二维振镜扫描系统调向误差分析
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摘要
对比分析现有光束扫描系统的优劣,提出采用二维振镜扫描系统作为多光谱集成靶标的光轴调向装置,光轴调向装置的调向精度影响多光谱集成靶标的校准精度。通过对二维振镜扫描系统调向误差进行分析,建立二维振镜扫描系统调向模型,并进行了二维振镜扫描系统调向误差测量实验。结果表明:二维振镜扫描系统的方位角误差和俯仰角误差小于8″,调向角误差小于9″,调向误差小于10″,能够满足多光谱集成靶标光轴调向精度要求。
The advantages and disadvantages of existing beam scanning system were compared and analyzed.A 2 Dgalvanometer scanning system was used as the optical axis alignment device of the multispectral integrated target.The alignment precision of the optical axis alignment device can affect the calibration accuracy of the multispectral integrated target.The directional error of 2 Dgalvanometer scanning system was analyzed,the directional model of 2 Dgalvanometer scanning system was established,and the measurement experiment of alignment error of 2 Dgalvanometer scanning system was carried out.The results show that the azimuth error and pitch angle error of the 2 Dgalvanometer scanning system are less than 8″,the alignment angle error is less than 9″,and the alignment error is less than 10″,which demonstrates that the optical axis alignment accuracy of multispectral integrated target can be satisfied.
The advantages and disadvantages of existing beam scanning system were compared and analyzed.A 2 Dgalvanometer scanning system was used as the optical axis alignment device of the multispectral integrated target.The alignment precision of the optical axis alignment device can affect the calibration accuracy of the multispectral integrated target.The directional error of 2 Dgalvanometer scanning system was analyzed,the directional model of 2 Dgalvanometer scanning system was established,and the measurement experiment of alignment error of 2 Dgalvanometer scanning system was carried out.The results show that the azimuth error and pitch angle error of the 2 Dgalvanometer scanning system are less than 8″,the alignment angle error is less than 9″,and the alignment error is less than 10″,which demonstrates that the optical axis alignment accuracy of multispectral integrated target can be satisfied.
引文
[1]AYLWARD R P.Advanced galvanometer-based optical scanner design[J].Sensor Review,2003,23(3):216-222.
[2]DUMA V F.Optimal scanning function of a galvanometer scanner for an increased duty cycle[J].Optical Engineering,2010,49(10):730-738.
[3]BOSCO A,BOOGERT S T,BOORMAN G E,et al.A large aperture electro-optic deflector[J].Applied Physics Letters,2009,94(21):1675-1678.
[4]WAN Lingyu,LU Zhiyong,WANG Rongcheng.Electro-optic laser scanner for arbitrary scanning in 8rows[J].Journal of Applied optics,2011,32(2):323-328.万玲玉,卢智勇,王戎承.一种8行任意扫描的电光扫瞄器[J].应用光学,2011,32(2):323-328.
[5]MA Chenhao,FU Yuegang,GONG Ping,et al.A composite scanning method and experiment of laser radar[J].Infrared and Laser Engineering,2015,44(11):3270-3275.马辰昊,付跃刚,宫平,等.一种激光雷达复合式扫描方法及试验[J].红外与激光工程,2015,44(11):3270-3275.
[6]LUO Yuan,HE Yan,HU Shanjiang,et al.Three-dimensional video imaging lidar system based on acousto-optic laser scanning[J].Chinese Journal of Lasers,2014,41(08):27-33.罗远,贺岩,胡善江,等.基于声光扫描的三维视频激光雷达技术[J].中国激光,2014,41(08):27-33.
[7]SUN Guobin,MI Qian.Research on the relationship between angle of optical galvanometer and scanning angle[J].Journal of Xi'an Technological University,2010,30(05):421-424.孙国斌,弥谦.光学振镜转角与扫描角度变化关系的研究[J].西安工业大学学报,2010,30(05):421-424.
