微机械加速度计的研究现状综述
摘要
随着微机械加工技术的不断进步以及微机械加速度计市场占有率的逐步扩大,各种类型的微机械加速度计层出不穷,其中以电容检测式微机械加速度计发展的最为迅速且产业化水平最高,其次是压阻式、压电式、热对流式、隧道电流式、谐振式,以及近年来成为研究热点的光学式加速度计。本文详细阐述了国内外已报道的各种类型微机械加速度计的结构、原理、制造工艺和性能指标,并对不同精度微机械加速度计的产业化发展现状和市场应用情况进行了总结。新材料、新机理、纳米尺度、智能化以及更高的性能指标将是今后几年微机械加速度计的主要发展趋势,也将在MEMS/NEMS领域掀起新一轮的研究热潮。
引文
[1]Tseng S H,Lu M S C,Wu P C,et al.Implementation of a monolithic capacitive accelerometer in a wafer-level 0.18μm CMOS MEMS process[J].Journal of Micromechanics and Microengineering,2012,22(5):055010.
[2]Je C H,Lee S,Lee M L,et al.Z-axis capacitive MEMS accelerometer with moving ground masses[C]//Sensors,2010 IEEE.IEEE,2010:635-638.
[3]Perlmutter M,Robin L.High-performance,low cost inertial MEMS:A market in motion![C]//Position Location and Navigation Symposium(PLANS),2012 IEEE/ION.IEEE,2012:225-229.
[4]Jiang X S,Wang F Y,Kraft M,et al.An integrated surface micromachined capacitive lateral accelerometer with2μg/√Hz resolution[J].Solid-State Sensor.Actuator and Microsystems Workshop,Hilton Head Island,South Carolina,2002:202-205.
[5]Yazdi N,Najafi K.An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process[J].Microelectromechanical Systems,Journal of,2000,9(4):544-550.
[6]曹学成.电容式微机械加速度计的研究[D].杭州:浙江大学,2007:15-18.
[7]Monajemi P,Ayazi F.Design optimization and implementation of a microgravity capacitive HARPSS accelerometer[J].Sensors Journal,IEEE,2006,6(1):39-46.
[8]Tan S S,Liu C Y,Yeh L K,et al.A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability[J].Journal of Micromechanics and Microengineering,2011,21(3):035005.
[9]Aydin O,Akin T.A bulk micromachined fully-differential MEMS accelerometer with interdigitated fingers[C]//Sensors,2012 IEEE.IEEE,2012:1-4.
[10]Zwahlen P,Dong Y,Nguyen A M,et al.Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer[C]//Position Location and Navigation Symposium(PLANS),2012 IEEE/ION.IEEE,2012:15-19.
[11]Zhang Y,Yang G,Gao C,et al.A MEMS sandwich differential capacitive silicon-on-insulator accelerometer[J].Microsystem Technologies,2013:1-6.
[12]Liu M,Chi B,Liu Y,et al.A closed-loop MEMS accelerometer with capacitive sensing interface ASIC[J].International Journal of Electronics,2013,100(1):21-35.
[13]Tsai M H,Liu Y C,Fang W.A three-axis CMOSMEMS accelerometer structure with vertically integrated fully differential sensing electrodes[J].Journal of Microelectromechanical Systems,2012,21(6):1329-1337..
[14]Yazdi N,Ayazi F,Najafi K.Micromachined inertial sensors[J].Proceedings of the IEEE,1998,86(8):1640-1659.
[15]Qu H,Fang D,Xie H.A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise,low-power dualchopper amplifier[J].IEEE Sensor Journal,2008,8(9):1511-1518.
[16]Tsai M H,Liu Y C,Sun C M,et al.A CMOS-MEMS accelerometer with tri-axis sensing electrodes arrays[J].Procedia Engineering,2010,5:1083-1086.
[17]Gonenli I E,Celik-Butler Z,Butler D P.Surface micromachined MEMS accelerometers on flexible polyimide substrate[J].Sensors Journal,IEEE,2011,11(10):2318-2326.
