声表面行波器件及其在微纳领域的应用
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摘要
声表面行波因其非接触性及生物相容性,在生物医学、诊断学领域得到了广泛关注。概述了声表面行波(TSAW)发生器件的基本结构,叉指换能器(IDT)的结构、参数、种类及引起声表面行波的内在机理,讨论了对微流体状态及微流体中粒子的声控制机理;综合当前该技术国内外研究现状,分析了在微纳领域中声表面行波相对于其他物理场的优势;针对声表面行波在微纳领域应用的技术难点及研究过程中存在的问题,提出了该技术的研究方向,并展望了其未来发展趋势。
In recent years, as the scientific studies in the field of biology and medicine come down to micron or even nanometer scales,many manipulation methods of micro-nano fluids and particles have emerged, such as the optical drive, the magnetic drive and the chemical mode drive. The sound-driven method has been widely used in the micro-nano field due to its features of non-contact and biocompatibility, and has broad application prospects in the fields of biomedicine and diagnostics. This paper outlines the basic structure of the traveling acoustic surface waves(TSAW) generating device, the structure, the parameters, the types of the interdigital transducer(IDT)and the internal mechanism that causes the traveling surface acoustic waves. The acoustic control mechanism of the microfluidic state and the particles in the microfluids is discussed. Based on the current research status of the technology at home and abroad, the advantages of the traveling acoustic surface waves, as compared to other physical fields in the micro-nano field are analyzed. Finally, in view of the technical difficulties of the traveling acoustic surface waves applied in the micro-nano field and the problems existing in the research process, some research directions of the technology are proposed, and a reasonable prospect for the future development trend is suggested.
In recent years, as the scientific studies in the field of biology and medicine come down to micron or even nanometer scales,many manipulation methods of micro-nano fluids and particles have emerged, such as the optical drive, the magnetic drive and the chemical mode drive. The sound-driven method has been widely used in the micro-nano field due to its features of non-contact and biocompatibility, and has broad application prospects in the fields of biomedicine and diagnostics. This paper outlines the basic structure of the traveling acoustic surface waves(TSAW) generating device, the structure, the parameters, the types of the interdigital transducer(IDT)and the internal mechanism that causes the traveling surface acoustic waves. The acoustic control mechanism of the microfluidic state and the particles in the microfluids is discussed. Based on the current research status of the technology at home and abroad, the advantages of the traveling acoustic surface waves, as compared to other physical fields in the micro-nano field are analyzed. Finally, in view of the technical difficulties of the traveling acoustic surface waves applied in the micro-nano field and the problems existing in the research process, some research directions of the technology are proposed, and a reasonable prospect for the future development trend is suggested.
引文
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[3]Polh A.A review of wireless SAW sensors[J].IEEE Transactions on Ultrasonics Ferroelectrics&Frequency Control,2000,47(2):317-332.
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[6]Renaudin A,Chabot V,Grondin E,et al.Integrated active mixing and biosensing using surface acoustic waves(SAW)and surface plasmon resonance(SPR)on a common substrate[J].Lab on a Chip,2010,10(1):111-115.
[7]文常保,党双欢,朱博,等.基于WIFI的无线声表面波传感器信号采集系统[J].传感技术学报,2015,28(10):1552-1557.Wen Changbao,Dang Shuanghuan,Zhu Bo,et al.Wireless SAW sensor signal acquisition system based on the WIFI[J].Chinese Journal of Sensors and Actuators,2015,28(10):1552-1557.
[8]党双欢.基于WIFI的无线声表面波振荡器数据采集系统[D].西安:长安大学,2016.Dang Shuanghuan.Data acquisition system of wireless acoustic surface wave oscillator based on WIFI[D].Xi'an:Chang'an University,2016.
[9]Lin S C,Mao X,Huang T J.Surface acoustic wave(SAW)acoustophoresis:Now and beyond[J].Lab on a Chip,2012,12(16):2766-2770.
[10]Miller D,Smith N,Bailey M,et al.Overview of therapeutic ultrasound applications and safety considerations[J].Journal of Ultrasound in Medicine,2012,31(4):623-634.
[11]Wiklund M.Acoustofluidics 12:Biocompatibility and cell viability in microfluidic acoustic resonators[J].Lab on a Chip,2012,12(11):2018-2028.
[12]Ding X,Lin S C,Kiraly B,et al.On-chip manipulation of single microparticles,cells,and organisms using surface acoustic waves[J].PNAS,2012,109(28):11105-11109.
[13]Li H,Friend J,Yeo L,et al.Effect of surface acoustic waves on the viability,proliferation and differentiation of primary osteoblast-like cells[J].Biomicrofluidics,2009,3(3):920.
