双压电驱动高频喷射点胶阀的设计与实验
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摘要
为了满足电子封装产业对胶体高速、微量分配的需求,设计了一种基于圆弧柔性铰链放大机构的双压电陶瓷驱动喷射点胶阀。首先,利用有限元分析软件对放大机构输出位移和模态进行了计算与分析。针对其高频需求,讨论了结构参数对其影响因素。基于微元法并结合喷嘴内胶体动力学分析,建立了喷嘴内胶体喷射的流体力学模型。结合阀杆与阀座配合的仿真模型,利用FLOW-3D的流固耦合仿真,揭示了喷射点胶时胶点的成型过程。在此基础上探究了胶体喷射时喷嘴处压力的变化与流速的关系,为点胶阀参数的控制和优化奠定了基础。最后,搭建了喷射系统实验平台,选用黏度为180cps的胶体进行点胶性能测试,得出了供料压力和驱动方波频率对胶点尺寸的影响规律。实验结果显示,在供料压力为6bar,驱动方波幅值频率360Hz等参数下,获得胶点最小直径为525μm。同时,在380～400Hz的频率区间内进行高频喷射实验,能够获得均匀微小的圆形胶点。实验结果验证了该圆弧柔性铰链放大机构的双压电驱动点胶阀的高频、微量喷射性能,为压电高频喷射点胶的应用和研究提供了参考。
To meet the requirements of high-frequency and micro-scale distribution of glue,a novel jetting dispenser with a corner-filleted flexure hinge driven by double piezoelectric stacks was developed.First,the output displacement and modal of the amplifier were calculated using finite element analysis software.The influencing factors of the structural parameters were discussed with regard to the requirement of high frequency operation.Based on the microelement method and analysis of the glue dynamics in the nozzle,a hydrodynamic model of the glue jetting in the nozzle was established.Combined with the simulation model of stem and seat assemblies,a FLOW-3 Dfluid-structure interaction simulation was conducted to reveal the formation process of droplets during dispensing.On this basis,the change of pressure in the nozzle and its relationship with the flow rate were studied,thus preparing a foundation for the control and optimization of the parameters of the dispenser.Finally,ajetting system platform was established,glue with a viscosity of 180 cps was used to test the dispensing property,and the relations between the feeding pressure,square-wave frequency,and droplet size were determined.Experimental results indicate that a minimum droplet diameter of 525μm is obtained when a 6-bar feed pressure and a 360-Hz square-wave frequency are used.Simultaneously,high-frequency dispensing experiments between 380 and 400 Hz yield uniform micro-droplets.These results verify the high-frequency and micro-jetting performance of the double piezoelectric jetting dispenser with a corner-filleted flexure hinge,thus providing agood reference for the application and research of piezoelectric high-frequency dispensing.
To meet the requirements of high-frequency and micro-scale distribution of glue,a novel jetting dispenser with a corner-filleted flexure hinge driven by double piezoelectric stacks was developed.First,the output displacement and modal of the amplifier were calculated using finite element analysis software.The influencing factors of the structural parameters were discussed with regard to the requirement of high frequency operation.Based on the microelement method and analysis of the glue dynamics in the nozzle,a hydrodynamic model of the glue jetting in the nozzle was established.Combined with the simulation model of stem and seat assemblies,a FLOW-3 Dfluid-structure interaction simulation was conducted to reveal the formation process of droplets during dispensing.On this basis,the change of pressure in the nozzle and its relationship with the flow rate were studied,thus preparing a foundation for the control and optimization of the parameters of the dispenser.Finally,ajetting system platform was established,glue with a viscosity of 180 cps was used to test the dispensing property,and the relations between the feeding pressure,square-wave frequency,and droplet size were determined.Experimental results indicate that a minimum droplet diameter of 525μm is obtained when a 6-bar feed pressure and a 360-Hz square-wave frequency are used.Simultaneously,high-frequency dispensing experiments between 380 and 400 Hz yield uniform micro-droplets.These results verify the high-frequency and micro-jetting performance of the double piezoelectric jetting dispenser with a corner-filleted flexure hinge,thus providing agood reference for the application and research of piezoelectric high-frequency dispensing.
引文
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[9]李渭松,单修洋,魏新明.气动式喷射阀泄压过程数值模拟与分析[J].现代制造工程,2017(1):1-6,18.LI W S,SHAN X Y,WEI X M.Numerical simulation and analysis of pressure relief process of pneumatic jetting valve[J].Modern Manufacturing Engineering,2017,436(1):1-6,18.(in Chinese)
[10]ZHOU C,LI J H,DUAN J A,et al..The principle and physical models of novel jetting dispenser with giant magnetostrictive and a magnifier[J].Scientific Reports,2016,5:18294.
[11]WANG L Y,Du X H,LI Y P,et al..Simulation and experiment study on adhesive ejection behavior in jetting dispenser[J].Journal of Adhesion Science&Technology,2014,28(1):53-64.
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[14]DENG G L,WANG N,ZHOU C,et al..A simplified analysis method for the piezo jet dispenser with a diamond amplifier[J].Sensors,2018,18(7):2115.