[18]Khir M H M,Qu P,Qu H.A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass[J].Sensors,2011,11(8):7892-7907.
[19]Zhao Y,Li X,Liang J,et al.Design,fabrication and experiment of a MEMS piezoresistive high-g accelerometer[J].Journal of Mechanical Science and Technology,2013,27(3):831-836.
[20]Liu L,Zhou H,Li W,et al.Structure design and optimization of high-g piezoresistive accelerometer[C]//Electronic and Mechanical Engineering and Information Technology(EMEIT),2011 International Conference on.IEEE,2011,9:4508-4511.
[21]Kunz K,Enoksson P,Stemme G.Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors[J].Sensors and Actuators A:Physical,2001,92(1):156-160.
[22]Hindrichsen C C,Almind N S,Brodersen S H,et al.Analytical model of a PZT thick-film triaxial accelerometer for optimum design[J].Sensors Journal,IEEE,2009,9(4):419-429.
[23]Li G,Li Z,Wang C,et al.Design and simulation of a novel highly symmetrical piezoelectric triaxial accelerometer[C]//San Diego CA:Proceedings of the Modeling and Simulation of Microsystems Conference(MSM2000),2000.
[24]Zhang S,Jiang X,Lapsley M,et al.Piezoelectric accelerometers for ultrahigh temperature application[J].Applied Physics Letters,2010,96(1):013506-013506-3.
[25]Baski A A,Albrecht T R,Quate C F.Tunneling accelerometer[J].Journal of Microscopy,1988,57:73-76.
[26]Rockstad H K,Tang T K,Reynolds J K,et al.A miniature,high-sensitivity,electron tunneling accelerometer[J].Sensors and Actuators A:Physical,1996,53(1):227-231.
[27]Liu C H,Kenny T W.A high-precision,wide-bandwidth micromachined tunneling accelerometer[J].Microelectromechanical Systems,Journal of,2001,10(3):425-433.
[28]Miao M,Hu Q,Hao Y,et al.A bulk micromachined Sion-Glass tunneling accelerometer with out-of-plane sensing capability[C]//Nano/Micro Engineered and Molecular Systems,2007.NEMS'07.2nd IEEE International Conference on.IEEE,2007:235-240.
[29]Shang Y,Wang J,Tu S,et al.Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity[J].Micro&Nano Letters,2011,6(7):519-522.
[30]Zhu R,Zhang G,Chen G.A novel resonant accelerometer based on nanoelectromechanical oscillator[C]//Micro Electro Mechanical Systems(MEMS),2010 IEEE 23rd International Conference on.IEEE,2010:440-443.
[31]Luo X B,Yang Y J,Zheng F,et al.An optimized micromachined convective accelerometer with no proof mass[J].Journal of Micromechanics and Microengineering,2001,11(5):504.
[32]吕树海,杨拥军,徐淑静等.新型三轴MEMS热对流加速度传感器的研究[J].微纳电子技术,2008,45(4):219-221.
[33]Feng L S,Chi Y Y,Zhou Z,et al.Research and development status of MOEMS accelerometers[J].Micronanoelectronic Technology,2011,9:583-590.
[34]Uttamchandani D,Liang D,Culshaw B.A micromachined silicon accelerometer with fibre optic interrogation[C]//Fibre Optics Sensor Technology,IEE Colloquium on.IET,1992:27-33.
[35]Cooper E B,Post E R,Griffith S,et al.High-resolution micromachined interferometric accelerometer[J].Applied Physics Letters,2000,76(22):3316-3318.
[36]Llobera A,Plaza J A,Salinas I,et al.Characterization and passivation effects of an optical accelerometer based on antiresonant waveguides[J].Photonics Technology Letters,IEEE,2004,16(1):233-235.
[37]李鹏,王晓倩,薛晨阳,等.新型高灵敏抗冲击集成光学加速度计[J].传感器与微系统,2012,31(3):99-102.
[38]Hall N A,Okandan M,Littrell R,et al.Micromachined accelerometers with optical interferometric read-out and integrated electrostatic actuation[J].Microelectro mechanical Systems,Journal of,2008,17(1):37-44.
