基于RC微能电源的微细电火花加工数值模拟和试验研究
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摘要
微细电火花加工是一种微细特种加工工艺方法,在微机械以及微细结构加工领域具有举足轻重的地位。由于RC微能电源简单可靠,在微细电火花加工中得到了大量的应用。为了深入对微细电火花加工机理的认识,进一步提高微细电火花加工能力和效率,本文进行了相关的数值模拟和试验研究,在理论研究上和工程应用上取得了一些结论。
本文主要研究内容如下:
1.针对RC微能电源,建立了极间电场物理模型,采用数值模拟方法,探讨了电极形状、工作极性等对电场分布的影响,掌握了相关的电场分布规律。
2.根据传热学理论,建立了微细电火花加工工件表面的热物理模型,采用数值模拟方法,考虑热物性参数、对流换热、相变潜热等随温度变化的影响因素,掌握了工件表面温度场分布,得出了微细电火花加工极间温度场的分布规律。
3.在上述研究基础上,采用微细电解方法在线制作柱状钨电极,合理选择工艺参数,进行了微细电火花加工试验,并分析了电参数对加工尺度和效率的影响,获得了三组应用于不同加工场合下优化的电参数。
Micro EDM(electric discharge machining) is a kind of special machining technique for micro machining .It has the pivotal status in the domain of micro machine as well as the micro structure processing . Micro-energy RC pulse generator obtains massive applications in micro EDM because of its simplicity and reliability .To raise the processing scale and the efficiency, this article has carried on the related numerical simulation and experimental study, and has made some progress in the fundamental research as well as the engineering application.
Main content of this article is as follows:
1. In view of micro-energy RC pulse generator, physical model of the electric field in the interelectrode has been established. Using the numerical simulation method, electric field distribution influenced by the electrode geometry and the machining polarly has been discussed. Also, the related electric field distributed rule of the micro EDM has been got.
2. According to heat transfer theory, the thermal physical model of work piece’s surface in micro EDM has been established, using the numerical simulation method, considering some factors influenced along with the changing of temperature such as the thermal natural parameter, the heat convection, the latent heat and so on, the temperature field distribution of the work piece’s surface has been grasped, and distributed rule of the interelectrode temperature field in micro EDM has been obtained.
3. Basing the research foundation above, using the micro electric chemical machining to manufacture columnar tungsten electrode on-site, choosing the reasonable technological parameter, micro EDM experiments have been carried on. Also, the influence to the working accuracy and the efficiency caused by electrical parameter has been analyzed. What’s more, three groups optimized electrical parameter have been obtained to apply in the different manufacturing places.
本文主要研究内容如下:
1.针对RC微能电源,建立了极间电场物理模型,采用数值模拟方法,探讨了电极形状、工作极性等对电场分布的影响,掌握了相关的电场分布规律。
2.根据传热学理论,建立了微细电火花加工工件表面的热物理模型,采用数值模拟方法,考虑热物性参数、对流换热、相变潜热等随温度变化的影响因素,掌握了工件表面温度场分布,得出了微细电火花加工极间温度场的分布规律。
3.在上述研究基础上,采用微细电解方法在线制作柱状钨电极,合理选择工艺参数,进行了微细电火花加工试验,并分析了电参数对加工尺度和效率的影响,获得了三组应用于不同加工场合下优化的电参数。
Micro EDM(electric discharge machining) is a kind of special machining technique for micro machining .It has the pivotal status in the domain of micro machine as well as the micro structure processing . Micro-energy RC pulse generator obtains massive applications in micro EDM because of its simplicity and reliability .To raise the processing scale and the efficiency, this article has carried on the related numerical simulation and experimental study, and has made some progress in the fundamental research as well as the engineering application.
Main content of this article is as follows:
1. In view of micro-energy RC pulse generator, physical model of the electric field in the interelectrode has been established. Using the numerical simulation method, electric field distribution influenced by the electrode geometry and the machining polarly has been discussed. Also, the related electric field distributed rule of the micro EDM has been got.
2. According to heat transfer theory, the thermal physical model of work piece’s surface in micro EDM has been established, using the numerical simulation method, considering some factors influenced along with the changing of temperature such as the thermal natural parameter, the heat convection, the latent heat and so on, the temperature field distribution of the work piece’s surface has been grasped, and distributed rule of the interelectrode temperature field in micro EDM has been obtained.