[8]GUO Yajing,TANG Shunxing,JIANG Xiuqing,et al.Damage inspection of optical surface based on galvanometer scanning[J].Acta Optica Sinica,2017,37(06):125-131.郭亚晶,唐顺兴,姜秀青,等.基于振镜扫描方式的光学元件表面损伤检测[J].光学学报,2017,37(06):125-131.
[9]MNERIE C,DUMA V F.Mathematical model of a galvanometer-based scanner:simulations and experiments[J].SPIE,2013,8789:8789-1-15.
[10]GAO Ming,HOU Honglu.Method for establishing reference optical axis of outfield multi axis collimation deviation test[J].Acta Photonica Sinica,2008,37(05):1029-1033.高明,侯宏录.外场多光轴瞄准偏差测试的基准光轴建立方法[J].光子学报,2008,37(05):1029-1033.
[11]YE Lu,ZHAO Jianchuan.Development of measuring optical-axis parallelism instrument for multispectraland multi axial facility[J].OME Information,2011,28(12):32-36.叶露,赵建川.多光谱多光轴设备光轴平行性测量装置研制[J].光机电信息,2011,28(12):32-36.
[12]JIN Weiqi,WANG Xia,ZHANG Qiyang,et al.Technical progress and its analysis in detecting of multi axesparallelismsystem[J].Infrared and Laser Engineering,2010,39(03):526-531.金伟其,王霞,张其扬,等.多光轴一致性检测技术进展及其分析[J].红外与激光工程,2010,39(03):526-531.
[13]CHEN Zhibin,FAN Lei,QIN Mengze,et al.Multispectral target design and application based on two-dimensional galvanometer[J].Journal of Applied Optics,2017,38(2):187-192.陈志斌,范磊,秦梦泽,等.基于二维振镜的多光谱集成靶标设计及应用[J].应用光学,2017,38(2):187-192.
[14]LI Yacan,QIU Lirong,ZHANG Pengsong,et al.Development of portable multi-optical axes parallelism calibration system[J].Chinese Journal of Lasers,2012,39(10):149-153.李雅灿,邱丽荣,张鹏嵩,等.便携式多光轴平行性检校系统的研制[J].中国激光,2012,39(10):149-153.
[15]HAN Wanpeng,MENG Wen,LI Yunxia,et al.Error analysis and correction methods of dual galvanometer scanning[J].Electro-optic Technology Application,2011,26(04):14-18.韩万鹏,蒙文,李云霞,等.双振镜激光扫描的误差分析及校正方法[J].光电技术应用,2011,26(04):14-18.
[16]JIA Heping,SHI Yusheng,XIE Jun.Error analysis of laser galvanometer scan system and its geometrical correction arithmetic[J].Opto-Electronic Engineering,2007,34(08):37-40.贾和平,史玉升,谢军.振镜式激光扫描误差分析及几何校正算法[J].光电工程,2007,34(08):37-40.
[17]YANG Zhiqing,WU Dengxi,ZHEN Yongchao.Study of angular non-linearity in 2-D optical scanning[J].Laser Technology,2004,28(03):262-265.杨志卿,吴登喜,郑永超.二维光学扫描中扫描角度非线性研究[J].激光技术,2004,28(03):262-265.
[2]DUMA V F.Optimal scanning function of a galvanometer scanner for an increased duty cycle[J].Optical Engineering,2010,49(10):730-738.
[3]BOSCO A,BOOGERT S T,BOORMAN G E,et al.A large aperture electro-optic deflector[J].Applied Physics Letters,2009,94(21):1675-1678.
[4]WAN Lingyu,LU Zhiyong,WANG Rongcheng.Electro-optic laser scanner for arbitrary scanning in 8rows[J].Journal of Applied optics,2011,32(2):323-328.万玲玉,卢智勇,王戎承.一种8行任意扫描的电光扫瞄器[J].应用光学,2011,32(2):323-328.
[5]MA Chenhao,FU Yuegang,GONG Ping,et al.A composite scanning method and experiment of laser radar[J].Infrared and Laser Engineering,2015,44(11):3270-3275.马辰昊,付跃刚,宫平,等.一种激光雷达复合式扫描方法及试验[J].红外与激光工程,2015,44(11):3270-3275.