[39]Bao-Yin Y A O,Zhen Z,Li-Shuang F,et al.Structural design of a compact in-plane nano-grating accelerometer[J].Chinese Physics Letters,2012,29(11):118502.
[40]Krishnamoorthy U,Olsson III R H,Bogart G R,et al.In-plane MEMS-based nano-g accelerometer with subwavelength optical resonant sensor[J].Sensors and Actuators A:Physical,2008,145:283-290.
[2]Je C H,Lee S,Lee M L,et al.Z-axis capacitive MEMS accelerometer with moving ground masses[C]//Sensors,2010 IEEE.IEEE,2010:635-638.
[3]Perlmutter M,Robin L.High-performance,low cost inertial MEMS:A market in motion![C]//Position Location and Navigation Symposium(PLANS),2012 IEEE/ION.IEEE,2012:225-229.
[4]Jiang X S,Wang F Y,Kraft M,et al.An integrated surface micromachined capacitive lateral accelerometer with2μg/√Hz resolution[J].Solid-State Sensor.Actuator and Microsystems Workshop,Hilton Head Island,South Carolina,2002:202-205.
[5]Yazdi N,Najafi K.An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process[J].Microelectromechanical Systems,Journal of,2000,9(4):544-550.
[6]曹学成.电容式微机械加速度计的研究[D].杭州:浙江大学,2007:15-18.
[7]Monajemi P,Ayazi F.Design optimization and implementation of a microgravity capacitive HARPSS accelerometer[J].Sensors Journal,IEEE,2006,6(1):39-46.
[8]Tan S S,Liu C Y,Yeh L K,et al.A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability[J].Journal of Micromechanics and Microengineering,2011,21(3):035005.
[9]Aydin O,Akin T.A bulk micromachined fully-differential MEMS accelerometer with interdigitated fingers[C]//Sensors,2012 IEEE.IEEE,2012:1-4.
[10]Zwahlen P,Dong Y,Nguyen A M,et al.Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer[C]//Position Location and Navigation Symposium(PLANS),2012 IEEE/ION.IEEE,2012:15-19.
[11]Zhang Y,Yang G,Gao C,et al.A MEMS sandwich differential capacitive silicon-on-insulator accelerometer[J].Microsystem Technologies,2013:1-6.
[12]Liu M,Chi B,Liu Y,et al.A closed-loop MEMS accelerometer with capacitive sensing interface ASIC[J].International Journal of Electronics,2013,100(1):21-35.
[13]Tsai M H,Liu Y C,Fang W.A three-axis CMOSMEMS accelerometer structure with vertically integrated fully differential sensing electrodes[J].Journal of Microelectromechanical Systems,2012,21(6):1329-1337..
[14]Yazdi N,Ayazi F,Najafi K.Micromachined inertial sensors[J].Proceedings of the IEEE,1998,86(8):1640-1659.
[15]Qu H,Fang D,Xie H.A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise,low-power dualchopper amplifier[J].IEEE Sensor Journal,2008,8(9):1511-1518.
[16]Tsai M H,Liu Y C,Sun C M,et al.A CMOS-MEMS accelerometer with tri-axis sensing electrodes arrays[J].Procedia Engineering,2010,5:1083-1086.
[17]Gonenli I E,Celik-Butler Z,Butler D P.Surface micromachined MEMS accelerometers on flexible polyimide substrate[J].Sensors Journal,IEEE,2011,11(10):2318-2326.
[18]Khir M H M,Qu P,Qu H.A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass[J].Sensors,2011,11(8):7892-7907.
[19]Zhao Y,Li X,Liang J,et al.Design,fabrication and experiment of a MEMS piezoresistive high-g accelerometer[J].Journal of Mechanical Science and Technology,2013,27(3):831-836.
[20]Liu L,Zhou H,Li W,et al.Structure design and optimization of high-g piezoresistive accelerometer[C]//Electronic and Mechanical Engineering and Information Technology(EMEIT),2011 International Conference on.IEEE,2011,9:4508-4511.
