纳米光栅动静态校准工作台
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摘要
为了改善纳米光栅校准装置校准精度、校准量程及动态频响难以兼顾的问题,采用宏微运动控制方法驱动校准装置作快速、精密、大范围运动。宏动平台由静压气浮导轨和直线电机组合而成,微动平台由柔性铰链和压电陶瓷构成。对宏动平台和微动平台进行动力学建模,并获得宏微运动平台的传递函数。设计微动跟随宏动和宏动跟随微动两种控制策略,并进行建模和仿真分析,利用搭建的实验平台进行了校准装置的性能测试。实验结果表明:宏动跟随微动控制策略具有较高的动态频响性能,校准装置在全行程20 mm内分辨力达到5 nm;在幅值为0.05 mm的正弦频率响应实验中,动态频响达到100 Hz,可满足纳米光栅的动静态校准要求。
To meet the requirements of calibration precision,calibration range and dynamic frequency response at the same time,a macro/micro motion control method is used to drive the calibration device for fast,precise and wide-range positioning. the kinematics modeling of the micro-motion platform with static hinged/piezoelectric ceramic combination and the macro-motion platform with static pressure floatation/linear motor combination was carried out. And the transfer function of the platform is obtained. Two macro/micro control strategies,macro-follow-micro and micro-follow-macro,have been designed,simulated and compared. The experimental platform is built and the performance of the calibration device is tested. Experiment results show that the macro-follow-micro strategies has a higher dynamic response performance.Calibration device has the ability of 5 nm resolution in the whole stroke of 20 mm,and the dynamic frequency response up to 100 Hz in 0. 05 mm amplitude in the sinusoidal frequency response,which can prove that the calibration device has dynamic and static calibration capability.
To meet the requirements of calibration precision,calibration range and dynamic frequency response at the same time,a macro/micro motion control method is used to drive the calibration device for fast,precise and wide-range positioning. the kinematics modeling of the micro-motion platform with static hinged/piezoelectric ceramic combination and the macro-motion platform with static pressure floatation/linear motor combination was carried out. And the transfer function of the platform is obtained. Two macro/micro control strategies,macro-follow-micro and micro-follow-macro,have been designed,simulated and compared. The experimental platform is built and the performance of the calibration device is tested. Experiment results show that the macro-follow-micro strategies has a higher dynamic response performance.Calibration device has the ability of 5 nm resolution in the whole stroke of 20 mm,and the dynamic frequency response up to 100 Hz in 0. 05 mm amplitude in the sinusoidal frequency response,which can prove that the calibration device has dynamic and static calibration capability.
引文
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[2]葛川,张德福,李朋志,等.电容式位移传感器的线性度标定与不确定度评定[J].光学精密工程,2015,23(9):2 546-2 552.
[3]李昕.线位移传感器自动校准装置研究[D].西安:西安电子科技大学,2014.
[4]薛梓,叶孝佑,杨国梁,等.高精度位移传感器动静态溯源和校准装置的研制[J].计量学报,2008,29(z1):57-60.
[5]张丰,曾燕华,张伟.线位移传感器的校准方法研究[J].光学仪器,2016,38(1):63-68.
[6]Xue Z,Ye S L,Ye X Y.The study and realization of standard dynamic signals of dynamic characteristic calibration for high precision displacement sensor[C]//5th International Symposium on Instrumentation Science And Technology.Shenyang,China,2008,7133:713301-6.
[7]Heertjes M,Temizer B.Data-based control tuning in master-slave systems[C]//IEEE.The 2012 American Control Conference(ACC).Montreal,Canada,2012:2 461-2 466.
[8]陈琦.大行程纳米级定位工作台的结构设计[J].光学精密工程,2016,24(5):1065-1071.
[9]吴剑威,袁勇,崔继文,等.双工件台宏微交接系统设计及实验[J].光学精密工程,2015,23(6):1 673-1 680.
[10]Pahk H J,Lee D S,Park J H.Ultra precision positioning system for servo motor piezo actuator using the dual servo loop and digital filter implementation[J].International Journal of Machine Tools&Manufacture,2001,41:51-63.
[11]Buice E S,Otten D,Yang R H,et al.Design evaluation of a single-axis precision controlled positioning stage[J].Precision engineering,2009,33(4):418-424.
[12]Shinno H,Yoshioka H,Sawano H.A newly developed long range positioning table system with a sub-nanometer resolution[J].CIRP Annals-Manufacturing Technology,2011,60(1):403-406.
[13]翟小玉.三光轴集成式单频激光干涉测量关键技术研究[D].哈尔滨:哈尔滨工业大学,2015.