[6]LUO Yuan,HE Yan,HU Shanjiang,et al.Three-dimensional video imaging lidar system based on acousto-optic laser scanning[J].Chinese Journal of Lasers,2014,41(08):27-33.罗远,贺岩,胡善江,等.基于声光扫描的三维视频激光雷达技术[J].中国激光,2014,41(08):27-33.
[7]SUN Guobin,MI Qian.Research on the relationship between angle of optical galvanometer and scanning angle[J].Journal of Xi'an Technological University,2010,30(05):421-424.孙国斌,弥谦.光学振镜转角与扫描角度变化关系的研究[J].西安工业大学学报,2010,30(05):421-424.
[8]GUO Yajing,TANG Shunxing,JIANG Xiuqing,et al.Damage inspection of optical surface based on galvanometer scanning[J].Acta Optica Sinica,2017,37(06):125-131.郭亚晶,唐顺兴,姜秀青,等.基于振镜扫描方式的光学元件表面损伤检测[J].光学学报,2017,37(06):125-131.
[9]MNERIE C,DUMA V F.Mathematical model of a galvanometer-based scanner:simulations and experiments[J].SPIE,2013,8789:8789-1-15.
[10]GAO Ming,HOU Honglu.Method for establishing reference optical axis of outfield multi axis collimation deviation test[J].Acta Photonica Sinica,2008,37(05):1029-1033.高明,侯宏录.外场多光轴瞄准偏差测试的基准光轴建立方法[J].光子学报,2008,37(05):1029-1033.
[11]YE Lu,ZHAO Jianchuan.Development of measuring optical-axis parallelism instrument for multispectraland multi axial facility[J].OME Information,2011,28(12):32-36.叶露,赵建川.多光谱多光轴设备光轴平行性测量装置研制[J].光机电信息,2011,28(12):32-36.
[12]JIN Weiqi,WANG Xia,ZHANG Qiyang,et al.Technical progress and its analysis in detecting of multi axesparallelismsystem[J].Infrared and Laser Engineering,2010,39(03):526-531.金伟其,王霞,张其扬,等.多光轴一致性检测技术进展及其分析[J].红外与激光工程,2010,39(03):526-531.
[13]CHEN Zhibin,FAN Lei,QIN Mengze,et al.Multispectral target design and application based on two-dimensional galvanometer[J].Journal of Applied Optics,2017,38(2):187-192.陈志斌,范磊,秦梦泽,等.基于二维振镜的多光谱集成靶标设计及应用[J].应用光学,2017,38(2):187-192.
[14]LI Yacan,QIU Lirong,ZHANG Pengsong,et al.Development of portable multi-optical axes parallelism calibration system[J].Chinese Journal of Lasers,2012,39(10):149-153.李雅灿,邱丽荣,张鹏嵩,等.便携式多光轴平行性检校系统的研制[J].中国激光,2012,39(10):149-153.
[15]HAN Wanpeng,MENG Wen,LI Yunxia,et al.Error analysis and correction methods of dual galvanometer scanning[J].Electro-optic Technology Application,2011,26(04):14-18.韩万鹏,蒙文,李云霞,等.双振镜激光扫描的误差分析及校正方法[J].光电技术应用,2011,26(04):14-18.
[16]JIA Heping,SHI Yusheng,XIE Jun.Error analysis of laser galvanometer scan system and its geometrical correction arithmetic[J].Opto-Electronic Engineering,2007,34(08):37-40.贾和平,史玉升,谢军.振镜式激光扫描误差分析及几何校正算法[J].光电工程,2007,34(08):37-40.
[17]YANG Zhiqing,WU Dengxi,ZHEN Yongchao.Study of angular non-linearity in 2-D optical scanning[J].Laser Technology,2004,28(03):262-265.杨志卿,吴登喜,郑永超.二维光学扫描中扫描角度非线性研究[J].激光技术,2004,28(03):262-265.