3. Basing the research foundation above, using the micro electric chemical machining to manufacture columnar tungsten electrode on-site, choosing the reasonable technological parameter, micro EDM experiments have been carried on. Also, the influence to the working accuracy and the efficiency caused by electrical parameter has been analyzed. What’s more, three groups optimized electrical parameter have been obtained to apply in the different manufacturing places.
引文
[1]于云霞.微细电火花加工技术的最新进展及应用实例[J],电加工于模具,2003,(4):4~6
[2]赵万生,王振龙,郭东明.国外特种加工技术的最新进展[J],电加工,1999,(5):9~12
[3]王振龙,赵万生.微三维结构型腔的微细电火花加工[J],微细加工技术,2000,(1):71~75
[4] K .Furutani. A Parallel link end effector for scanning electrical discharge machining process[J], Precision Engineering,1998,22(3):131~140
[5] J.Marafona, J.A.G.Chousal. A finite element model of EDM based on the Joule effect[J], International Journal of Machine Tools & Manufacture,2006,(3):1~8
[6] Yadava Vinod. Temperature distribution during electro-discharge abrasive grinding[J], Machining Science and Technology,2002, (6):92~127
[7]黄志刚,郭钟宁.单脉冲电火花加工温度场的有限元分析[J],广东工业大学学报,2002,19(4):38~43
[8]南欢.电火花加工变质层对模具成形表面的影响[J].现代制造工程, 2006, (8): 75-77
[9]闫换新,冉宇瑶,赵万生,等.电火花加工间隙流场的研究及仿真[J],中国机械工程,2001,12(8):858~860
[10] Mulik R S. Thermal stresses during electro-chemical spark machining[J],International Journal of Manufacturing Technology and Management,2005,(7):287~307
[11] Yadava Vinod. Theoretical analysis of thermal stresses in electro-discharge diamond grinding[J] ,Machining Science and Technology ,2004,(8):119~140
[12] Yadava Vinod. Thermal stresses due to electrical discharge machining[J], International Journal of Machine Tools and Manufacture,2002,(42):877~888
[13] Das Shuvra. EDM simulation: Finite element-based calculation of deformation, microstructure and residual stresses[J],Journal of Materials Processing Technology ,2003,(142):434~451
[14] Rebelo J C. Residual stresses after EDM-FEM study and measurement results[J], Materials Science Forum,2002,(407):159~164
[15] Shankar P. Analysis of spark profiles during EDM process[J], Machining Science and Technology ,1997,(1):195~217
[16] Snoey R,Dauw D,Jennes M. Survey of EDM adaptive control and detection systems[J], Annals of the CIRP,1982,31(2):483~489
[17]何光敏.镜面电火花加工工艺及超精规准脉冲电源的研究[D],哈尔滨:哈尔滨工业大学,1999:
[18]张勇.微细电火花加工系统及其工艺技术研究[D],哈尔滨:哈尔滨工业大学,2004
[19] Fuzhu Han,Shinya Wachi,Masanori Kunieda. Improvement of machining characteristics of micro-EDM using transistor type isopulse generator and servo feed control[J],Precision Engineering, 2004,28:378~385
[20] Nebashi N.. Process truing/dressing or grinding wheels by WEDG and EFID[J], International Journal of Electrical Machining, 1998,(3):59~64
[21]高长水,宋小中,刘正勋.电火花微细加工系统研制[J],机械设计与制造工程,1997,(5):9~11
[22]张勇,王振龙,胡富强,等.微细电火花加工装置的设计与应用[J],微细加工技术,2004,(2):7~9
