含氟聚酯和光刻胶波导材料的分子设计与性能研究
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摘要
由于通讯事业的飞速发展,人们对高容量、高带宽、高速信息传输技术的要求越来越高。为了满足日益增长的需求,人们提出了全光网络这一有效解决办法。聚合物波导器件由于其优良的机械性能,热光和电光效应,对于实现全光网络十分有利,而且器件易于加工,制作费用低,所以引起人们的广泛关注。
在论文中,我们利用分子设计的原理,通过含氟量由六氟双酚A、对苯二酰氯和含氟辛二醇三元共聚合成新型高含氟的聚酯,并随之加入甲基丙稀酸羟乙酯,在端基引入可交联基团。聚酯有好的溶解性,高的玻璃化转变温度和好的热稳定性能。旋涂后可以得到很好的光学薄层,通过改变单体的进料比,在1550 nm处折射率在1.447~1.57之间可调。研究中,合成的这些有着高分子量和线形结构的高含氟量聚酯不仅在感光底层表现出好的化学阻抗,而且在光通信波长1.31μm和1.55μm有很小的光损耗。
直接作为主体材料用于光通讯领域的光刻胶,可以大大缩减制作过程,制得具有规整结构的微图案,还可以满足有机聚合物光波导材料的特性要求。本文介绍了一种节约成本、制备方法简便、低光损的含氟光刻胶。这种新型光刻胶有着很好的溶解性,固化交联后具有较好的热稳定性。由于材料中氟原子取代了部分氢原子使其在近红外波段尤其是光的通讯窗口(1.31μm和1.55μm)的吸收较小,所以其在光波导材料方面有很好的应用前景。
The continual trend toward high transmission speed, data capacity, and data density in integrated circuits demands a solution to the bottleneck resulting from the limited data rate of electrical interconnects. One approach to this problem is the use of optical interconnection operating with polymer waveguides. Polymer materials have tailorable optical properties such as refractive index and optical losses, and exhibit excellent mechanical and physical properties. We focused on the following three important aspects when synthesizing our waveguide polymer: first, high transparency at both 1.3μm and 1.55μm; second, high thermal and environmental stability; last, high refractive index controllability.
Polyester is one of the very useful conventional optical polymers, with its excellent mechanical properties, thermal stability and so on. We designed and synthesized fluorinated polyester to fabrication of AWG, based on the 4,4’- (Hexafluoroisopropylidene)diphenol. We know that it is very difficult to obtain polyester with high molecular weight because of the rigorous reaction condition, such as high temperature, vacuum. At last, by putting our shoulder to the wheel, we have synthesized novel cross-linkable, highly fluorinated Polyester and characterized its optical properties. A series of novel crosslinkable, highly fluorinated polyesters were synthesized by copolycondensation reactions of therephthaloyl with 4,4′-(hexafluoroisopropylidene)diphenol and 2,2,3,3,4,4,5,5,6,6,7,7-dodecafluoro-octane-1,8-diol, followed by reaction with hydroxyethyl metacrylate. The molecular weights (Mn) and polydispersities of the polyesters determined by GPC with polystyrene as standard are in the range of 12100～20000g/mol and 1.49～2.25, respectively. The polyesters have good solublites, high glass transition temperature (Tg: 80～172℃) and good thermal stabilities(Td: 386～477℃). Thin films with excellent optical quality can be obtained by spin-coating of the polyester solutions followed by crosslinking. In the range of 1.447～1.576 at 1550nm, the refractive index can be controlled by adjusting the feed ratio of monomers. The propagation loss of the single-mode channel waveguide was measured to be less than 0.56dB/cm at 1550nm. The excellent properties of these polyesters make them a promising candidate for optical waveguide.
Low-loss photosensitive polymers are particularly attractive in integrated optics because of their low cost fabrication method, potential of easy fabrication, low temperature, good processability and low propagation loss. In this paper, we have succeeded in synthesizing fluorinated photoresist. Owing to excellent thermal stability(Td=118℃after crosslinking), good film-forming properties, low cost fabrication method and low optical absorption in the near-UV. The fluorinated photoresist is an excellent polymer which is suitable for optical waveguide.
