基于双层静电极的差动式电容力矩传感器
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摘要
力矩传感器在机器人关节实时力矩监测中起着重要作用,为提高电容力矩传感器灵敏度,提出一种双层静电极差动式电容力矩传感器。利用PCB板表面的双层静电极与悬臂梁动电极垂直分布构成的电容器作为力敏元件,将由梯形梁变形引起的电容变化量以差值方式输出,通过推导单层与双层静电极传感器的输出特性,证明双层静电极传感器具有更高灵敏度。对传感器进行受力仿真分析,验证结构设计的合理性,并进行静态标定实验,得出双层静电极传感器灵敏度为单层静电极传感器灵敏度的1.8倍,最大非线性误差约为2.19%,重复性误差约为1.84%。该实验结果表明双层静电极传感器具有更高灵敏度,满足机器人关节测力的需求。
Torque sensor plays an important role in the real-time torque monitoring of the robot joint.To improve the sensitivity of capacitance torque sensor,a differential capacitance torque sensor with doublelayer static electrode is presented.The capacitor composed of a double-layer static electrode on the surface of the PCB and the cantilever movable electrodes is used for force sensing element.The amount of change in capacitance caused by trapezoidal beam deformation is output as the difference.By deriving the output characteristics of single-layer and double-layer static electrode sensor,it is proved that the double-layer static electrode sensor has higher sensitivity.The force simulation analysis experiment is executed to verify the structural rationality,and the static calibration experiment of the sensor is carried out to obtain the sensitivity of double-layer static electrode sensor is 1.8 times of single-layer static electrode sensor,the maximum nonlinear error is 2.19%,the repeatability error is 1.84%.The results indicate that the double-layer static electrode sensor has higher sensitivity to meet the requirement of robot joint force measurement.
Torque sensor plays an important role in the real-time torque monitoring of the robot joint.To improve the sensitivity of capacitance torque sensor,a differential capacitance torque sensor with doublelayer static electrode is presented.The capacitor composed of a double-layer static electrode on the surface of the PCB and the cantilever movable electrodes is used for force sensing element.The amount of change in capacitance caused by trapezoidal beam deformation is output as the difference.By deriving the output characteristics of single-layer and double-layer static electrode sensor,it is proved that the double-layer static electrode sensor has higher sensitivity.The force simulation analysis experiment is executed to verify the structural rationality,and the static calibration experiment of the sensor is carried out to obtain the sensitivity of double-layer static electrode sensor is 1.8 times of single-layer static electrode sensor,the maximum nonlinear error is 2.19%,the repeatability error is 1.84%.The results indicate that the double-layer static electrode sensor has higher sensitivity to meet the requirement of robot joint force measurement.
引文
[1]李龙晶,刘冬,丛明.基于力矩误差的净化机器人碰撞检测技术[J].组合机床与自动化加工技术,2013(12):75-78.
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[4]侯鹏飞,刘伊威,谢宗武.空间机械臂关节力矩传感器的研制[J].机械与电子,2015(7):77-80.
[5]王罗罗,孙奎,谢宗武.新型关节力矩传感器的优化设计[J].机械与电子,2009(6):18-21.
[6]Lee DH,Kim U,Jung H,et al.A capacitive-type novel six-axis force/torque sensor for robotic applications[J].IEEE Sensors Journal,2016,16(8):2290-2299.
[7]周华鹏,毛建国,顾筠,等.高精度电容式压力传感器测量方法[J].传感器与微系统,2010,2(29):104-107.
[8]李欣欣,李均.一种新型的电容传感器─基于边缘效应原理的传感器[J].光学精密工程,1994,2(1):49-53.
[9]Nowicki B,Jarkiewicz A.The in-process surface roughness measurement using fringe field capacitive(FFC)method[J].International Journal of Machine Tools&Manufacture,1998,38(5):725-732.
[10]徐乐年,张磊,员玉良.基于CDC技术的电容式水平位移传感器[J].传感器与微系统,2010,29(5):112-115.
[11]单辉祖.材料力学[M].北京:高等教育出版,1999.
[12]王光宇,许慧.再谈静电能的损失[J].物理与工程,2007(2):33-35.
[13]兰小刚,茅健.一种新型柔性关节力矩传感器的设计[J].上海工程技术大学学报,2017,31(1):5-11.
[2]Lee S,Yang K,Shin E,et al.Development of 1-axis torque sensor with different shape of support and measurement spoke[C].The 11th International Conference on Ubiquitous Robots and Ambient Intelligence,Kuala Lumpur,Malaysia,2014:688-691.
[3]Preusche C,Reintsema D,Landzettel K,et al.Robotics component verification on ISS ROKVISS-preliminary results for telepresence[C].International Conference on Intelligent Robots and Systems,Piscataway,NJ,USA,2006:4595-4601.
[4]侯鹏飞,刘伊威,谢宗武.空间机械臂关节力矩传感器的研制[J].机械与电子,2015(7):77-80.
[5]王罗罗,孙奎,谢宗武.新型关节力矩传感器的优化设计[J].机械与电子,2009(6):18-21.
[6]Lee DH,Kim U,Jung H,et al.A capacitive-type novel six-axis force/torque sensor for robotic applications[J].IEEE Sensors Journal,2016,16(8):2290-2299.
[7]周华鹏,毛建国,顾筠,等.高精度电容式压力传感器测量方法[J].传感器与微系统,2010,2(29):104-107.
[8]李欣欣,李均.一种新型的电容传感器─基于边缘效应原理的传感器[J].光学精密工程,1994,2(1):49-53.
[9]Nowicki B,Jarkiewicz A.The in-process surface roughness measurement using fringe field capacitive(FFC)method[J].International Journal of Machine Tools&Manufacture,1998,38(5):725-732.
[10]徐乐年,张磊,员玉良.基于CDC技术的电容式水平位移传感器[J].传感器与微系统,2010,29(5):112-115.
[11]单辉祖.材料力学[M].北京:高等教育出版,1999.
[12]王光宇,许慧.再谈静电能的损失[J].物理与工程,2007(2):33-35.
[13]兰小刚,茅健.一种新型柔性关节力矩传感器的设计[J].上海工程技术大学学报,2017,31(1):5-11.