高次谐波体声波谐振器机械品质因数的测量
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摘要
高次谐波体声波谐振器(HBAR)具有高的机械品质因数(Q_M)和多模谐振谱特性,其在频率控制系统中具有重要应用。对制备的Al/Zn O/Au/Sapphire结构HBAR器件进行了Q_M的测定,从实际的测试系统出发,给出了它的等效电路,通过一系列分析处理得到了Q_M随频率的变化曲线。结果表明,Q_M随频率增加逐渐减小。
High overtone bulk acoustic resonator(HBAR) exhibits high mechanical quality factor(Q_M) and multimode properties, which has important applications in frequency control system. The measurement of Q_M is carried out for HBAR with the structure of Al/Zn O/Au/Sapphire. The equivalent circuit of measured HBAR is proposed based on the experimental test system, and the behavior of Q_M with several resonance frequencies is obtained by a series of analysis. The results show that Q_M decreases with increasing frequency.
High overtone bulk acoustic resonator(HBAR) exhibits high mechanical quality factor(Q_M) and multimode properties, which has important applications in frequency control system. The measurement of Q_M is carried out for HBAR with the structure of Al/Zn O/Au/Sapphire. The equivalent circuit of measured HBAR is proposed based on the experimental test system, and the behavior of Q_M with several resonance frequencies is obtained by a series of analysis. The results show that Q_M decreases with increasing frequency.
引文
[1]Driscoll M M,Jelen R A,Matthews N.Extremely low phase noise UHF oscillators utilizing high-overtone,bulk acoustic resonators[C].Proc.of IEEE Ultrason.Symp.,1990:513–518.
[2]Li J,Liu M,Wang C.Resonance spectrum characteristics of effective electromechanical coupling coefficient of highovertone bulk acoustic resonator[J].Micromachines,2016,7(9):159.
[3]Virgil E B.Introduction to quartz crystal unit design[M].New York:Van Nostrand Reinhold Company,1982:101–133.
[4]Sorokin B P,Kvashnin G M,Volkov A P,et al.Al N/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator[J].Appl.Phys.Lett.,2013,102(11):113507.
[5]朱明博,刘梦伟,汪承灏.基于Zn O薄膜的高次谐波体声波谐振器的研究[J].应用声学,2013,32(3):212–216.Zhu Mingbo,Liu Mengwei,Wang Chenghao.Studies of high overtone bulk acoustic resonator with Zn O film[J].J.Appl.Acoust.,2013,32(3):212–216.
[6]Naik R S,Lutsky J J,Reif R,et al.Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator[J].IEEE Trans.Ultrason.Ferroelectr.Freq.Control,1998,45(1):257–263.
[7]汤亮,李俊红,郝震宏,等.应用于体声波谐振器的Zn O薄膜结构和电学特性[J].功能材料与器件学报,2008,14(4):821–826.Tang Liang,Li Junhong,Hao Zhenhong,et al.Structural and electrical characteristics of Zn O film for application in bulk acoustic wave resonator[J].Journal of Functional Materials and Devices,2008,14(4):821–826.
[8]李鉴,刘梦伟,李俊红,等.高次谐波体声波谐振器的机械品质因数[J].声学学报,2016,41(5):585–596.Li Jian,Liu Mengwei,Li Junhong,et al.Mechanical quality factor of high-overtone bulk acoustic resonator[J].Acta Acustics,2016,41(5):585–596.
[2]Li J,Liu M,Wang C.Resonance spectrum characteristics of effective electromechanical coupling coefficient of highovertone bulk acoustic resonator[J].Micromachines,2016,7(9):159.
[3]Virgil E B.Introduction to quartz crystal unit design[M].New York:Van Nostrand Reinhold Company,1982:101–133.
[4]Sorokin B P,Kvashnin G M,Volkov A P,et al.Al N/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator[J].Appl.Phys.Lett.,2013,102(11):113507.
[5]朱明博,刘梦伟,汪承灏.基于Zn O薄膜的高次谐波体声波谐振器的研究[J].应用声学,2013,32(3):212–216.Zhu Mingbo,Liu Mengwei,Wang Chenghao.Studies of high overtone bulk acoustic resonator with Zn O film[J].J.Appl.Acoust.,2013,32(3):212–216.
[6]Naik R S,Lutsky J J,Reif R,et al.Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator[J].IEEE Trans.Ultrason.Ferroelectr.Freq.Control,1998,45(1):257–263.
[7]汤亮,李俊红,郝震宏,等.应用于体声波谐振器的Zn O薄膜结构和电学特性[J].功能材料与器件学报,2008,14(4):821–826.Tang Liang,Li Junhong,Hao Zhenhong,et al.Structural and electrical characteristics of Zn O film for application in bulk acoustic wave resonator[J].Journal of Functional Materials and Devices,2008,14(4):821–826.
[8]李鉴,刘梦伟,李俊红,等.高次谐波体声波谐振器的机械品质因数[J].声学学报,2016,41(5):585–596.Li Jian,Liu Mengwei,Li Junhong,et al.Mechanical quality factor of high-overtone bulk acoustic resonator[J].Acta Acustics,2016,41(5):585–596.