在论文中,我们利用分子设计的原理,通过含氟量由六氟双酚A、对苯二酰氯和含氟辛二醇三元共聚合成新型高含氟的聚酯,并随之加入甲基丙稀酸羟乙酯,在端基引入可交联基团。聚酯有好的溶解性,高的玻璃化转变温度和好的热稳定性能。旋涂后可以得到很好的光学薄层,通过改变单体的进料比,在1550 nm处折射率在1.447~1.57之间可调。研究中,合成的这些有着高分子量和线形结构的高含氟量聚酯不仅在感光底层表现出好的化学阻抗,而且在光通信波长1.31μm和1.55μm有很小的光损耗。
直接作为主体材料用于光通讯领域的光刻胶,可以大大缩减制作过程,制得具有规整结构的微图案,还可以满足有机聚合物光波导材料的特性要求。本文介绍了一种节约成本、制备方法简便、低光损的含氟光刻胶。这种新型光刻胶有着很好的溶解性,固化交联后具有较好的热稳定性。由于材料中氟原子取代了部分氢原子使其在近红外波段尤其是光的通讯窗口(1.31μm和1.55μm)的吸收较小,所以其在光波导材料方面有很好的应用前景。
The continual trend toward high transmission speed, data capacity, and data density in integrated circuits demands a solution to the bottleneck resulting from the limited data rate of electrical interconnects. One approach to this problem is the use of optical interconnection operating with polymer waveguides. Polymer materials have tailorable optical properties such as refractive index and optical losses, and exhibit excellent mechanical and physical properties. We focused on the following three important aspects when synthesizing our waveguide polymer: first, high transparency at both 1.3μm and 1.55μm; second, high thermal and environmental stability; last, high refractive index controllability.
Polyester is one of the very useful conventional optical polymers, with its excellent mechanical properties, thermal stability and so on. We designed and synthesized fluorinated polyester to fabrication of AWG, based on the 4,4’- (Hexafluoroisopropylidene)diphenol. We know that it is very difficult to obtain polyester with high molecular weight because of the rigorous reaction condition, such as high temperature, vacuum. At last, by putting our shoulder to the wheel, we have synthesized novel cross-linkable, highly fluorinated Polyester and characterized its optical properties. A series of novel crosslinkable, highly fluorinated polyesters were synthesized by copolycondensation reactions of therephthaloyl with 4,4′-(hexafluoroisopropylidene)diphenol and 2,2,3,3,4,4,5,5,6,6,7,7-dodecafluoro-octane-1,8-diol, followed by reaction with hydroxyethyl metacrylate. The molecular weights (Mn) and polydispersities of the polyesters determined by GPC with polystyrene as standard are in the range of 12100～20000g/mol and 1.49～2.25, respectively. The polyesters have good solublites, high glass transition temperature (Tg: 80～172℃) and good thermal stabilities(Td: 386～477℃). Thin films with excellent optical quality can be obtained by spin-coating of the polyester solutions followed by crosslinking. In the range of 1.447～1.576 at 1550nm, the refractive index can be controlled by adjusting the feed ratio of monomers. The propagation loss of the single-mode channel waveguide was measured to be less than 0.56dB/cm at 1550nm. The excellent properties of these polyesters make them a promising candidate for optical waveguide.
Low-loss photosensitive polymers are particularly attractive in integrated optics because of their low cost fabrication method, potential of easy fabrication, low temperature, good processability and low propagation loss. In this paper, we have succeeded in synthesizing fluorinated photoresist. Owing to excellent thermal stability(Td=118℃after crosslinking), good film-forming properties, low cost fabrication method and low optical absorption in the near-UV. The fluorinated photoresist is an excellent polymer which is suitable for optical waveguide.
引文
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[2] Paul P. DWDM system components, fiber and integrated op tics. 1999, 18 (3) :149
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[7] .G.. Hougham, G.. Tesoro, A. Viehbbeck, J. D. Chapple-Sokol, Macromolecules, 1994, 27, 5964
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[10] R. A. Norwood, R. Y. Gao, J. Sharma, C. C. Teng, in Design, Manufacturing, and Testing of Planar Optical Waveguide Devices, Vol.4439, SPIE, Bellingham, MA2001, p.19
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[14] Worhoff K, Lambeck P V, Driessen. J Lightwave technol, 1999, 17(8), 1401
[15] Hoffmann M, Kopka P, Voges E. IEEE Photonics Technology Letters ,1997, 9(9), 1228
[16] Schauweker B, Przyrembel G, Kuhlow B et al. IEEE Photonics Technology Letters , 2000, 12 (12): 1645
[17] Hida Y, Hibino Y, Kitoh T et al. Electron Lett, 2001, 37(9):576
[18] Bernasconi P, Doerr C, Dragone C et al. J Lightwave Technol, 2000, 18(7): 985
[19] Tsuda H, Okamoto K, Ishii T..IEEE Photonics Technology Letters, 1999, 11(5):569
[20] Kasahara R, Yanagisawa M. Sugita A et al. IEEE. Photonics Technology Letters,2000,12(1):34
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[27] Yamada H, Sanjoh H , Konhtoku M et al J Lightwave Technol, 2000, 18(9): 1309
[28] LU Xin-jie, YANG Jun, MING Hai, Optoelectronic Technology & information, 2004Dec ,17(6), 6
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[30] 甄珍(Zhen Z), 刘新厚(Liu X H), 王凤岐(Wang F Q)等,Progress in Chemistry, 1997, 1, 48.
