241单元变形镜结构参数设计及性能仿真
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摘要
利用多物理场软件COMSOL,建立241单元变形镜模型,计算得到变形镜驱动器影响函数数据。利用基于子孔径斜率法的241单元自适应光学系统光学像差校正程序,以3～60项泽尼克多项式拟合残差的均方根值为目标,分析了变形镜结构参数对系统校正能力的影响,确定了最佳参数值,计算得到最佳参数下的变形镜耦合量为11%。在241单元自适应光学系统中哈特曼传感器与变形镜之间存在不同平移和旋转误差的条件下,分析了系统对泽尼克多项式拟合能力的影响。结果表明,平移量和旋转量分别不能超过3mm和6°。
The 241-element deformable mirror model is built using COMSOL Multiphysics,and the influence function data of the driver of the deformable mirror are acquired by calculation.Based on the sub-aperture slope method,aprocedure is compiled,by which the optical aberration of the 241-element adaptive optics system is corrected.By taking the root mean square value of the residual fitting error of a 3-60 order Zernike polynomial,the optimal parameter is determined by analyzing the influence of the structural parameters of the deformable mirror on the correction capability.Under this optimal parameter,the coupling factor of the deformable mirror is calculated as11%.The influence of the system on the fitting ability of the Zernike polynomial is analyzed considering that there exist different translation and rotation errors between the Hartmann sensor and the deformable mirror in the 241-element adaptive optics system.The results show that the translation and rotation errors are not greater than 3 mm and 6°,respectively.
The 241-element deformable mirror model is built using COMSOL Multiphysics,and the influence function data of the driver of the deformable mirror are acquired by calculation.Based on the sub-aperture slope method,aprocedure is compiled,by which the optical aberration of the 241-element adaptive optics system is corrected.By taking the root mean square value of the residual fitting error of a 3-60 order Zernike polynomial,the optimal parameter is determined by analyzing the influence of the structural parameters of the deformable mirror on the correction capability.Under this optimal parameter,the coupling factor of the deformable mirror is calculated as11%.The influence of the system on the fitting ability of the Zernike polynomial is analyzed considering that there exist different translation and rotation errors between the Hartmann sensor and the deformable mirror in the 241-element adaptive optics system.The results show that the translation and rotation errors are not greater than 3 mm and 6°,respectively.
引文
[1] Wei P F,Lu Z W,Liu X Y,et al.Performance analysis of adaptive optical system for spatial objectives[J].Acta Photonica Sinica,2015,44(7):0701001.卫沛锋,卢振武,刘欣悦,等.自适应光学系统对空间运动目标校正性能分析[J].光子学报,2015,44(7):0701001.
[2] LüB D. Developments in the propagation,transformation and beam control of high-power lasers[J].Infrared and Laser Engineering,2000,29(1):40-45.吕百达.强激光传输变换和光束控制研究的进展[J].红外与激光工程,2000,29(1):40-45.
[3] Zhang C H,Zhao Z W,Chen L Y,et al.Application of adaptive optics in biological fluorescent microscopy[J]. Scientia Sinica(Physica, Mechanica&Astronomica),2017,47(8):084204.张财华,赵志伟,陈良怡,等.自适应光学在生物荧光显微成像技术中的应用[J].中国科学:物理学力学天文学,2017,47(8):084204.
[4] Jiang W H,Yang Z P,Guan C L,et al.New progress on adaptive optics in inertial confinement fusion facility[J].Chinese Journal of Lasers,2009,36(7):1625-1634.姜文汉,杨泽平,官春林,等.自适应光学技术在惯性约束聚变领域应用的新进展[J].中国激光,2009,36(7):1625-1634.
[5] Lin X D,Liu X Y,Wang J L,et al.Progress of the continuous surface deformable mirror based on piezoceramic actuator[J]. Laser&Optoelectronics Progress,2014,51(9):090003.林旭东,刘欣悦,王建立,等.基于压电陶瓷促动器的连续镜面变形镜研制进展[J].激光与光电子学进展,2014,51(9):090003.
[6] Li B,Tang J L,Yu W H,et al.Effect of segmented errors on image quality of segmented telescope[J].Laser&Optoelectronics Progress,2017,54(7):071202.李斌,唐金龙,于文豪,等.拼接误差对拼接镜成像质量的影响[J].激光与光电子学进展,2017,54(7):071202.
