泡生法蓝宝石单晶生长冷却水系统的水温控制
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摘要
针对现有的蓝宝石单晶生长冷却水系统的水温控制精度不高、波动范围大和不稳定的问题,经过分析水温变化的滞后特性和炉内温度的变化,提出一套通过比例水阀连续调节由制冷变频机组和中间换热设备双回路混合后冷却水的温度控制方法。在Matlab/Simulink仿真环境中,仿真结果表明,参数自整定模糊PID控制器与常规PID相比具有不依赖系统模型、响应快、控制精度高的优点,且易于PLC控制器实现,使得水温有效的控制在(25±1)℃,适用于蓝宝石单晶生长冷却水系统的水温控制。
Considering of the problems of low temperature precision,large fluctuation range and instability of the existing sapphire single crystal growth cooling water system,after analyzing the variation of time delay and the change of inside furnace temperature,this paper presented a set of temperature control method for continuously adjusting the cooling water flow of the refrigeration frequency conversion unit and the intermediate heat exchange equipment by a proportional valve. The conventional PID control algorithm was compared with the fuzzy PID by using Matlab/Simulink. Simulation results show that the fuzzy PID strategy is independent on system model,and can efficiently improve the performance,which is easily realized with PLC,and the fuzzy PID controller can reach control of 25±1 ℃ under variant working conditions,which is suitable for the water temperature control of sapphire single crystal growth cooling water system.
Considering of the problems of low temperature precision,large fluctuation range and instability of the existing sapphire single crystal growth cooling water system,after analyzing the variation of time delay and the change of inside furnace temperature,this paper presented a set of temperature control method for continuously adjusting the cooling water flow of the refrigeration frequency conversion unit and the intermediate heat exchange equipment by a proportional valve. The conventional PID control algorithm was compared with the fuzzy PID by using Matlab/Simulink. Simulation results show that the fuzzy PID strategy is independent on system model,and can efficiently improve the performance,which is easily realized with PLC,and the fuzzy PID controller can reach control of 25±1 ℃ under variant working conditions,which is suitable for the water temperature control of sapphire single crystal growth cooling water system.
引文
[1]黄忠霖,黄京.控制系统MATLAB计算及仿真[M].北京:国防工业出版社,2009.
[2]郭广颂.智能控制技术[M].北京:北京航空航天大学出版社,2014.
[3]王敏,张科.控制系统原理与MATLAB仿真实现[M].北京:电子工业出版社,2014.
[4]张德丰.MATLAB simulink建模与仿真[M].北京:电子工业出版社,2009.
[5]陈绍.液压实验台油温智能控制技术研究[J].化学工程与装备,2009(2):38-40.
[6]汪传勇,左然.泡生法生长蓝宝石单晶的热场改进与模拟优化[J].人体晶工学报,2011(2):55-77.
[7]范志刚,刘建军.蓝宝石单晶的生长技术及应用研究进展[J].硅酸盐学报,2011:35-67.
[8]李林欢,刘斌,苏宏业,等.基于输出误差预测的模糊预测PID控制及应用[J].浙江大学学报:工学版,2004:26-30.
[2]郭广颂.智能控制技术[M].北京:北京航空航天大学出版社,2014.
[3]王敏,张科.控制系统原理与MATLAB仿真实现[M].北京:电子工业出版社,2014.
[4]张德丰.MATLAB simulink建模与仿真[M].北京:电子工业出版社,2009.
[5]陈绍.液压实验台油温智能控制技术研究[J].化学工程与装备,2009(2):38-40.
[6]汪传勇,左然.泡生法生长蓝宝石单晶的热场改进与模拟优化[J].人体晶工学报,2011(2):55-77.
[7]范志刚,刘建军.蓝宝石单晶的生长技术及应用研究进展[J].硅酸盐学报,2011:35-67.
[8]李林欢,刘斌,苏宏业,等.基于输出误差预测的模糊预测PID控制及应用[J].浙江大学学报:工学版,2004:26-30.