金刚线切割工艺对硅片表观质量影响研究
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摘要
随着光伏市场竞争日趋激烈,光伏产品质量控制显得尤为重要。硅片品质的稳定性对下游产品至关重要。通过对金刚线硅片切割技术参数进行实验,结合硅片不良比例的数据变化,对工艺参数变化对硅片表观质量的影响进行分析,为现场产品不良改善提供指向,从而以最快速度改善硅片品质。
With the increasingly fierce competition in the photovoltaic market,the quality control of photovoltaic products is particularly important.The stability of silicon wafer quality is very important for downstream products.In this paper,the technological parameters of diamond wire silicon wafer cutting are experimented,and the influence of technological parameters on the apparent quality of silicon wafer is analyzed in combination with the change of bad proportion of silicon wafer,which provides the direction for the bad improvement of on-site products,so as to improve the quality of silicon wafer as quickly as possible.
With the increasingly fierce competition in the photovoltaic market,the quality control of photovoltaic products is particularly important.The stability of silicon wafer quality is very important for downstream products.In this paper,the technological parameters of diamond wire silicon wafer cutting are experimented,and the influence of technological parameters on the apparent quality of silicon wafer is analyzed in combination with the change of bad proportion of silicon wafer,which provides the direction for the bad improvement of on-site products,so as to improve the quality of silicon wafer as quickly as possible.
引文
[1]吴俊桃.金刚线切多晶黑硅的制备及性能研究[D].北京:中国科学院大学,2017.
[2]赵雷,吴学宾.DW技术全面替换传统砂浆切割工艺研究和展望[J].电子工业专用设备,2018(3):16-19.
[3]周肃,周春兰,王文静,等.硅片切割工艺对表面损伤层结构及碱制绒工艺的影响[C]//第13届中国光伏大会论文集,北京:中国可再生能源学会,2013:258-261.
[4]皇甫国.固结磨料金刚石线切割技术的探讨[J].探索科学,2016(6):126.
[5]李海强,王敬.郑立允,等.三丝绞合电镀金刚石线锯的切割性能研究[J].金刚石与磨料磨具工程,2013,33(5):67-70.
[2]赵雷,吴学宾.DW技术全面替换传统砂浆切割工艺研究和展望[J].电子工业专用设备,2018(3):16-19.
[3]周肃,周春兰,王文静,等.硅片切割工艺对表面损伤层结构及碱制绒工艺的影响[C]//第13届中国光伏大会论文集,北京:中国可再生能源学会,2013:258-261.
[4]皇甫国.固结磨料金刚石线切割技术的探讨[J].探索科学,2016(6):126.
[5]李海强,王敬.郑立允,等.三丝绞合电镀金刚石线锯的切割性能研究[J].金刚石与磨料磨具工程,2013,33(5):67-70.