双圆锥形圆弧刀刻划衍射光栅的槽形控制研究
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摘要
衍射光栅是一种精密的光学元件,广泛地应用于各种现代光谱分析、精密测量中。利用金刚石刻划刀在膜层上机械刻划衍射光栅,是一种不可替代的光栅制作方法。因此,开展衍射光栅机械刻划理论及槽形控制技术研究是非常必要的。
针对金刚石弧形刻刀刻划衍射光栅的过程,本文建立了等效下压速度模型；根据滑移线场理论,建立了光栅机械刻划过程的刻划深度模型,为铝膜蒸镀及刻刀定位提供理论指导依据。
在压痕、划痕试验的基础上,测得铝膜属性,建立了光栅刻划的有限元模型；采用Deform-3D有限元分析软件,对光栅槽形形成过程进行了模拟仿真,分析了刻划参数、刀具参数对光栅槽形形成的影响规律。
采用正交试验方法,优化刻划参数、刀具参数,分析了铝膜材料流动规律以及刻划载荷,提出了光栅槽形形成的控制策略。
最后,本文还根据金刚石刻划刀的磨损情况,进行了刀具金刚石定向设计,为大面积衍射光栅刻划提供了长寿命刀具。
Diffraction grating is a precision optical element, widely used in various modern spectral analysis, precision measurement. The mechanically ruled grating in the film by the diamond graver is one unreplaceable manufacture method of diffraction grating. Therefore, it is very necessary to carry out theory research of the mechanically ruled diffraction grating and control technology of the grating groove.
According to the course of the mechanically ruled grating by the circular graver, this paper establishes the model of equivalent indentation speed. Based on slip-line field theory, the mathematical model of ruled depth is established.it provides the theory basis for the aluminum membrane evaporation and the graver orientation.
Based on measured the aluminum film properties by the indentation test and scratch test, the paper has established the finite element model of ruled grating. The forming process of grating grooved has been simulated by the finite element analysis software Deform-3D, The influence rule of the scoring parameter and graver parameter to the forming process of grating groove are analyzed.
Using the orthogonal test method, the scoring parameter and graver parameter have been optimized. The aluminum membrane material mobile rule has been analyzed, Scoring load has obtained. Control strategy has been proposed about the forming process of grating groove.
Finally, According to diamond graver wear condition, the orientation of diamond graver is designed, which provides long life graver for big area diffraction grating.
针对金刚石弧形刻刀刻划衍射光栅的过程,本文建立了等效下压速度模型；根据滑移线场理论,建立了光栅机械刻划过程的刻划深度模型,为铝膜蒸镀及刻刀定位提供理论指导依据。
在压痕、划痕试验的基础上,测得铝膜属性,建立了光栅刻划的有限元模型；采用Deform-3D有限元分析软件,对光栅槽形形成过程进行了模拟仿真,分析了刻划参数、刀具参数对光栅槽形形成的影响规律。
采用正交试验方法,优化刻划参数、刀具参数,分析了铝膜材料流动规律以及刻划载荷,提出了光栅槽形形成的控制策略。
最后,本文还根据金刚石刻划刀的磨损情况,进行了刀具金刚石定向设计,为大面积衍射光栅刻划提供了长寿命刀具。
Diffraction grating is a precision optical element, widely used in various modern spectral analysis, precision measurement. The mechanically ruled grating in the film by the diamond graver is one unreplaceable manufacture method of diffraction grating. Therefore, it is very necessary to carry out theory research of the mechanically ruled diffraction grating and control technology of the grating groove.
According to the course of the mechanically ruled grating by the circular graver, this paper establishes the model of equivalent indentation speed. Based on slip-line field theory, the mathematical model of ruled depth is established.it provides the theory basis for the aluminum membrane evaporation and the graver orientation.
Based on measured the aluminum film properties by the indentation test and scratch test, the paper has established the finite element model of ruled grating. The forming process of grating grooved has been simulated by the finite element analysis software Deform-3D, The influence rule of the scoring parameter and graver parameter to the forming process of grating groove are analyzed.
Using the orthogonal test method, the scoring parameter and graver parameter have been optimized. The aluminum membrane material mobile rule has been analyzed, Scoring load has obtained. Control strategy has been proposed about the forming process of grating groove.
Finally, According to diamond graver wear condition, the orientation of diamond graver is designed, which provides long life graver for big area diffraction grating.
引文
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[2]李英海,巴音贺希格,齐向东.用于衍射光栅刻划的超精密金刚石刻刀的研制.微细加工技术.2006,6：15-17
[3]郑春艳,郑国兴,周崇喜等.闪耀光栅阵列用于半导体激光器列阵光束整形.强激光与粒子束.2005,17：62--66
[4]徐福全,巴音贺希格.红外激光器选频闪耀光栅的研制.激光与红外.2007,37(2)：151-154
[5]李航,陈安民,李济顺等.基于平面光栅的加工中心几何误差辨识研究.机床与液压.2003(6)：299-301
[6]邵双运,余浩.基于光栅投射的光学三维测量仪的研制.研制与开发.2007,2：38-40
[7]陈海燕,屠恒海.基于ARM内核微处理器的光栅位移测量系统.中国科技信息.2007,4
[8]杨俊波,苏显渝,徐平.自由空间微闪耀光栅解复用器.光学技术.2006,8：533-536.