[23]吴鑫,李勇,崔晶,等.三维微细电火花加工系统设计及实验研究[J],电加工与模具,2005,(4):17~19
[24]黄瑞宁,狄士春.新型微能可控的MWEDM脉冲电源[J],新技术新工艺,2005,(5):11~13
[25]霍孟友.电火花精微加工脉冲电源设计[J],新技术新工艺,1999,(6):3~5
[26] Fuzhu Han, Masanori Kunieda. Development of parallel spark electrical discharge machining [J], Precision Engineering, 2004,(28):65~72
[27]余艳青,王建业,韩冠军.MOSFET高频窄脉冲电解加工工程化电源研制[J],电加工与模具,2005,(2):59~62
[28]秦曾煌.电工学[M](第五版),北京,高等教育出版社,2001:243
[29]何广敏,赵万生.纳秒级脉冲电源的研制[J],电加工,1999,(4):11~13
[30]余承业.特种加工新技术[M],北京,国防工业出版社,1995:28
[31]张建华,王寿璋.电火花加工的进展与发展趋势[J],山东机械,2004,(5):8~16
[32]赵万生.先进电火花加工技术[M],哈尔滨,哈尔滨工业大学出版社,2004:116
[33]李勇,王显军.微细电火花关键技术研究,清华大学学报[J],1999,39(8):45~48
[34]赵万生,孟庆国.混粉电火花镜面加工技术及应用,2001年中国机械工程学会年会暨第九届全国特种加工学术年会论文集,北京,机械工业出版社,2001:73~77
[35]许华宇,李明辉,彭颖红.电火花加工理论研究现状与展望[J],电加工,1997,(3):8~12
[36]李明辉.电火花加工理论[M],北京,国防工业出版社,1989:69
[37]楼乐明.电火花加工仿真技术研究[D],上海:上海交通大学,2000
[38] M. Kunieda, M. Yoshida. Electrical Discharge Machining in Gas, Annals of the CIRP,1997,46(1):143~146
[39]曹国辉.基于单脉冲放电的若干微细加工方法及试验研究[D],哈尔滨:哈尔滨工业大学,2004
[40]薛忠明,顾兰,张彦花.激光焊接温度场模拟[J],焊接学报,2003,124(2):79~82
[41]张建华,孟艳华,刘承帅.超声振动辅助气中放电加工温度场模拟[J],工具技术,2004,38(9):69~71
[42] F.Soldera,A.Lasagni, F.Mucklich. Determination of The Cathode Erosion And Temperature For The Phases of High Voltage Discharges Using FEM Simulations[J],Computational Materials Science , 2005, (32):123~139
[43]杨全,帐真.金属凝固与铸造过程数值模拟[M],杭州,浙江大学出版社,1996:9
[44]张家荣,赵廷元.工程常用物质的热物理性质手册[M],北京,新时代出版社,1987:74
[45]孔祥谦.有限元法在传热学中的应用[M],北京,科学出版社,1998:103
[46]蒋凯.卧式微细电火花加工系统及其工艺试验研究,南京:南京航空航天大学,2005
[47]蒋凯,汪炜.激波压力扰动辅助电火花加工高深宽比微细结构方法研究[J],电加工与模具,2005,(6):30~33
[48]胡富强,王振龙,赵万生,等.线电极放电磨削技术的研究与应用[J],哈尔滨工业大学学报,2003,35(10):1171~1174
[49]卢存伟.电火花加工工艺学[M],北京:国防工业出版社,1988:12
[2]赵万生,王振龙,郭东明.国外特种加工技术的最新进展[J],电加工,1999,(5):9~12
[3]王振龙,赵万生.微三维结构型腔的微细电火花加工[J],微细加工技术,2000,(1):71~75
[4] K .Furutani. A Parallel link end effector for scanning electrical discharge machining process[J], Precision Engineering,1998,22(3):131~140
[5] J.Marafona, J.A.G.Chousal. A finite element model of EDM based on the Joule effect[J], International Journal of Machine Tools & Manufacture,2006,(3):1~8
[6] Yadava Vinod. Temperature distribution during electro-discharge abrasive grinding[J], Machining Science and Technology,2002, (6):92~127
[7]黄志刚,郭钟宁.单脉冲电火花加工温度场的有限元分析[J],广东工业大学学报,2002,19(4):38~43
[8]南欢.电火花加工变质层对模具成形表面的影响[J].现代制造工程, 2006, (8): 75-77
[9]闫换新,冉宇瑶,赵万生,等.电火花加工间隙流场的研究及仿真[J],中国机械工程,2001,12(8):858~860
[10] Mulik R S. Thermal stresses during electro-chemical spark machining[J],International Journal of Manufacturing Technology and Management,2005,(7):287~307
[11] Yadava Vinod. Theoretical analysis of thermal stresses in electro-discharge diamond grinding[J] ,Machining Science and Technology ,2004,(8):119~140
[12] Yadava Vinod. Thermal stresses due to electrical discharge machining[J], International Journal of Machine Tools and Manufacture,2002,(42):877~888