[14]Friend J,Yeo L Y.Microscale acoustofluidics:Microfluidics driven via acoustics and ultrasonics[J].Reviews of Modern Physics,2011,83(2):647-704.
[15]Squires T M,Quake S R.Microfluidics:Fluid physics on the nanoliter scale[J].Review of Modern Physics,2005,77(3):977-1026.
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[17]武少南.声表面波压力传感器的研究[D].上海:东华大学,2014.Wu Shaonan.Research on pressure sensor of surface acoustic waves[D].Shanghai:Donghua University,2014.
[18]田四方.金刚石基LiNbO3压电薄膜的制备与声表面波性能研究[D].郑州:郑州大学,2011.Tian Sifang.Preparation of diamond-based LiNbO3 piezoelectric thin films and study on surface acoustic waves properties[D].Zhengzhou:Zhengzhou University,2011.
[19]邵春玉.PZT压电薄膜的改性研究[D].大连:大连理工大学测试计量技术及仪器系,2006.Shao Chunyu.Study on the modification of PZT piezoelectric film[D].Dalian:Dalian University of Technology,2006.
[20]刘庆辉.基于MEMS的声表面波器件设计与制作的关键技术研究[D].长沙:国防科学技术大学,2004.Liu Qinghui.Research on the key technology of MEMS-based surface acoustic waves device design and fabrication[D].Changsha:National University of Defense Technology,2004.
[21]平均芬.声光可调谐滤波器的理论分析与实验研究[D].杭州:浙江工业大学,2009.Ping Junfen.Theoretical analysis and experimental study of acousto-optic tunable filter[D].Hangzhou:Zhejiang University of Technology,2009.
[22]张瑞.声表面波射频标签的分析设计[D].天津:天津理工大学,2013.Zhang Rui.Analysis and design of acoustic surface wave radio frequency tag[D].Tianjin:Tianjin University of Technology,2013.
[23]Hartmann C S,Secrest B G.End effects in interdigital surface wave transducers[C]//1972 Ultrasonics Symposium.Piscataway New Jereey:IEEE,1972:413-416.
[24]王景山,刘天飞,孙玮,等.声表面波器件模拟与仿真[M].北京:国防工业出版社,2002:52.Wang Jingshan,Liu Tianfei,Sun Wei,et al.Simulation of surface acoustic wave devices[M].Beijing:National Defence Industry Press,2002:52.
[25]Lakin K M,Mih D W T,Tarr R M.A new interdigital electrode transducer geometry[J].IEEE Transactions on Microwave Theory&Techniques,1974,22(8):763-768.
[26]王莹莹.声表面波器件设计及测试装置的研究[D].西安:长安大学,2015.Wang Yingying.Design and test of surface acoustic wave device[D].Xi'an:Chang'an University,2015.
[27]Marshall F G,Newton C O,Paige E G S.Surface acoustic wave multistrip components and their applications[J].IEEETransactions on Microwave Theory&Techniques,1973,21(4):216-225.
[28]Zhou W,Niu L,Cai F,et al.Spatial selective manipulation of microbubbles by tunable surface acoustic waves[J].Biomicrofluidics,2016,10(3):77-85.
[29]Fakhfouri A,Devendran C,Collins D J,et al.Virtual membrane for filtration of particles using surface acoustic waves(SAW)[J].Lab on a Chip,2016,16(18):3515-3523.
[30]Barnkob R,Augustsson P,Laurell T,et al.Acoustic radiation-and streaming-induced microparticle velocities determined by microparticle image velocimetry in an ultrasound symmetry plane[J].Physical Review E Statistical Nonlinear&Soft Matter Physics,2012,86:056307.
[31]Destgeer G,Sung H J.Recent advances in microfluidic actuation and micro-object manipulation via surface acoustic waves[J].Lab on a Chip,2015,15(13):2722-2738.
[32]Yeo L Y,Friend J R.Ultrafast microfluidics using surface acoustic waves[J].Biomicrofluidics,2009,3(1):381-393.
[33]Frommelt T,Kostur M,Wenzel-Sch?Fer M,et al.Microfluidic mixing via acoustically driven chaotic advection[J].Physical Review Letters,2008,100(3):034502.
[34]Tseng W K J,Lin L,Sung W C,et al.Active micro-mixers using surface acoustic waves on Y-cut 128°LiNbO3[J].Journal of Micromechanics&Microengineering,2006,16(3):539.
[35]Luong T D,Phan V N,Nguyen N T.High-throughput micromixers based on acoustic streaming induced by surface acoustic wave[J].Microfluidics&Nanofluidics,2011,10(3):619-625.
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