基于PA85A的高精度动态压电陶瓷驱动电源设计
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摘要
压电陶瓷作为原子力显微镜系统中的执行器件,能够快速跟踪测量样品的形貌。为提高压电陶瓷驱动器的定位精度与响应速度,根据电压控制型驱动电源的原理,以PA85A高压运放为核心器件,设计了一种高精度动态压电陶瓷驱动电源。分析了影响系统精度与动态性能的因素,采用相位补偿法,提高了系统的稳定性。实验结果表明,该电源具有精度高,动态响应快,稳定性强的特点,能有效用于原子力显微镜系统中。
The piezoelectric ceramic,as an actuator in the atomic force microscope(AFM)system,can quickly trace the appearance of the measured sample.In order to improve the positioning accuracy and response speed of PZT actuators,according to the principle of the voltage-controlled driving power,a high-precision dynamic PZT driving power was designed based on the high voltage operational amplifier PA85 A.The factors that affect the accuracy and dynamic performance of system were analyzed;the method for phase compensation was adopted to improve the stability of the system.The results show that this power has the features of high-precision,fast dynamic response,high stability,which can be effectively applied to the AFM system.
The piezoelectric ceramic,as an actuator in the atomic force microscope(AFM)system,can quickly trace the appearance of the measured sample.In order to improve the positioning accuracy and response speed of PZT actuators,according to the principle of the voltage-controlled driving power,a high-precision dynamic PZT driving power was designed based on the high voltage operational amplifier PA85 A.The factors that affect the accuracy and dynamic performance of system were analyzed;the method for phase compensation was adopted to improve the stability of the system.The results show that this power has the features of high-precision,fast dynamic response,high stability,which can be effectively applied to the AFM system.
引文
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[9]赵碧核,尹达一,曾攀.高精度大功率压电陶瓷驱动关键技术[J].压电与声光,2013,35(6):853-857.ZHAO Bishan,YIN Dayi,ZENG Pan.Key technology of high-precision and high-power piezoelectric ceramic drive[J].Piezoelectrics&Acoustooptics,2013,35(6):853-857.
[10]刘岩,邹文栋.一种高速压电陶瓷驱动器驱动电源设计[J].压电与声光,2008,30(1):48-49.LIU Yan,ZOU Wendong.A high driving power design for piezoelectric ceramic actuator[J].Piezoelectrics&Acoustooptics,2008,30(1):48-49.
[2]李龙江.压电陶瓷驱动电源及其控制系统的研究[D].哈尔滨:哈尔滨工业大学,2012.
[3]贾巍,范承玉.应用于快速倾斜镜的压电陶瓷驱动电源[J].量子电子学报,2015,32(2):235-240.
[4]葛川,李朋志,章明朝,等.基于ARM的高分辨率压电陶瓷驱动电源[J].现代电子技术,2013,36(14):166-170.
[5]李福良.基于PA85的新型压电陶瓷驱动电源[J].压电与声光,2005,27(4):392-395.LI Fuliang.A new power supply for piezoelectric ceramic based on PA85[J].Piezoelectrics&Acoustooptics,2005,27(4):392-395.
[6]王学亮,巩岩.光刻物镜中压电陶瓷驱动器的动态性能研究[J].光子学报,2012,41(9):1071-1075.WANG Xueliang,GONG Yan.Dynamic performance of the PZT driver used in a lithographic objective[J].Acta Photonica Sinica,2012,41(9):1071-1075.
[7]范伟,崔长彩,叶瑞芳.压电陶瓷驱动器电源控制系统研究[J].压电与声光,2011,33(6):946-949.FAN Wei,CUI Changcai,YE Ruifang.The research on PZT power supply temperature control syatem[J].Piezoelectrics&Acoustooptics,2011,33(6):946-949.
[8]丁文明,王代华.一种压电陶瓷执行器动态驱动电源[J].压电与声光,2008,30(3):297-300.DING Wenming,WANG Daihua.A dynamic supply for piezoelectric actuators[J].Piezoelectrics&Acoustooptics,2008,30(3):297-300.
[9]赵碧核,尹达一,曾攀.高精度大功率压电陶瓷驱动关键技术[J].压电与声光,2013,35(6):853-857.ZHAO Bishan,YIN Dayi,ZENG Pan.Key technology of high-precision and high-power piezoelectric ceramic drive[J].Piezoelectrics&Acoustooptics,2013,35(6):853-857.
[10]刘岩,邹文栋.一种高速压电陶瓷驱动器驱动电源设计[J].压电与声光,2008,30(1):48-49.LIU Yan,ZOU Wendong.A high driving power design for piezoelectric ceramic actuator[J].Piezoelectrics&Acoustooptics,2008,30(1):48-49.