[9]杨俊波,苏显渝.自由空间的微闪耀光栅光开关.光电工程.2006,9：119-123.
[10]赵博.衍射光栅的相对拼接：[博士论文].长春：中国科学院长春光学精密机械与物理研究所,2000
[11]Certified Precision diffraction gratings, Bauseh & lomb,1981
[12]Erwin G Loewen and Robert S. Wiley, Large diffraction grating ruling engine with nanometer digital control system, Proc. SPIE.,1987:88-95.
[13]梁浩明,500mm衍射光栅刻划机的关键机械结构-磨床与磨削.1991,2：42-44
[14]时轮,郝德阜,齐向东.高精度衍射光栅刻划机的最新技术进展.仪器仪表学报.2001,22(4)：438-439
[15]张鸣,张伟,华心等.AFM制作纳米光栅技术研究.光学技术.2006,32(3)：330-336
[16]王伟,周常河.高精度微结构聚合物光栅的复制技术.中国激光.2007,34(10)：1363-1367
[17]G. Q. Liang, W.D.Mao, Y. Y. Pu, et al. Fabrication of two-dimensional coupled photonic crystal resonator arrays by holographic lithography.Appl. phys. Lett.2006,89(4):041902/1-041902/3
[18]赵丽娟.全息光栅与制作工艺的探索.光学技术.1994(4)：19-20
[19]罗庵,陈永诗,沈坤等.光栅干法刻蚀与湿法刻蚀的研究.光学与光电技术.2003,1(1)：54-56
[20]贾伟,周常河,戴恩文等.低密度台阶形闪耀光栅的制作.中国激光.2008,35(2)：184-186
[21]祝绍箕,绉海兴,包学诚,等.衍射光栅.北京：机械工业出版社,1986：161-175
[22]钟春生,韩静涛.金属塑性变形力计算基础.北京：冶金工业出版社,1994：1-4
[23]王仲仁.塑性加工力学基础.北京：国防工业出版社,1989：1-257
[24]傅敏,王会才,洪友士.微米纳米尺度的材料力学性能测试.力学进展.2000,30(3)：391-399
[25]王文凯,汤文成.有限元法在金属高速切削加工技术中的应用.机械设计与制造.2008(6)：195-197
[26]彭颖虹.金属塑性成形仿真技术.上海：上海交通大学,1999：19-26
[27]刘才.金属成型非线性有限元模拟技术.燕山大学学报.1998,2(1)：23-26
[28]薛永栋,韩静涛.基于DEFORM的金属压力加工数值模拟.冶金设备.2007,(4)：34-37
[29]赵雷,邓远超,王军等.基于DDFORM-3D的高速车削有限元模拟.自动化与控制.2007(5)：69-70
[30]周朝辉,曹海桥,吉卫等DEFORM有限元分析系统软件及其应用.热加工工艺.2003(4)：51-52
[31]安世亚太DEFORM-金属成形及热处理专业仿真环境
[32]吴勃.金属切削加工过程的有限元建模与仿真：[硕士论文].镇江：江苏大学,2006
[33]王文凯,汤文成.有限元法在金属高速切削加工技术中的应用.机械设计与制造.2008(6)：195-197
[34]叶玉刚.切削加工过程有限元仿真的关键技术.化学工程与装备.2009(10)：116-120
[35]李涛,顾立志.金属切削过程有限元仿真关键技术及应考虑的若干问题.工具技术.2008,42(12)：14-18
[36]周泽华.金属切削理论.北京：机械工业出版社,1992
[40]K Iwata, KOsakada, Y Terasaka. Process modeling of orthogonal cutting by the rigid-plastic finite element method. J. Eng.Mater. Technol.,1984,106:132-138
[37]Maekawa K, Maeda M. Simulation analysis of three2dimensional continuous chip formation processes (1st. report)-FEMformu2 lation and a few results. J. Japan Soc. Prec. Eng,1993,59(11):1827-833
[38]Sasahara H, Obikawa T, Shirakashi T. FEM analysis of cutting sequence effect on mechanical characteristics in machined layer. Journal of Materials Processing Technology,1996,62 (4):448-453
[39]方刚,曾攀.切削加工过程数值模拟的研究进展.力学进展.2001,31(3)：394-404
[41]Ng E G, Aspinwall D K, Brazil D, Monaghan J.Modelling of temperature and forces when orthogonally machining hardened steel. International Journal of Machine Tools and Manufacture,1999,39(6):885-903
[42]李俊,游理华.塑性有限元数值模拟的重划网技术.机械研究与应用.1998,11(12)：28-29
[43]Hageman L J.Automative adaptive remenshing in ALPID, an advanced forging simulation program. Comput. eng,1987,2:93-97
[44]Nicolas V T, Citipitioglu E.A general isoparmetric finite element program SDRC SUPERB.Comput.Struct, 1977,7:303313
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