基于腔内倍频的457 nm激光器高反射腔镜的研制
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摘要
基于倍频反射膜的设计理论,结合膜系设计软件实现了多波段激光腔面高反射膜的设计。在制备过程中,基于最小二乘法原理建立了残余蒸镀量与膜层厚度之间的关系式,解决了膜厚控制误差累积导致薄膜光谱性能变差的问题。制备的薄膜在457 nm和914 nm波长处的反射率分别为99.9%和99.6%,在808,1064,1342 nm波长处的透射率分别为97.2%、96.8%和93.1%,满足457 nm激光器的使用要求。
Based on the design theory of frequency doubling reflective films, the design of multi-band high-reflective films on laser cavity surface is realized with the film design software. In the fabrication process, the deterioration problem of the thin film spectral performance caused by the accumulation of the film thickness control error is solved based on the relationship between the residual evaporation amount and the film thickness established by the least square method. The reflectivity of the fabricated thin films at 457 nm and 914 nm is 99.9% and 99.6%, and the transmissivity at 808 nm, 1064 nm and 1342 nm is 97.2%, 96.8% and 93.1%, respectively, which satisfies the requirements of the 457 nm laser.
Based on the design theory of frequency doubling reflective films, the design of multi-band high-reflective films on laser cavity surface is realized with the film design software. In the fabrication process, the deterioration problem of the thin film spectral performance caused by the accumulation of the film thickness control error is solved based on the relationship between the residual evaporation amount and the film thickness established by the least square method. The reflectivity of the fabricated thin films at 457 nm and 914 nm is 99.9% and 99.6%, and the transmissivity at 808 nm, 1064 nm and 1342 nm is 97.2%, 96.8% and 93.1%, respectively, which satisfies the requirements of the 457 nm laser.
引文
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[12] Zhu M P, Yi K, Guo S H, et al. Effect of thickness monitoring error and inhomogeneity of witness glass on film thickness monitoring[J]. Acta Optica Sinica, 2006, 26(7): 1107-1111. 朱美萍, 易葵, 郭世海, 等. 膜厚监控误差及监控片不均匀对膜厚监控的影响[J]. 光学学报, 2006, 26(7): 1107-1111.
[2] Zeller P, Peuser P. Efficient, multiwatt, continuous-wave laser operation on the 4F3/2→4F9/2 transitions of Nd∶YVO4 and Nd∶YAG[J]. Optics Lettes, 2000, 25(1): 34-36.
[3] Xue Q H, Bu Y K, Jia F Q, et al. Compact efficient 1.5 W continuous wave Nd∶YVO4/LBO blue laser at 457 nm[J]. Optics Communications, 2006, 258(1): 67-71.
[4] Yin H, Zhu S Q, Yang Q G, et al. Research on LD-end-pumped 457 nm laser with straight type cavity[J]. Chinese Journal of Lasers, 2013, 40(2): 0202003. 尹浩, 朱思祁, 阳其国, 等. LD抽运直腔式457 nm蓝光激光器的实验研究[J]. 中国激光, 2013, 40(2): 0202003.
[5] Fu X H, Huang J L, Mo Z Y, et al. Design and fabrication of 589 nm laser optical path integration system filter film[J]. Chinese Journal of Lasers, 2013, 40(3): 0307001. 付秀华, 黄金龙, 莫朝燕, 等. 589 nm激光器光路整合系统滤光膜的研制[J]. 中国激光, 2013, 40(3): 0307001.
[6] Yang Y L, Fu X H, Liu G J, et al. Study and fabrication of multi-wavelength laser antireflection film using new mixed material[J]. Chinese Journal of Lasers, 2011, 38(10): 1007002. 杨永亮, 付秀华, 刘国军, 等. 采用新型混合材料的多波长激光减反射膜的研制[J]. 中国激光, 2011, 38(10): 1007002.
[7] Liu C L, Wang C W, Wang G D, et al. Process investigation of H4 thin film prepared by electron beam evaporation and application on laser diodes cavity coatings[J]. Chinese Journal of Lasers, 2010, 37(12): 3140-3144. 刘春玲, 王春武, 王广德, 等. 电子束蒸镀H4膜工艺及其在808 nm激光器腔面膜上的应用[J]. 中国激光, 2010, 37(12): 3140-3144.
[8] Fu X H, Han F, Zhang J, et al. Fabrication of four wavelengths cavity surface film based on Nd∶YVO4 crystal[J]. Acta Photonica Sinica, 2014, 43(5): 0531001. 付秀华, 韩放, 张静, 等. 基于Nd∶YVO4晶体四波段腔面膜的研制[J]. 光子学报, 2014, 43(5): 0531001.
[9] Fu X H, Xiong S F, Liu D M, et al. Study and fabrication of wide angle and broad spectrum gray adjustment film in infrared imaging system[J]. Acta Optica Sinica, 2016, 36(5): 0531001. 付秀华, 熊仕富, 刘冬梅, 等. 大角度宽光谱红外成像系统灰度调节膜的研制[J]. 光学学报, 2016, 36(5): 0531001.
[10] Tang J F, Gu P F, Liu X, et al. Modern optical thin film technology[M]. Hangzhou: Zhejiang University Press, 2006: 107-112. 唐晋发, 顾培夫, 刘旭, 等. 现代光学薄膜技术[M]. 杭州: 浙江大学出版社, 2006: 107-112.
[11] Xiong S F, Fu X H, Liu D M, et al. Study and fabrication of narrow-band filter film in methane gas detection and recognition system[J]. Chinese Journal of Lasers, 2017, 44(3): 0303003. 熊仕富, 付秀华, 刘冬梅, 等. 甲烷气体探测与识别系统窄带滤光膜的研制[J]. 中国激光, 2017, 44(3): 0303003.
[12] Zhu M P, Yi K, Guo S H, et al. Effect of thickness monitoring error and inhomogeneity of witness glass on film thickness monitoring[J]. Acta Optica Sinica, 2006, 26(7): 1107-1111. 朱美萍, 易葵, 郭世海, 等. 膜厚监控误差及监控片不均匀对膜厚监控的影响[J]. 光学学报, 2006, 26(7): 1107-1111.