LTCC微波组件集成技术研究
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摘要
随着微波技术的不断发展,对系统小型化提出了更高的要求需要,低温共烧陶瓷(Low Temperature Co-fired Ceramic, LTCC)正是实现这一目的的有效途径。所以进行本课题研究就非常有实际意义。本文采用理论分析和电磁场仿真软件对LTCC微波组件进行理论分析和设计,并进行生产和测试。
本文第一章首先论述了微波及其特点,LTCC发展趋势,介绍了国内外发展动态。在第二章介绍了LTCC基本概念,第三章从理论角度分析了LTCC网孔接地和垂直互连的物理特性。
在本文的第四章介绍和分析LTCC电感的各种性能参数,并生产了具体器件,给出了测试和分析结果。第五章介绍和分析了LTCC电容的性能参数,生产样品并给出测试和分析结果。在第六章介绍了LTCC滤波器的理论,LTCC滤波器设计方法,并最终设计生产了两种不同类型的滤波器,给出了测试结果,经过对比看出这两种滤波器的效果是比较满意的。
With the rapid progress of Microwave module technology, it need to miniaturized microwave system, and Low Temperature Co-fired Ceramic (LTCC) is a proper solution. In this paper, the theory analyses and the magnetic-electronics simulation software are mixed to analyze and design the LTCC microwave module. Then, the products and measurement are given.
In chapter 1, it give us the microwave and its characteristics, the LTCC trend, the inside and outside development. Chapter 2 gives the LTCC basic concept. In chapter 3, the LTCC ground and the vertical connect were analyzed.
Chapter 4 and chapter 5 analyzed the LTCC conductance and LTCC capacitors; they all have the products and measurement result. In chapter 6, it gives LTCC filter theory, LTCC filter design approach, and gives two different types filter and its measurement.
本文第一章首先论述了微波及其特点,LTCC发展趋势,介绍了国内外发展动态。在第二章介绍了LTCC基本概念,第三章从理论角度分析了LTCC网孔接地和垂直互连的物理特性。
在本文的第四章介绍和分析LTCC电感的各种性能参数,并生产了具体器件,给出了测试和分析结果。第五章介绍和分析了LTCC电容的性能参数,生产样品并给出测试和分析结果。在第六章介绍了LTCC滤波器的理论,LTCC滤波器设计方法,并最终设计生产了两种不同类型的滤波器,给出了测试结果,经过对比看出这两种滤波器的效果是比较满意的。
With the rapid progress of Microwave module technology, it need to miniaturized microwave system, and Low Temperature Co-fired Ceramic (LTCC) is a proper solution. In this paper, the theory analyses and the magnetic-electronics simulation software are mixed to analyze and design the LTCC microwave module. Then, the products and measurement are given.
In chapter 1, it give us the microwave and its characteristics, the LTCC trend, the inside and outside development. Chapter 2 gives the LTCC basic concept. In chapter 3, the LTCC ground and the vertical connect were analyzed.
Chapter 4 and chapter 5 analyzed the LTCC conductance and LTCC capacitors; they all have the products and measurement result. In chapter 6, it gives LTCC filter theory, LTCC filter design approach, and gives two different types filter and its measurement.
引文
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[5] 杨邦朝,蒋明,胡以达. LTCC 组件及未来发展趋势.混合微电子技术.2002 年.
[6] 钟慧,张怀武. 低温共烧陶瓷(LTCC):特点、应用及问题.磁性材料及器件.2003 年 8 月
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[8] J.B.Tang and K.Wu.Design technique of broadband planar interconnects for co-layer multi-chip module (MCM) of microwave. Asia-Pacific Microwave Conference Proceedings, APMC. v 1.1999. P116-119.
[9] B. G. Choi, M. G. Stubbsr,etc. A Ka-band narrow bandpass filter using LTCC technology. Microwave and Wireless Components Letters, IEEE. VOL13. NO9. 2003 .p388 –389.
[10] Vasily Kondratyev, Markku Lahti, Tuomo Jaakola .On the design of ltcc filter for millimeter-waves. IEEE MTT-S International Microwave Symposium Digest. v3. 2003.p 1771-1773.
[11] Yong Chul Lee,Chul Soon Park. A new millimeter-wave stripline resonator with embedded air cavities in ltcc multilayer structure. IEEE MTT-S International Microwave Symposium Digest. V3.2003. p2027-2030.
[12] Ayman El-Tager,Joey Bray,and Langis Roy. High-Q LTCC resonators for millimeter wave applications. IEEE MTT-S International Microwave Symposium Digest.v3.2003. P 2257-2260.
[13] R.Kulke, W.Simon, M.Rittweger, etc. Integration techniques for MMICs and chip devices in LTCC multichip modules for radio frequencies. International Symposiumon Microelectronic. September 2000. P642-647.
[14] C.H.Lee, S.Chakrborty, A.Sutono, and J.Laskar, Broadband Highly Intergrated LTCC Front-end Module for IEEE 802.11a WLAN Application 2002 MTT-S Digest
[15] Y.H.Park, H.R.Kim, K.J.Oh, Y.H.Cho, LTCC Quad Band GSM RF Transceiver Using Integrated Passive Matching Network Wireless Technology, 2005. The European Conference on,4 Oct. 2005 Page(s):P407 - 410
[16] Min-Chung Wu; Shyh-Jong Chung, A small SiP module using LTCC 3D circuitry for dual band WLAN 802.11 a/b/g front-end solution 18-20 Jan. 2006 Page(s):4 pp. Digital Object Identifier 10.1109/SMIC.2005.
[17] 严伟,禹胜林,房迅雷, 基于 LTCC 技术的三维集成微波组件 ,电子学报,Nov,2005
[18] 王周海,李雁,王小陆,郑林华, X 波段双通道 T/R 组件的 LTCC 基板电路的设计 ,雷达科学与技术,Oct,2005
[19] 谢廉忠, 微波组件用带腔体 LTCC 基板制造技术 ,现代雷达,Jun,2006
[20] 许佳,覃亚丽等, 小型 LTCC 折叠线带通滤波器设计 ,微波学报,Aug,2005
[21] 严伟,洪伟,薛羽, 低温共烧陶瓷微波多芯片组件 ,电子学报,May,2002
[22] 夏雷,8 毫米 MCM 接收前端研究,硕士学位论文,2004
[23] 张斌,毫米波接收前端多芯片组件(MCM)技术研究,硕士学位论文,2003
[24] 潘光胜,毫米波接收前端 LTCC 技术研究,硕士学位论文,2004
[25] Chun-Fu Chang, Shyh-Jong Chung, Bandpass Filter of Serial Configuration With Two Finite transmission Zeros Using LTCC technology IEEE Transactions on Microwave Theory and Techniques, VOL. 53, NO. 7, JULY 2005
[26] Lap Kun Yeung, Ke-Li Wu, An LTCC Balanced-to-Unbalanced Extracted-Pole Bandpass Filter with Complex Load IEEE Transactions on Microwave Theory and Tehniques, VOL. 54, NO. 4, APRIL 2006
[27] Michael Hintz, Heiko Thrust, Erich Polzer. Generic investigation on 0-shrinkage processed LTCC [R]. DuPont, Germany.
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