飞秒激光诱导硬质合金YG6表面累积效应
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摘要
采用波长800nm的飞秒激光对硬质合金YG6表面进行多脉冲加工,利用光学显微镜测量微凹坑损伤形貌及损伤直径,研究了飞秒激光在不同能量密度和脉冲数下硬质合金YG6的损伤阈值和损伤直径的变化规律及其损伤机制.试验结果表明:硬质合金YG6的多脉冲损伤阈值随着脉冲数增加而降低,呈现明显的累积效应.试验得到了多脉冲飞秒激光加工YG6的损伤阈值、损伤直径与脉冲数及中心能量密度的定量关系,YG6多脉冲损伤阈值主要与脉冲数相关,由单脉冲损伤阈值和累积系数共同决定,试验得到YG6单脉冲损伤阈值为1.14±0.06J/cm2,累积系数为0.84±0.02.损伤直径主要与光束中心能量密度和脉冲数相关,由光束束腰半径,单脉冲损伤阈值和累积系数共同决定.试验采用多组平均功率和脉冲数对YG6进行烧蚀,验证了单脉冲损伤阈值和累积系数的可靠性.
A femtosecond laser with wavelength of 800 nm was used to process the micro-pits array on the surface of carbide YG6.The change of ablation threshold and ablation diameter of carbide YG6 and its ablation mechanism under different energy density and pulse number were studied by optical profiler.The result of the test shows that the multi-pulse ablation threshold of carbide YG6 decreases with the increase of the pulses number and it shows a significant accumulation effect.The quantitative relationship among ablation threshold,ablation diameter,pulses number and central energy density of multi-pulse femtosecond laser processing YG6 was obtained.The multi-pulse ablation threshold of YG6 is mainly related to the number of pulses,which is determined by ablation threshold of single pulse and accumulation coefficient.The result of the test shows that the laser ablation threshold of YG6 is 1.14±0.06 J/cm2 and accumulation coefficient is 0.84±0.02.The ablation diameter is mainly related to the energy density and the number of pulses at the center,which is determined by the beam waist radius,the ablation threshold of single pulse and the accumulation coefficient.The YG6 was ablated by multi-group average power and pulse number,which verified the reliability of the ablation threshold of single pulse and accumulation coefficient.
A femtosecond laser with wavelength of 800 nm was used to process the micro-pits array on the surface of carbide YG6.The change of ablation threshold and ablation diameter of carbide YG6 and its ablation mechanism under different energy density and pulse number were studied by optical profiler.The result of the test shows that the multi-pulse ablation threshold of carbide YG6 decreases with the increase of the pulses number and it shows a significant accumulation effect.The quantitative relationship among ablation threshold,ablation diameter,pulses number and central energy density of multi-pulse femtosecond laser processing YG6 was obtained.The multi-pulse ablation threshold of YG6 is mainly related to the number of pulses,which is determined by ablation threshold of single pulse and accumulation coefficient.The result of the test shows that the laser ablation threshold of YG6 is 1.14±0.06 J/cm2 and accumulation coefficient is 0.84±0.02.The ablation diameter is mainly related to the energy density and the number of pulses at the center,which is determined by the beam waist radius,the ablation threshold of single pulse and the accumulation coefficient.The YG6 was ablated by multi-group average power and pulse number,which verified the reliability of the ablation threshold of single pulse and accumulation coefficient.
引文
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[20] KUANG Z,PERRIE W,LIU D,et al.Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns[J].Applied Surface Science,2012,258(19):7601-7606.
[21] WANG Fei,LI Yu-yao,CHE Ying,et al.Measurement system of flattop laser induced damage threshold to film[J].Acta Photonica Sinica,2016,45(3):0314003.王菲,李玉瑶,车英,等.平顶激光束诱导薄膜损伤阈值测量系统[J].光子学报,2016,45(3):0314003.
[22] XU Jun-qi,SU Jun-hong,GE Jin-man,et al.Measurement uncertainty of laser-induced damage threshold of the optical thin films[J].Infrared and Laser Engineering,2017,46(8):806007.徐均琪,苏俊宏,葛锦蔓,等.光学薄膜激光损伤阈值测量不确定度[J].红外与激光工程,2017,46(8):806007.
[2] GU Li,SUN Hui-lai,YU Kai,et al.Research progress of micro-nanofabrication by femtosecond laser[J].Laser&Infrared,2013,43(1):14-18.顾理,孙会来,于楷,等.飞秒激光微加工的研究进展[J].激光与红外,2013,43(1):14-18.
[3] SUNDARAM S K,MAZUR E,Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses[J].Nature Materials,2002,1(4):217.
[4] LIU Zhan-qiang,AI Xing.Study onwear surface morphology of high speed cutting tool[J].Tribology,2002,22(6):468-471.刘战强,艾兴.高速切削刀具磨损表面形态研究[J].摩擦学学报,2002,22(6):468-471.
