带辅助电极的大偏转角MEMS芯片设计
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摘要
本文对垂直梳齿结构应用于大偏转角的情况进行了回顾和分析,指出此类芯片可靠性方面先天性不足。提出一种带辅助电极的基于预置偏转角方法的新型芯片,该芯片不但工艺简单,而且采用商品SOI硅片,成本得以有效降低。由于辅助电极的引入,使芯片具有大偏转角的同时,驱动电压得到有效降低,适于用作光开关芯片。
We point out the initial shortcomings of vertical comb driver,and present a new structure of MEMS chip with auxiliary electrode.This kind of chip can be used for big tilting angle application,such as optical switch.Compared with the chip of vertical comb driver,this kind of chip can be manufactured with commercial SOI wafer by more simple processes,effectively reducing the cost.The chip can be tilted at large angle with lower voltage resorting to the auxiliary electrode.
We point out the initial shortcomings of vertical comb driver,and present a new structure of MEMS chip with auxiliary electrode.This kind of chip can be used for big tilting angle application,such as optical switch.Compared with the chip of vertical comb driver,this kind of chip can be manufactured with commercial SOI wafer by more simple processes,effectively reducing the cost.The chip can be tilted at large angle with lower voltage resorting to the auxiliary electrode.
引文
[1]Cochran R,Fan L,De Voe L.High-power optical microswitch based on direct fiber actuation[J].Sensors and Actuation A,2005;199;512-519.
[2]Goh T,Yasu M,Mattori K,etal.Low loss and high-extinctionration silica-based strictly nonblocking 16X16 thermo-optic matrix switch[J].IEEE Photon Technol.Lett.,1998(10):810-812.
[3]梁春广,徐永青,杨拥军.MEMS光开关[J].半导体学报,2001(22):1551-1556.
[4]侯继东,黄惠良.一种新型MEMS VOA芯片的设计[J].电子科学技术,2015(02):514-518.
[2]Goh T,Yasu M,Mattori K,etal.Low loss and high-extinctionration silica-based strictly nonblocking 16X16 thermo-optic matrix switch[J].IEEE Photon Technol.Lett.,1998(10):810-812.
[3]梁春广,徐永青,杨拥军.MEMS光开关[J].半导体学报,2001(22):1551-1556.
[4]侯继东,黄惠良.一种新型MEMS VOA芯片的设计[J].电子科学技术,2015(02):514-518.