[7] Dong L Z,Lei X,Liu W J,et al.Optimization of beam intensity distributions with intracavity bimorph deformable mirror[J].High Power Laser and Particle Beams,2012,24(7):1691-1694.董理治,雷翔,刘文劲,等.腔内双压电变形镜光强分布优化[J].强激光与粒子束,2012,24(7):1691-1694.
[8] Li B M,Liao W H,Shen J X,et al.Wavefront controlalgorithmresearchonmicromachined membrane deformable mirror in the human eye aberration correction[J].Acta Optica Sinica,2010,30(4):917-921.李邦明,廖文和,沈建新,等.微机械薄膜变形镜在人眼像差校正中的波前控制算法研究[J].光学学报,2010,30(4):917-921.
[9] Tan Z J,Chen H Q,Kang J R,et al.Design of MEMS deformable micro-mirror for compensating thermally induced aberration of laser diode-pumped solid-state laser[J].Acta Optica Sinica,2009,29(4):853-858.谭佐军,陈海清,康竟然,等.用于激光二极管抽运固体激光器热畸变补偿的MEMS微变形镜设计[J].光学学报,2009,29(4):853-858.
[10] Lin X D,Liu X Y,Wang J L,et al.Performance test and experiment of correction capability of 137-element deformable mirror[J].Optics and Precision Engineering,2013,21(2):267-273.林旭东,刘欣悦,王建立,等.137单元变形镜的性能测试及校正能力实验[J].光学精密工程,2013,21(2):267-273.
[11] Lin X D,Liu X Y,Wang J L,et al.Development and performance test of the 961-element deformable mirror[J]. Acta Optica Sinica,2013,33(6):0601001.林旭东,刘欣悦,王建立,等.961单元变形镜研制及性能测试[J].光学学报,2013,33(6):0601001.
[12] Chen K,Chen J J,Mao Y X,et al.Simulation and experiment of 214-element unimorph deformable mirror with edge-driven[J].Acta Photonica Sinica,2016,45(8):0822004.陈凯,陈俊杰,毛宇昕,等.带边缘驱动的214单元单压电变形镜仿真与实验[J].光子学报,2016,45(8):0822004.
[13] Yan H,Lei X,Liu W J,et al.Beam cleanup of slab laser with 37-element bimorph deformable mirror[J].High Power Laser and Particle Beams,2012,24(7):1663-1666.晏虎,雷翔,刘文劲,等.37单元双压电片变形镜板条激光光束净化[J].强激光与粒子束,2012,24(7):1663-1666.
[14] Liu L H,Long Y,Cao F,et al.Simulation and calculation of low order aberration corrected by fourarm edge-driven deformable mirror[J]. Chinese Journal of Lasers,2015,42(10):1012001.刘李辉,龙吟,曹芬,等.4臂边缘驱动变形镜校正低阶像差的仿真计算[J].中国激光,2015,42(10):1012001.
[15] Ma J Q,Liu Y,Chen J J,et al.Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Optics and Precision Engineering,2014,22(8):2047-2053.马剑强,刘莹,陈俊杰,等.200单元硅基单压电变形镜的设计与测试[J].光学精密工程,2014,22(8):2047-2053.
[16] Chen X D.Testing of a 9-points deformable mirror and its application in space camera system[J].Acta Optica Sinica,2013,33(10):1023001.陈新东.9点促动变形镜性能测试及在空间相机中的应用研究[J].光学学报,2013,33(10):1023001.
[17] You J C,Zhou H,Guan C L,et al.Performance test and analysis of 913-element deformable mirrors[J].Laser Technology,2017,41(6):867-871.尤俊成,周虹,官春林,等.913单元变形镜性能测试与分析[J].激光技术,2017,41(6):867-871.
[2] LüB D. Developments in the propagation,transformation and beam control of high-power lasers[J].Infrared and Laser Engineering,2000,29(1):40-45.吕百达.强激光传输变换和光束控制研究的进展[J].红外与激光工程,2000,29(1):40-45.
[3] Zhang C H,Zhao Z W,Chen L Y,et al.Application of adaptive optics in biological fluorescent microscopy[J]. Scientia Sinica(Physica, Mechanica&Astronomica),2017,47(8):084204.张财华,赵志伟,陈良怡,等.自适应光学在生物荧光显微成像技术中的应用[J].中国科学:物理学力学天文学,2017,47(8):084204.
[4] Jiang W H,Yang Z P,Guan C L,et al.New progress on adaptive optics in inertial confinement fusion facility[J].Chinese Journal of Lasers,2009,36(7):1625-1634.姜文汉,杨泽平,官春林,等.自适应光学技术在惯性约束聚变领域应用的新进展[J].中国激光,2009,36(7):1625-1634.
