基于LabVIEW的微纳加工系统设计与研究
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摘要
根据约束刻蚀加工工艺原理要求,开发了基于LabVIEW软件的微纳米加工系统。系统主要由宏动定位平台、微动定位平台、微力传感器、电化学工作站以及控制系统组成。系统通过数据采集卡和运动控制卡来实现仪器的定位与运动控制,对接触检测和主动恒力控制等关键技术进行了重点研究,使用LabVIEW编写了运动控制软件,最后在此系统上开展了光学微透镜阵列的电化学湿印章刻蚀加工试验。实验结果表明该工艺成功地把模板上的微透镜阵列图案复制到了硅基底上,具有较高的复制精度。
This paper developed a novel micro-nanofabrication system based on LabVIEW software for the confined electrochemical etching process.The system consists of macro motion unit,micro motion unit,micro-force sensor,electrochemical workstation and control system.The positioning and motion control was achieved by data acquisition card and motion control card.We studied the method of contact detecting and constant force control.Finally,experiments were conducted on this system for the etching process of the optical microlens array and the result shows that the pattern was replicated from the template to the Si substrate with high precision and consistency.
This paper developed a novel micro-nanofabrication system based on LabVIEW software for the confined electrochemical etching process.The system consists of macro motion unit,micro motion unit,micro-force sensor,electrochemical workstation and control system.The positioning and motion control was achieved by data acquisition card and motion control card.We studied the method of contact detecting and constant force control.Finally,experiments were conducted on this system for the etching process of the optical microlens array and the result shows that the pattern was replicated from the template to the Si substrate with high precision and consistency.
引文
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[2]张杰,贾晶春,朱益亮,等.电化学微/纳米加工技术[J].大学化学,2012(3):1-8.
[3]TIAN ZW,FENGZ D,TIAN ZQ,et al.Confined etchant layer technique for two-dimensional lithography at high resolution using electrochemical scanning tunneling microscopy[J].Faraday Discuss,1992(94):37-44.
[4]张力.用于半导体和金属表面三维微/纳结构制备的新型电化学加工‘方法及其应用[D].厦门:厦门大学,2008.
[5]GASPAR J,CHEN S F,GORDILLO A,et al.Digital lock in amplifier:study,design and development with a digital signal processor[J].microprocessors and microsysterns,2004,28(4):157-162.
[6]赵玫,周海婷,陈光冶.机械振动与噪声学[M].北京:科学出版社,2004.
[7]雷振山,赵晨光,魏丽,等.LabVIEW 8.2基础教程北京:中国铁道出版社,2008.
[8]ZHANG L,ZHUANG J L,MAX Z,et al.Microstructuring of p-Si(100)by localized electrochemical polishing using patterned agarose as a stamp[J].Electrochemistry Communications,2007,9(10):2529-2533.