精确拟合两种薄膜的光学常数及其应用
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摘要
研究了一种新的研究薄膜光学参数的方法,在同一基片上沉积两种薄膜,可以同时对这两种薄膜材料进行参数拟合。通过材料实验与光谱测试,基于柯西公式拟合得到了两种薄膜在可见与近红外波段的光学参数。将获得的薄膜参数应用到透450～600、反650～800滤光膜的设计与制备中,结果表明,用该方法获取的薄膜材料参数具有较高的准确性。
A new method for study layer optical parameters has been put forward in the paper.Two layers were deposited on the same substrate,and the optical parameters were fitted at the same time.Through material experiments and spectrum measurement,the layers optical parameters have been fitted with Cauchy expression in visible and near-infrared.The obtained film parameters were applied to the design and preparation of filter films.The results show that the film material parameters obtained by this method are of high accuracy.
A new method for study layer optical parameters has been put forward in the paper.Two layers were deposited on the same substrate,and the optical parameters were fitted at the same time.Through material experiments and spectrum measurement,the layers optical parameters have been fitted with Cauchy expression in visible and near-infrared.The obtained film parameters were applied to the design and preparation of filter films.The results show that the film material parameters obtained by this method are of high accuracy.
引文
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[3] Zoltan Seres,Aaron Galonsky,et al.Optical transmission of Mylar and Teflon films[J].Optical Engineering,1994,33(9):3031-3033.
[4] Paulo Azevedo Soave,Ronaldo André Ferreira Dau,Márcia Regina Becker,et al.Refractive index control in bicomponent polymer films for integrated thermo-optical applications[J].Optical Engineering,2009,48(12):124603.
[5] T Amotchkina,M Trubetskov,A Tikhonravov,et al.Reliable optical characterization of e-beam evaporated TiO2 films deposited at different substrate temperatures[J].Applied Optics,2014,53(4):9-15.
[6] XU Junqi,LIU Mengxia,MI Qian.A new arithematic to ensure the optical constants of thin film[J].Journal of Applied Optics,2001,22(3):25-27.(in Chinese)徐均琪,刘梦夏,弥谦.确定薄膜光学常数的一种新方法[J].应用光学,2001,22(3):25-27.
[7] WANG Songlin.YANG Chongmin,ZHANG Jianfu,et al.Effect of substrate temperature on alumina thin films prepared by electron beam evaporation[J].Journal of Applied Optics,2013,34(5):764-767.(in Chinese)王松林,杨崇民,张建付,等.基底温度对电子束蒸发制备氧化铝薄膜的影响[J].应用光学,2013,34(5):764-767.
[8] XIONG Shengming,ZHANG Yundong.Ion-assisted deposition of mid-infrared thin film[J].Laser & Infrared,1993,23(6):42-47.(in Chinese)熊胜明,张云洞,中红外薄膜的离子辅助淀积[J].激光与红外,1993,23(6):42-47.
[9] SHANG Peng,XIONG Shengming,LI Linghui,et al.Optical constants and properties of dual-Ion-beam sputtering Ta2O5/SiO2 thin film by spectroscopy[J].Acta Optical Sinica,2014,34(5):0531002.(in Chinese)尚鹏,熊胜明,李凌辉,等,光谱法确定离子束溅射Ta2O5/SiO2薄膜的光学常数及其性能[J].光学学报,2014,34(5):0531002.
[10] SUN Yajun,ZHU Yiqing,LI Shuai,et al.Study on near infrared broadband anti-reflection film on CaF2 substrate[J].Laser & Infrared,2016,46(1):76-80.(in Chinese)孙亚军,朱益清,李帅,等.CaF2基底上近红外区宽带增透膜的研究[J].激光与红外,2016,46(1):76-80.
[11] ZHOU Hong.Application of forouhi-bloomer equation to thin film optical measurement[D].Shanghai:Fudan University,2010:8-9.(in Chinese)周泓,Forouhi-Bloomer方程在薄膜光学测量中的应用研究[D].上海:复旦大学,2010:8-9.
[12] WANG Yinghui.Develop of ultra wide-band dichroic filter coatings[D].Xi′an:Xi′an Technological University,2013.(in Chinese)王颖辉,超宽光谱粉色滤光膜的研制[D].西安:西安工业大学,2013.
[13] Forouhi A R.Bloomer I.Optical dispersion relations for amorphous semiconductors and amorphous dielectrics[J].Physical Review B,1986,34(10):7018.