[5] HAO Xiu-qing,SONG Xiao-lu,LI Liang,et al.Development and perspective of surface texturing tools[J].Surface Technology,2016,45(9):170-181.郝秀清,宋晓路,李亮.表面织构化刀具的研究现状与进展[J].表面技术,2016,45(9):170-181.
[6] JIANG Zeng-hui,WANG Ling-ling,SHI Li,et al.Wear mechanism and characteristics of cutting Ti6Al4Vwith carbide tools[J].Journal of Mechanical Engineering,2014,50(1):178-184.姜增辉,王琳琳,石莉,等.硬质合金刀具切削Ti6Al4V的磨损机理及特征[J].机械工程学报,2014,50(1):178-184.
[7] NATHALA C S R,AJAMI A,HUSINSKY W,et al.Ultrashort laser pulse ablation of copper,silicon and gelatin:effect of the pulse duration on the ablation thresholds and the incubation coefficients[J].Applied Physics A-Materials Science&Processing,2016,122(2):107.
[8] DANILOV P A,IONIN A A,KUDRYASHOV S I,et al.Silicon as a virtual plasmonic material:Acquisition of its transient optical constants and the ultrafast surface plasmon-polariton excitation[J].Journal of Experimentaland Theoretical Physics,2015,120(6):946-959.
[9] HASHIDA M,NAMBA S,OKAMURO K,et al.Ion emission from a metal surface through a multiphoton process and optical field ionization[J]. Physical Review B,2010,81(11):115442.
[10] JESCHKE H,GARCIA M.Theoretical description of the ultrafast ablation of diamond and graphite:dependence of thresholds on pulse duration[J].Applied Surface Science,2002,197:107-113.
[11] MCDANIEL C,FLANAGAN A,OCONNOR G M.Evidence for increased incubation parameter in multi-pulse ablation of a Pt:SS alloy using a femtosecond laser at high repetition rates[J].Applied Surface Science,2014,295:1-7.
[12] NISO F D,GAUDISUO C,SIBILLANO T,et al.Influence of the repetitions rate and pulse duration on the incubation effect in multiple-shots ultrafast laser ablation of steel[J].Physics Procedia,2013,41:698-707.
[13] MANNION P T,MAGEE J,COYNE E,et al.The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air[J].Applied Surface Science,2004,233(1):275-287.
[14] CUI Yun,ZHANG Han-yu,ZHAO Yuan-an,et al.The microscopic properties of Au film under the action of femtosecond laser[J].Chinese Journal of Lasers,2019,46(2):0203001.崔云,张晗宇,赵元安,等.飞秒激光作用下金膜的微观特性变化[J].中国激光,2019,46(2):0203001.
[15] ZHANG Wei,FENG Qiang,CHENG Guang-hua,et al.Femtosecond laser-induced ablation regimes and thresholds in a nickel-based superalloy[J].Acta Optica Sinica,2014,3412:348-354.张伟,冯强,程光华,等.飞秒激光对镍基合金的损伤机制和阈值行为[J].光学学报,2014,3412:348-354.
[16] WANG Tao,ZHAO Yuan-an,HUANG Jian-bing,et al.Cumulative effect of optical film damage under multi-pulse laser[J].Acta Photonica Sinica,2006,35(6):859-862.王涛,赵元安,黄建兵,等.多脉冲激光作用下光学薄膜损伤的累积效应[J].光子学报,2006,35(6):859-862.
[17] YANG Qi-biao,CHEN Zhong-pei,CHEN Lie,et al.Effects of nanosecond laser-induced micro-pits on surface wettability of YG3[J].Chinese Surface Engineering,2018,31(3):1-8.杨奇彪,陈中培,陈列,等.纳秒激光加工微凹坑对YG3表面浸润性的影响[J].中国表面工程,2018,31(3):1-8.
[18] KRUGER J,KAUTEK W.Ultrashort pulse laser interaction with dielectrics and polymers[J].Advances in Polymer Science,2004,168:247-290.
[19] LENZNER M,KRUGER J,SARTANIA S,et al.Femtosecond optical breakdown in dielectrics[J].Physical Review Letters,1998,80(18):4076-4079.
[20] KUANG Z,PERRIE W,LIU D,et al.Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns[J].Applied Surface Science,2012,258(19):7601-7606.
[21] WANG Fei,LI Yu-yao,CHE Ying,et al.Measurement system of flattop laser induced damage threshold to film[J].Acta Photonica Sinica,2016,45(3):0314003.王菲,李玉瑶,车英,等.平顶激光束诱导薄膜损伤阈值测量系统[J].光子学报,2016,45(3):0314003.
[22] XU Jun-qi,SU Jun-hong,GE Jin-man,et al.Measurement uncertainty of laser-induced damage threshold of the optical thin films[J].Infrared and Laser Engineering,2017,46(8):806007.徐均琪,苏俊宏,葛锦蔓,等.光学薄膜激光损伤阈值测量不确定度[J].红外与激光工程,2017,46(8):806007.