[31] Sasak I. S, Matsuura T, Sawada T. N TT R&D , 1998, 47 (9), 937
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[39] Y. S. Liu, R. J. Wojnarowski, W. A. Hennessy, in Optoelectronic Interconnects and Packaging, Vol.CR62,SPIE, Bellingham, MA 1996, P.405
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[41] J. Kobayashi, T. Matsuura, S. Ando, T. Maruno, Appl.Opt.1998,37,1032
[42] T. Matsuura, J. Kobayashi, S. Ando, T. Maruno, S. Sasaki, F. Yamamoto, Appl. Opt. 1999,38,966
[43] Lee H J, LEE E M, Lee M H, Journal of Polymer Science, Part A:Polymer Chemistry, 1998,36:2881
[44] Usui M, Hikita M, Waranabe T, Journal of Lightwave technology, 1996, 14(10), 2338
[45] Knoche Th., Müller L, Klein R, Electronics Letters, 1996, 32(14),1284
[46] Eunkyoung Kim, Song Yun Cho, Dong-in Yeu and Sang-Yung Shin, Chem.Mater, 2005, 17, 962
[47] T. Matsuura, N. Tamada, S. Nishinori,Macromolecules, 1993, 26, 419
[48] T. Matsuura, N. Tamada, S. Nishinori,Macromolecules, 1994, 27, 6665
[49] Badara, C.; Wang, Z. Y, Macromolecules, 2004, 37, 147
[50] Jae-Wook Kany, Tae- pil Kim, Jang-Joo Kim , et al., J. of Lightwave Technology, 2001, 19, 872
[51] D. Schonfeld, O. Rosch, P. Dannberg, Proc.SPIE, 1997, 53, 3135
[52] Sharon Wong, Hong Ma, Alex K. –Y. Jen, Rick Barto and Curtis W. Frank, Macromolecules, 2003, 36, 8001
[53] H. Ma, S. Woog, J. D. Luo, S. H. Kang, A. K. -Y. Jen, R. Barto, C. W. Frank, Polym.Prepr. 2002, 43(2), 493
[54] Hong Ma, Jingdong Luo, Seok Ho Kang, Sharon Wong, Jae Wook Kang, Alex K. –Y. Jen, Rick Barto, Curtis W. Frank, Macromolecular Rapid Communications, 2004, 25, 1667
[55] D. W. Smith, D. A. Babb, Macromolecules, 1996, 29, 852
[56] Seok Ho Kang, Jing dong Luo, Hong Ma, Richard R .Barto, Curtis W. Frank, Larry R. Dalton, and Alex K. –Y. Jen, Macromolecules, 2003, 36, 4355
[57] Yinghua. Qi, Jianfu. Ding, Michael Day, Jia. Jiang, and Claire L. Callender, Chem Mater, 2005, 17, 676
[58] A. Donval, E. Toussaere, J. Zyss, G. Levy-Yurista, E. Jonsson, A. A. Friesem, Synth. Metals 124 (2001) 19
[59] B.Bêche, Npelletier, E. Gaviot, J. Zyss, Optics Communications, 230 (2004) 91
[60] K.K.TUNG, W.H.WONG, E.Y.B.PUN, Appl. Phys. A, 2003
[61] Amane Mochizuki, Kazunori Mune, Ryuusuke Naitou, Takahiro Fukuoka, and Ken-ichi Tagawa, J .Photopolym. Sci. Technol.,2003, 16, 243
[62] J. M. Hagerhorst-Trewhella, J .D. Gelorme, Proc. SPIE-Int. Soc. Opt. Eng. 1989, 1177, 379
[63] J. H. Kim, E. J. Kim, H. C. Choi, C. W. Kim, J. H. Cho, Y. W. Lee, B. G. You, S. Y. Yi, H. J. Lee, K. Han, W. H. Jang, T. H. Rhee, J. W. Lee, S. J. Pearton, Thin Solid Films 1999, 341, 192
[64] K. Han, J. Kim, W. H. Jang, J. Appl. Polym. Sci. 2001, 79, 176
[65] Okamoto K, Moriwaki K, Suzuki S. Electron Lett, 1995, 31 (3) : 184.
