,a double Fabry-Pérot(F-P)fiber optical temperature sensor based on end-face corrosion was proposed.The sensor was fabricated by fusion Endlessly Photonic Crystal Fiber(EPCF)with a Multi-Mode Fiber(MMF).There are three F-P reflectors:one between the Single-Mode Fiber(SMF)and EPCF,one between EPCF and MMF,and one at the interface of MMF and air.The first F-P cavity was formed by the fusion of a SMF and a 2-cm EPCF,the second F-P cavity was formed by fusion splicing an MMF and EPCF;finally,aprobe structure was obtained by hydrofluoric acid etching.A wavelength modulation sensor with double F-P structure was constructed by using the composite structure as the sensing probe and the multi-beam interference sensing principle.Simultaneously,a temperature sensing test system was constructed.Results show that in the range of 28-81 ℃,the wavelengths of the reflection spectra appear red-shifted with increasing temperature,and the linearity between temperature and wavelength shift is 0.998 37.The sensor has high sensitivity,which reaches up to64.6 pm/℃.These sensors may have a potential application for small-range temperature measurements in complex environments.
引文
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[2]赵斌,仲志成,林君,等.基于光纤光栅传感地层应力的监测方法与实验[J].光学精密工程,2016,24(10):346-352.HAO B,ZHONG ZH CH,LIN J,et al..Monitoring method and experiment for stratum stress based on fiber Bragg grating sensing[J].Opt.Precision Eng.,2016,24(10):346-352.(in Chinese)
[3]吴晶,吴晗平,黄俊斌,等.用于船舶结构监测的大量程光纤布拉格光栅应变传感器[J].光学精密工程,2014,22(2):311-317.WU J,WU H P,HUANG J H,et al..Large range FBG sensor for ship structure health monitoring[J].Opt.Precision Eng.,2014,22(2):311-317.(in Chinese)
[4]李自亮,廖常锐,刘申,等.光纤法布里-珀罗干涉温度压力传感技术研究进展[J].物理学报,2017,66(7):102-118.LI Z L,LIAO CH R,LIU SH,et al..Research progress of optical fiber Fabry-Pérot interference temperature pressure sensing technology[J].Acta Phys.Sin.,2017,66(7):102-118.(in Chinese)
[5]ZHAN G C,TONG X Y,SONG L P,et al..Research progress and development of sapphire fiber sensor[J].Sens.Transducers,2014,174:8-13.
[6]SLONEKER K C.Life expectancy study of small diameter type E,K,and N mineral-insulated thermocouples above 1 000℃in air[J].Int.J.Thermophys.,2011,32:537-547.
[7]张晓龙,刘英,王健,等.不同非均匀性校正温度的红外测温技术[J].中国光学,2014,7(1):150-155.ZHANG X L,LIU Y,WANG J,et al..Infrared thermometry technology with different nonuniformity correction temperatures[J].Chinese Optics,2014,7(1):150-155.(in Chinese)
[8]SAUNDERS P,FISCHER J,SADLI M,et al..Uncertainty budgets for calibration of radiatio thermometers below the silver point[J].Int.J.Thermophys.,2008,29:1066-1083.
[9]HAO X,YUAN Z,LU X,et al..Size-of-source effect difference between direct and indirect methods of radiation thermometers[J].Int.J.Thermophys.,2011,32:1655-1663.
[10]CHOI H Y,PARK K S,PARK S J,et al..Miniature fiber-optic high temperature sensor based on a hybrid structured Fabry-Pérot interferometer[J].Opt.Lett.,2008,33(21):2455-2457.
[11]刘加萍,王彦,刘吉虹.非本征光纤法布里-珀罗干涉传感器的温度特性[J].激光与光电子学进展,2017(11):65-70.LIU J P,WANG Y,LIU J H.Temperature characteriston of extrinsic fiber Fabry-Pérot interferometric sensor[J].Laser&Optoelectronics Progress,2017(11):65-70.(in Chinese)
[12]ZHANG X,PENG W,SHAO L Y,et al..Strain and temperature discrimination by using temperature-independent FPI and FBG[J].Sens.Actuators A:Phys.,2018,272:134-138.
[13]CHEN Z,XIONG S,GAO S,et al..High-temperature sensor based on Fabry-Pérot interferometer in microfiber tip[J].Sensors,2018,18(1):202-208.
[14]YU H,WANG Y,MA J,et al..Fabry-Pérot interferometric high-temperature sensing up to 1200℃based on a silica glass photonic crystal fiber[J].Sensors,2018,18(1):273-281.
[15]KOU J L,FENG J,YE L,et al..Miniaturized fiber taper reflective interferometer for high temperature measurement[J].Opt.Express,2010,18(13):14245-14250.
[16]JIA P,FANG G,LIANG T,et al..Temperaturecompensated fiber-optic Fabry-Pérot interferometric gas refractive-index sensor based on hollow silica tube for high-temperature application[J].Sens.Actuators B:Chem.,2017,244:226-232.
[17]FERREIRA M S,COELHO L,SCHUSTER K,et al..Fabry-Pérot cavity based on a diaphragmfree hollow-core silica tube[J].Opt.Express,2011,36:4029-4031.
[18]QUAN M G,TIAN J J,YAO Y.Ultra-high sensitivity Fabry-Pérot interferometergas refractive index fiber sensor based on photonic crystal fiber and Vernier effect[J].Opt.Lett.,2015,24:4891-4894.
[19]TAN X,LI X,GENG Y,et al..Polymer microbubble-based Fabry-Pérot fiber interferometer and sensing applications[J].IEEE Photonics Technol.Lett.,2015,27:2035-2038.
[20]段丹阳,程进,高然,等.基于光纤法布里-珀罗干涉仪的温度传感器[J].传感器与微系统,2017,36(4):124-127.DUAN D Y,CHENG J,GAO R,et al..Temperature sensor based on fiber Fabry-Pérot interferometer[J].Transducer and Microsystem Technologies,2017,36(4):124-127.(in Chinese)