摘要
扩散口/喷嘴式无阀微泵可集成在微流控芯片上作为系统结构中的流体驱动单元,因此一直是微流体领域的一个研究热点,受到人们的关注,十余年来取得了很大的进展。目前,扩散口/喷嘴微泵的流量还较低,某些场合不能满足要求。对此,研制了多扩散口/喷嘴式无阀微泵,在不增加微泵体积的基础之上增加了泵的流量。
对压电驱动无阀微泵进行理论分析,建立无阀微泵的基本方程,分析扩散口/喷嘴的流动情况。对微泵的结构进行研究,在研究总结大量前人工作的基础上,提出一种双扩散口/喷嘴结构。应用ANSYS有限元分析软件对无阀微泵工作过程进行模拟分析,进行压电耦合场和流固耦合场相结合的多场瞬态分析。分析结果表明在同样电压条件下,双口微泵的瞬时流量比单口微泵大,并且随着电压的增大,双口微泵与单口微泵瞬时流量的比值增大,在170V电压下,增大了79%。
经过清洗,氧化,光刻,各向异性腐蚀,静电键合等MEMS工艺制作出了单口和双口扩散口/喷嘴无阀微泵,用同样的材料和性能相同的压点片对单口泵和双口泵进行封装,使其在扩散口/喷嘴数量之外的其他条件都相同,便于对比分析。
对单口微泵和双口微泵进行测试。在170V驱动电压和560Hz频率下,双口泵最大流量达到1.5mL/min,而单口微泵在同样电压下时,在625Hz频率下流量达到最大,为902μL/min。在170V电压和500Hz的频率下,双口泵的流量比单口泵增大了56%。测试结果表明双扩散口/喷嘴结构可以增加微泵的流量。测试结果与模拟结果相符。
Nozzle/diffuser valveless micropump can be integrated in micro fluidic chip as a fluid drive element, so it keeps a focus in micro fluid field, and get prominently developed. Nowadays, nozzle/diffuser micropump still have a low flow, cannot meet some requirement. Therefore, double nozzle/diffusers micropump is fabricated which has a higher flow without volume increase.
The theory of nozzle/diffuser valveless micropump is analyzed, the equations are induced, and flow characteristic of nozzle/diffuser element is researched. Structure of the valveless micropump is researched, double nozzle/diffuser structure is presented after study of former research. Work status of valveless micropump is simulated by FEA software ANSYS, transient multiple coupling which combined with piezoelectric coupling and FSI coupling is executed. The results indicate that under the same condition, transient flow of double nozzle/diffuser micropump is higher than single nozzle/diffuser micropump, and with voltage increase, the ratio of flow between the two types of micropump increases, it can be up to 79% under a voltage of 170V.
By MEMS technics including clearing, oxidation, photolithography, anisotropy etch, bonding, etc., single and double nozzle/diffuser micropumps are fabricated, ensure that two types of micropump have the same condition including PZT with membranes with same performance and same encapsulating materials, while only except numbers of nozzle/diffuser.
Test single and double nozzle/diffuser micropumps and compare them. Under drive voltage of 170V and frequency of 560Hz, flow of double nozzle/diffuser micropumps is 1.5mL/min, while the single’s is 902μl/min. under the same 170V and 500Hz, flow of double nozzle/diffuser micropumps is 56% higher than that of single. The results show double nozzle/diffuser structure of micropumps increases the flow, it accords to the simulation results.
引文
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