3-PPR并联对位平台运动控制分析与实验研究
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摘要
针对目前高精密行业中对位精度不高的问题,提出一种3-PPR平面并联对位平台的运动控制系统。结合解析法和矢量法,建立了平面并联对位平台运动学正逆解方程,采用MATLAB分析计算了对位平台在不同位姿下的工作空间。设计了一套基于GUS Controller运动控制器的对位控制系统,使用PID方法整定了驱动电机的运动性能,并通过运动学分析及控制系统对其精度进行实验研究。结果表明,平面并联对位平台的重复定位精度可达到1.5μm,驱动精度可达到1μm,在5s定位时间内,其位置误差和偏角误差为±5μm和0.0025°,在10s定位时间内,其位置误差和偏角误差为±3μm和0.0025°,可适用于各种高精密对位场合。
Aiming at the problem of poor alignment accuracy in high-precision industry, a motion control system for 3-PPR planar parallel alignment platform is proposed. Combining the analytical method and the vector method, the forward and inverse equations of the kinematics of the planar parallel aligning platform are established. The working space of the aligning platform in different poses is analyzed by MATLAB. A set of alignment control system based on GUS Controller is designed. The motor performance of the motor is set by PID, and the alignment accuracy of alignment platform is studied by experiment. The experimental results show that the planar parallel alignment platform can achieve a relocation accuracy of 1.5μm and a driving accuracy of 1μm. The position error and angling error are ±5μm and 0.0025° in the 5 second positioning time and ±3μm and 0.0025° in the 10 second positioning time, which is suitable for various high-precision alignment applications.
Aiming at the problem of poor alignment accuracy in high-precision industry, a motion control system for 3-PPR planar parallel alignment platform is proposed. Combining the analytical method and the vector method, the forward and inverse equations of the kinematics of the planar parallel aligning platform are established. The working space of the aligning platform in different poses is analyzed by MATLAB. A set of alignment control system based on GUS Controller is designed. The motor performance of the motor is set by PID, and the alignment accuracy of alignment platform is studied by experiment. The experimental results show that the planar parallel alignment platform can achieve a relocation accuracy of 1.5μm and a driving accuracy of 1μm. The position error and angling error are ±5μm and 0.0025° in the 5 second positioning time and ±3μm and 0.0025° in the 10 second positioning time, which is suitable for various high-precision alignment applications.
引文
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[13] 李潇涵,侯雨雷.基于双目视觉的并联机构位姿识别方法[J].电子技术,2018(4):13-15.
[14] 赵俊伟,刘珍珍,黄俊杰,等.基于双目视觉的3-PRS并联机构末端位姿检测方法[J].制造技术与机床,2018(1):101-106.
[2] 杨青.UVW工作平台及其在精密对位系统中的应用[D].上海:上海大学,2007.
[3] Ruggiu M,Kong X.Mobility and kinematic analysis of a parallel mechanism with both PPR and planar operation modes[J].Mechanism & Machine Theory,2012,55(9):77-90.
[4] Prusak D,Kobus K,Karpiel G.Kinematics Analysis of a Novel Five – Degree –of –Freedom Spatial Parallel Micromanipulator[J].Journal of Robotics,2014,2014(25 March 2014):13.
[5] Zhang D,Xu Y,Yao J,et al.Kinematics,dynamics and stiffness analysis of a novel 3-DOF kinematically/actuation redundant planar parallel mechanism[J].Mechanism & Machine Theory,2017,116:203-219.
[6] Sharifzadeh M,Masouleh M T,Kalhor A,et al.An experimental dynamic identification & control of an overconstrained 3-DOF parallel mechanism in presence of variable friction and feedback delay[J].Robotics & Autonomous Systems,2018,102:27-43.
[7]须晓锋,李威,刘玉飞,等.平面3-RRR并联定位平台运动学分析及控制系统设计[J].组合机床与自动化加工技术,2015(12):97-99.
[8] Wu G,Bai S,Kepler J A.Error modelling and experimental validation for a planar 3-PPR parallel manipulator[C]// International Conference on Advanced Robotics.IEEE,2011:259-264.
[9] Wu G,Bai S,Kepler J A.Error Modeling and Experimental Validation of a Planar 3-PPR Parallel Manipulator With Joint Clearances[J].Journal of Mechanisms and Robotics:Transactions of the ASME,2012(4):041008-1-041008-12.
[10] Wu G,Bai S,Kepler J.Stiffness characterization of a 3-PPR planar parallel manipulator with actuation compliance[J].ARCHIVE Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science 1989-1996,2015,229(12):255-264.
[11] Ding W,Gu J,Tang S,et al.Development of a calibrating algorithm for Delta Robot’s visual positioning based on artificial neural network[J].Optik-International Journal for Light and Electron Optics,2016,127(20):9095-9104.
[12] Lee H W,Liu C H,Chiu Y Y,et al.Design and control of an optical alignment system using a parallel XXY stage and four CCDs for micro pattern alignment[C]// Design,Test,Integration and Packaging of Mems/moems,IEEE,2012:13-17.
[13] 李潇涵,侯雨雷.基于双目视觉的并联机构位姿识别方法[J].电子技术,2018(4):13-15.
[14] 赵俊伟,刘珍珍,黄俊杰,等.基于双目视觉的3-PRS并联机构末端位姿检测方法[J].制造技术与机床,2018(1):101-106.