[21]Kunz K,Enoksson P,Stemme G.Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors[J].Sensors and Actuators A:Physical,2001,92(1):156-160.
[22]Hindrichsen C C,Almind N S,Brodersen S H,et al.Analytical model of a PZT thick-film triaxial accelerometer for optimum design[J].Sensors Journal,IEEE,2009,9(4):419-429.
[23]Li G,Li Z,Wang C,et al.Design and simulation of a novel highly symmetrical piezoelectric triaxial accelerometer[C]//San Diego CA:Proceedings of the Modeling and Simulation of Microsystems Conference(MSM2000),2000.
[24]Zhang S,Jiang X,Lapsley M,et al.Piezoelectric accelerometers for ultrahigh temperature application[J].Applied Physics Letters,2010,96(1):013506-013506-3.
[25]Baski A A,Albrecht T R,Quate C F.Tunneling accelerometer[J].Journal of Microscopy,1988,57:73-76.
[26]Rockstad H K,Tang T K,Reynolds J K,et al.A miniature,high-sensitivity,electron tunneling accelerometer[J].Sensors and Actuators A:Physical,1996,53(1):227-231.
[27]Liu C H,Kenny T W.A high-precision,wide-bandwidth micromachined tunneling accelerometer[J].Microelectromechanical Systems,Journal of,2001,10(3):425-433.
[28]Miao M,Hu Q,Hao Y,et al.A bulk micromachined Sion-Glass tunneling accelerometer with out-of-plane sensing capability[C]//Nano/Micro Engineered and Molecular Systems,2007.NEMS'07.2nd IEEE International Conference on.IEEE,2007:235-240.
[29]Shang Y,Wang J,Tu S,et al.Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity[J].Micro&Nano Letters,2011,6(7):519-522.
[30]Zhu R,Zhang G,Chen G.A novel resonant accelerometer based on nanoelectromechanical oscillator[C]//Micro Electro Mechanical Systems(MEMS),2010 IEEE 23rd International Conference on.IEEE,2010:440-443.
[31]Luo X B,Yang Y J,Zheng F,et al.An optimized micromachined convective accelerometer with no proof mass[J].Journal of Micromechanics and Microengineering,2001,11(5):504.
[32]吕树海,杨拥军,徐淑静等.新型三轴MEMS热对流加速度传感器的研究[J].微纳电子技术,2008,45(4):219-221.
[33]Feng L S,Chi Y Y,Zhou Z,et al.Research and development status of MOEMS accelerometers[J].Micronanoelectronic Technology,2011,9:583-590.
[34]Uttamchandani D,Liang D,Culshaw B.A micromachined silicon accelerometer with fibre optic interrogation[C]//Fibre Optics Sensor Technology,IEE Colloquium on.IET,1992:27-33.
[35]Cooper E B,Post E R,Griffith S,et al.High-resolution micromachined interferometric accelerometer[J].Applied Physics Letters,2000,76(22):3316-3318.
[36]Llobera A,Plaza J A,Salinas I,et al.Characterization and passivation effects of an optical accelerometer based on antiresonant waveguides[J].Photonics Technology Letters,IEEE,2004,16(1):233-235.
[37]李鹏,王晓倩,薛晨阳,等.新型高灵敏抗冲击集成光学加速度计[J].传感器与微系统,2012,31(3):99-102.
[38]Hall N A,Okandan M,Littrell R,et al.Micromachined accelerometers with optical interferometric read-out and integrated electrostatic actuation[J].Microelectro mechanical Systems,Journal of,2008,17(1):37-44.
[39]Bao-Yin Y A O,Zhen Z,Li-Shuang F,et al.Structural design of a compact in-plane nano-grating accelerometer[J].Chinese Physics Letters,2012,29(11):118502.
[40]Krishnamoorthy U,Olsson III R H,Bogart G R,et al.In-plane MEMS-based nano-g accelerometer with subwavelength optical resonant sensor[J].Sensors and Actuators A:Physical,2008,145:283-290.