[15]焦晓阳,刘建芳,丁宁宁,等.压电气体混合驱动式喷射点胶阀的设计与实验[J].哈尔滨工程大学学报,2013,34(11):1445-1449.JIAO X Y,LIU J F,DING N N,et al..Design and experiment for the piezoelectric-gas hybrid driven jet dispensing valve[J].Journal of Harbin Engineering University,2013,34(11):1445-1449.(in Chinese)
[16]李耀,吴洪涛,杨小龙,等.圆弧柔性铰链的优化设计[J].光学精密工程,2018,26(6):1370-1379.LI Y,WU H T,YANG X L,et al..Optimization design of circular flexure hinges[J].Opt.Precision Eng.,2018,26(6):1370-1379.(in Chinese)
[17]张伟,杨立保,李清雅,等.直圆抛物线复合铰链柔度研究[J].红外与激光工程,2018,47(11):250-256.ZHANG W,YANG L B,LI Q Y,et al..Research on compliance of compound circular-parabolic hinges[J].Infrared and Laser Engineering,2018,47(11):250-256.(in Chinese)
[18]ZHANG J S,JIA H L,ZHANG J H.A fluid dynamic analysis in the chamber and nozzle for a jetting dispenser design[C].International Conference on Electronic Packaging Technology&High Density Packaging,Xi′an,P.R.China:IEEE,2010:879-883.
[2]周晓阳.先进封装技术综述[J].集成电路应用,2018,297(6):8-14.ZHOU X Y.Overview of advanced IC packaging technology[J].Applications of IC,2018,297(6):8-14.(in Chinese)
[3]张勤,徐策,徐晨影,等.超微量点胶方法与实验[J].光学精密工程,2013,21(8):2071-2078.ZHANG Q,XU C,XU CH Y,et al..Approach and experiment of Ultra-micro dispensing[J].Opt.Precision Eng.,2013,21(8):2071-2078.(in Chinese)
[4]史亚莉,张正涛,徐德.跨尺度微管微球三维半自动装配点胶系统[J].光学精密工程,2015,23(11):3121-3128.SHI Y L,ZHANG ZH T,XU D.3Dsemi-automatic assembly and dispensing system for transscale parts of micro-tube and micro-sphere[J].Opt.Precision Eng.,2015,23(11):3121-3128.(in Chinese)
[5]刘益芳,陈丹儿,戴婷婷.无源MEMS压力开关的设计与制备[J].光学精密工程,2018,26(5):1133-1139.LIU Y F,CHEN D E,DAI T T.Design and fabrication of passive MEMS pressure switch[J].Opt.Precision Eng.,2018,26(5):1133-1139.(in Chinese)
[6]JEON J C,NGUYEN Q H,CHOI S B.The design and modeling of jetting dispenser actuated by dual piezostack actuator[J].Applied Mechanics&Materials,2013,433-435:72-75.
[7]JEON J,HONG S M,CHOI M,et al..Design and performance evaluation of a new jetting dispenser system using two piezostack actuators[J].Smart Materials&Structures,2015,24(1):015020.
[8]赵钧,陈硕,尚智.热气泡式微喷技术研究[J].中国机械工程,2005,16(z1):377-379.ZHAO J,CHEN SH,SHANG ZH,et al..Thermal bubble micro-iniection technology China mechanical engineering[J].China Mechanical Engineering,2005,16(z1):377-379.(in Chinese)
[9]李渭松,单修洋,魏新明.气动式喷射阀泄压过程数值模拟与分析[J].现代制造工程,2017(1):1-6,18.LI W S,SHAN X Y,WEI X M.Numerical simulation and analysis of pressure relief process of pneumatic jetting valve[J].Modern Manufacturing Engineering,2017,436(1):1-6,18.(in Chinese)
[10]ZHOU C,LI J H,DUAN J A,et al..The principle and physical models of novel jetting dispenser with giant magnetostrictive and a magnifier[J].Scientific Reports,2016,5:18294.
[11]WANG L Y,Du X H,LI Y P,et al..Simulation and experiment study on adhesive ejection behavior in jetting dispenser[J].Journal of Adhesion Science&Technology,2014,28(1):53-64.
[12]黄大任,袁松梅,褚祥诚,等.压电非接触式点胶阀的设计与实验[J].压电与声光,2016,38(1):11-15.HUANG D R,YUAN S M,CHU X CH,et al..Design and experiment of a piezoelectric driven noncontact dispenser[J].Piezoelectrics and Acoustooptics,2016,38(1):11-15.(in Chinese)
[13]ZHOU C,LI J,DUAN J A,et al..Direct-acting piezoelectric jet dispenser with rhombic mechanical amplifier[J].IEEE Transactions on Components Packaging&Manufacturing Technology,2018,8(5):910-913.
[14]DENG G L,WANG N,ZHOU C,et al..A simplified analysis method for the piezo jet dispenser with a diamond amplifier[J].Sensors,2018,18(7):2115.
[15]焦晓阳,刘建芳,丁宁宁,等.压电气体混合驱动式喷射点胶阀的设计与实验[J].哈尔滨工程大学学报,2013,34(11):1445-1449.JIAO X Y,LIU J F,DING N N,et al..Design and experiment for the piezoelectric-gas hybrid driven jet dispensing valve[J].Journal of Harbin Engineering University,2013,34(11):1445-1449.(in Chinese)
[16]李耀,吴洪涛,杨小龙,等.圆弧柔性铰链的优化设计[J].光学精密工程,2018,26(6):1370-1379.LI Y,WU H T,YANG X L,et al..Optimization design of circular flexure hinges[J].Opt.Precision Eng.,2018,26(6):1370-1379.(in Chinese)
[17]张伟,杨立保,李清雅,等.直圆抛物线复合铰链柔度研究[J].红外与激光工程,2018,47(11):250-256.ZHANG W,YANG L B,LI Q Y,et al..Research on compliance of compound circular-parabolic hinges[J].Infrared and Laser Engineering,2018,47(11):250-256.(in Chinese)
[18]ZHANG J S,JIA H L,ZHANG J H.A fluid dynamic analysis in the chamber and nozzle for a jetting dispenser design[C].International Conference on Electronic Packaging Technology&High Density Packaging,Xi′an,P.R.China:IEEE,2010:879-883.