[5] Lin X D,Liu X Y,Wang J L,et al.Progress of the continuous surface deformable mirror based on piezoceramic actuator[J]. Laser&Optoelectronics Progress,2014,51(9):090003.林旭东,刘欣悦,王建立,等.基于压电陶瓷促动器的连续镜面变形镜研制进展[J].激光与光电子学进展,2014,51(9):090003.
[6] Li B,Tang J L,Yu W H,et al.Effect of segmented errors on image quality of segmented telescope[J].Laser&Optoelectronics Progress,2017,54(7):071202.李斌,唐金龙,于文豪,等.拼接误差对拼接镜成像质量的影响[J].激光与光电子学进展,2017,54(7):071202.
[7] Dong L Z,Lei X,Liu W J,et al.Optimization of beam intensity distributions with intracavity bimorph deformable mirror[J].High Power Laser and Particle Beams,2012,24(7):1691-1694.董理治,雷翔,刘文劲,等.腔内双压电变形镜光强分布优化[J].强激光与粒子束,2012,24(7):1691-1694.
[8] Li B M,Liao W H,Shen J X,et al.Wavefront controlalgorithmresearchonmicromachined membrane deformable mirror in the human eye aberration correction[J].Acta Optica Sinica,2010,30(4):917-921.李邦明,廖文和,沈建新,等.微机械薄膜变形镜在人眼像差校正中的波前控制算法研究[J].光学学报,2010,30(4):917-921.
[9] Tan Z J,Chen H Q,Kang J R,et al.Design of MEMS deformable micro-mirror for compensating thermally induced aberration of laser diode-pumped solid-state laser[J].Acta Optica Sinica,2009,29(4):853-858.谭佐军,陈海清,康竟然,等.用于激光二极管抽运固体激光器热畸变补偿的MEMS微变形镜设计[J].光学学报,2009,29(4):853-858.
[10] Lin X D,Liu X Y,Wang J L,et al.Performance test and experiment of correction capability of 137-element deformable mirror[J].Optics and Precision Engineering,2013,21(2):267-273.林旭东,刘欣悦,王建立,等.137单元变形镜的性能测试及校正能力实验[J].光学精密工程,2013,21(2):267-273.
[11] Lin X D,Liu X Y,Wang J L,et al.Development and performance test of the 961-element deformable mirror[J]. Acta Optica Sinica,2013,33(6):0601001.林旭东,刘欣悦,王建立,等.961单元变形镜研制及性能测试[J].光学学报,2013,33(6):0601001.
[12] Chen K,Chen J J,Mao Y X,et al.Simulation and experiment of 214-element unimorph deformable mirror with edge-driven[J].Acta Photonica Sinica,2016,45(8):0822004.陈凯,陈俊杰,毛宇昕,等.带边缘驱动的214单元单压电变形镜仿真与实验[J].光子学报,2016,45(8):0822004.
[13] Yan H,Lei X,Liu W J,et al.Beam cleanup of slab laser with 37-element bimorph deformable mirror[J].High Power Laser and Particle Beams,2012,24(7):1663-1666.晏虎,雷翔,刘文劲,等.37单元双压电片变形镜板条激光光束净化[J].强激光与粒子束,2012,24(7):1663-1666.
[14] Liu L H,Long Y,Cao F,et al.Simulation and calculation of low order aberration corrected by fourarm edge-driven deformable mirror[J]. Chinese Journal of Lasers,2015,42(10):1012001.刘李辉,龙吟,曹芬,等.4臂边缘驱动变形镜校正低阶像差的仿真计算[J].中国激光,2015,42(10):1012001.
[15] Ma J Q,Liu Y,Chen J J,et al.Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Optics and Precision Engineering,2014,22(8):2047-2053.马剑强,刘莹,陈俊杰,等.200单元硅基单压电变形镜的设计与测试[J].光学精密工程,2014,22(8):2047-2053.
[16] Chen X D.Testing of a 9-points deformable mirror and its application in space camera system[J].Acta Optica Sinica,2013,33(10):1023001.陈新东.9点促动变形镜性能测试及在空间相机中的应用研究[J].光学学报,2013,33(10):1023001.
[17] You J C,Zhou H,Guan C L,et al.Performance test and analysis of 913-element deformable mirrors[J].Laser Technology,2017,41(6):867-871.尤俊成,周虹,官春林,等.913单元变形镜性能测试与分析[J].激光技术,2017,41(6):867-871.