摘要
目的采用阴极电弧镀叠加磁控溅射的复合PVD涂层技术,实现梯度成分结构Ti AlSiYN多元涂层的制备。方法在涂层沉积过程中,通过切换不同成分的电弧靶,获得成分梯度变化的Ti AlSiYN涂层。利用扫描电子显微镜及其附带能谱仪、X射线衍射仪分析涂层氧化前后的截面组织形貌、成分和物相结构。结果在阴极电弧沉积过程中,通过磁控溅射方式植入微量Y元素会干扰涂层的生长,降低涂层的生长速率。Y元素在涂层中具有细化柱状组织的作用,并使涂层的开始氧化温度和氧化速率降低。相比于均一成分结构的Ti AlSiN涂层,均一成分结构的Ti AlSiYN涂层在800℃时表层未发生氧化。在900℃保温1 h后,Ti AlSiYN涂层的高氧含量氮氧化物层厚度小于Ti AlSiN涂层。梯度成分结构使Ti AlSiYN涂层的抗氧化性能明显降低,在900℃保温1 h后,梯度成分结构的Ti AlSiYN涂层组织完全被氧化,氧化组织以金红石结构的Ti O2为主,还有少量锐钛矿结构的Ti O2、Si O2和Al2O3。结论微量稀土Y元素具有改善涂层抗氧化性的作用,而梯度成分结构不利于涂层的抗氧化性。
The work aims to deposit the TiAlSiYN multi-component coatings with gradient composition structure by com-posite PVD coating technique combining cathodic arc plating and magnetron sputtering. In the deposition process, the TiAl-SiYN coating with changing gradient compositional structure was obtained by switching the arc targets. Scanning electron mi-croscopy and its accompanying spectrometer and X-ray diffractometer were used to analyze the cross-sectional microstructure,composition and phase structure of the coating before and after oxidation. The implantation of trace amounts of yttrium by mag-netron sputtering in the process of cathodic arc deposition interfered with the growth of the coating and reduced the growth raterate of the coating. Y element had the function of refining the columnar structure in the coating, and lowering the initial oxida-tion temperature and oxidation rate of the coating. Compared with the TiAlSiN coating with homogeneous composition, the sur-face of the TiAlSiYN coating with homogeneous composition was not oxidized at 800 ℃. The thickness of the high-oxygenoxynitride layer was less than that of the TiAlSiN coating after being kept at 900 ℃ for 1 h. The graded-composition structuresignificantly reduced the oxidation resistance of the TiAlSiYN coating. After being kept at 900 ℃ for 1 h, the TiAlSiYN coat-ings with graded-composition structure were completely oxidized. The oxidized structure mainly included rutile-TiO2, and asmall amount of anatase-TiO2, SiO2 and Al2 O3. Therefore, the rare earth element Y has an effect of improving the oxidation re-sistance of the coating while the gradient composition structure is detrimental to the oxidation resistance of the coating.
引文
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