[13] Das Shuvra. EDM simulation: Finite element-based calculation of deformation, microstructure and residual stresses[J],Journal of Materials Processing Technology ,2003,(142):434~451
[14] Rebelo J C. Residual stresses after EDM-FEM study and measurement results[J], Materials Science Forum,2002,(407):159~164
[15] Shankar P. Analysis of spark profiles during EDM process[J], Machining Science and Technology ,1997,(1):195~217
[16] Snoey R,Dauw D,Jennes M. Survey of EDM adaptive control and detection systems[J], Annals of the CIRP,1982,31(2):483~489
[17]何光敏.镜面电火花加工工艺及超精规准脉冲电源的研究[D],哈尔滨:哈尔滨工业大学,1999:
[18]张勇.微细电火花加工系统及其工艺技术研究[D],哈尔滨:哈尔滨工业大学,2004
[19] Fuzhu Han,Shinya Wachi,Masanori Kunieda. Improvement of machining characteristics of micro-EDM using transistor type isopulse generator and servo feed control[J],Precision Engineering, 2004,28:378~385
[20] Nebashi N.. Process truing/dressing or grinding wheels by WEDG and EFID[J], International Journal of Electrical Machining, 1998,(3):59~64
[21]高长水,宋小中,刘正勋.电火花微细加工系统研制[J],机械设计与制造工程,1997,(5):9~11
[22]张勇,王振龙,胡富强,等.微细电火花加工装置的设计与应用[J],微细加工技术,2004,(2):7~9
[23]吴鑫,李勇,崔晶,等.三维微细电火花加工系统设计及实验研究[J],电加工与模具,2005,(4):17~19
[24]黄瑞宁,狄士春.新型微能可控的MWEDM脉冲电源[J],新技术新工艺,2005,(5):11~13
[25]霍孟友.电火花精微加工脉冲电源设计[J],新技术新工艺,1999,(6):3~5
[26] Fuzhu Han, Masanori Kunieda. Development of parallel spark electrical discharge machining [J], Precision Engineering, 2004,(28):65~72
[27]余艳青,王建业,韩冠军.MOSFET高频窄脉冲电解加工工程化电源研制[J],电加工与模具,2005,(2):59~62
[28]秦曾煌.电工学[M](第五版),北京,高等教育出版社,2001:243
[29]何广敏,赵万生.纳秒级脉冲电源的研制[J],电加工,1999,(4):11~13
[30]余承业.特种加工新技术[M],北京,国防工业出版社,1995:28
[31]张建华,王寿璋.电火花加工的进展与发展趋势[J],山东机械,2004,(5):8~16
[32]赵万生.先进电火花加工技术[M],哈尔滨,哈尔滨工业大学出版社,2004:116
[33]李勇,王显军.微细电火花关键技术研究,清华大学学报[J],1999,39(8):45~48
[34]赵万生,孟庆国.混粉电火花镜面加工技术及应用,2001年中国机械工程学会年会暨第九届全国特种加工学术年会论文集,北京,机械工业出版社,2001:73~77
[35]许华宇,李明辉,彭颖红.电火花加工理论研究现状与展望[J],电加工,1997,(3):8~12
[36]李明辉.电火花加工理论[M],北京,国防工业出版社,1989:69
[37]楼乐明.电火花加工仿真技术研究[D],上海:上海交通大学,2000
[38] M. Kunieda, M. Yoshida. Electrical Discharge Machining in Gas, Annals of the CIRP,1997,46(1):143~146
[39]曹国辉.基于单脉冲放电的若干微细加工方法及试验研究[D],哈尔滨:哈尔滨工业大学,2004
[40]薛忠明,顾兰,张彦花.激光焊接温度场模拟[J],焊接学报,2003,124(2):79~82
[41]张建华,孟艳华,刘承帅.超声振动辅助气中放电加工温度场模拟[J],工具技术,2004,38(9):69~71
[42] F.Soldera,A.Lasagni, F.Mucklich. Determination of The Cathode Erosion And Temperature For The Phases of High Voltage Discharges Using FEM Simulations[J],Computational Materials Science , 2005, (32):123~139
[43]杨全,帐真.金属凝固与铸造过程数值模拟[M],杭州,浙江大学出版社,1996:9
[44]张家荣,赵廷元.工程常用物质的热物理性质手册[M],北京,新时代出版社,1987:74
[45]孔祥谦.有限元法在传热学中的应用[M],北京,科学出版社,1998:103
[46]蒋凯.卧式微细电火花加工系统及其工艺试验研究,南京:南京航空航天大学,2005
[47]蒋凯,汪炜.激波压力扰动辅助电火花加工高深宽比微细结构方法研究[J],电加工与模具,2005,(6):30~33
[48]胡富强,王振龙,赵万生,等.线电极放电磨削技术的研究与应用[J],哈尔滨工业大学学报,2003,35(10):1171~1174
[49]卢存伟.电火花加工工艺学[M],北京:国防工业出版社,1988:12