[66] Zirngibl M , Joyner C H, Stulz L W , et al. Electron Lett, 1993, 29 (2), 201.
[67] Takahashi H, Hibino Y, Ohmori Y, et al. IEEE Photon Techno l Lett, 1993, 5, 707.
[68] Hida Y, Inoue Y, Imamura S. Electron Lett, 1994, 30, 959.
[69] Diemeer M B J , Spickerman L H, Smit M K, et al. Electron Lett, 1996, 32, 1132.
[70] Kobayashi J. IEICE Trans Electron, 1998, E81-C (7), 1020.
[71] Ahn J H. IEICE Trans Electron, 1999, E82-C (2), 354.
[72] Toyoda S, Kaneko A, IEICE Trans Electron, 2000, E83-C (7), 1119.
[73] S. Ando, T. Matsuura, S. Sasaki, Macromolecules, 1992, 25, 5858
[74] Sharon Wong, Hong Ma, and Alex K. -Y. Jen, Macromolecules, 2004, 37, 5578
[75] 林尚安,陆耘,梁兆熙,高分子化学,科学出版社
[76] 王春伟,李弘,朱晓夏,高分子通报,2005, 70
[77] 江源,邹宁宇,聚合物光纤,化工工业出版社
[78] J. Wang., P. Shustack, S. Garner, SPIE. 2000, 4904
[2] Paul P. DWDM system components, fiber and integrated op tics. 1999, 18 (3) :149
[3] Hong Ma, Alex K.-Y. Jen, Larry R. Dalton, Adv .Mater., 2002, 14,1339
[4] Rainer Reuter, Hilmar Franke, Claudius Feger, Applied Optics, 1988, 27, 4565
[5] 赵凯华,钟锡华,光学,北京大学,1982
[6] M. K. Smit, Electron. Lett., 1988,2(7), 385
[7] .G.. Hougham, G.. Tesoro, A. Viehbbeck, J. D. Chapple-Sokol, Macromolecules, 1994, 27, 5964
[8] G.. Hougham, G.. Tesoro, A. Viehbbeck, Macromolecules, 1996, 29, 3453
[9] Polymers for Electronic and Photonic Applications (Ed: C. P. Wong), Academic Press, New York 1993
[10] R. A. Norwood, R. Y. Gao, J. Sharma, C. C. Teng, in Design, Manufacturing, and Testing of Planar Optical Waveguide Devices, Vol.4439, SPIE, Bellingham, MA2001, p.19
[11] Design, Manufacturing, and Testing of Planar Optical Waveguide Devices; Norwood, R. A., Ed.; Proc. SPIE 2001, 4439.
[12] Hida. Y, Hibino Y, Itoh M, Electron Lett , 2000 , 36(9), 820
[13] Ojha S M, Curecton C, Bricheno Y er al, .Electron Lett, 1998 , 34(1), 78
[14] Worhoff K, Lambeck P V, Driessen. J Lightwave technol, 1999, 17(8), 1401
[15] Hoffmann M, Kopka P, Voges E. IEEE Photonics Technology Letters ,1997, 9(9), 1228
[16] Schauweker B, Przyrembel G, Kuhlow B et al. IEEE Photonics Technology Letters , 2000, 12 (12): 1645
[17] Hida Y, Hibino Y, Kitoh T et al. Electron Lett, 2001, 37(9):576
[18] Bernasconi P, Doerr C, Dragone C et al. J Lightwave Technol, 2000, 18(7): 985
[19] Tsuda H, Okamoto K, Ishii T..IEEE Photonics Technology Letters, 1999, 11(5):569
[20] Kasahara R, Yanagisawa M. Sugita A et al. IEEE. Photonics Technology Letters,2000,12(1):34
[21] Ohshima M M. IEICE Transactions on Electronics, 2000 , 36(19): 1643
[22] Takada K, Abe M, Hida Y et al . Electron Lett, 2000, 36(19): 1643
[23] Usui M, Hikita M, Watanabe T et al. Lightwave Technol, 1996, 14 (10):2338
[24] Eldada L, Xu C Z, Stengel K M T et al. J Lightxave Technol, 1996, 14(7):1704
[25] He J J, La montagne B, Koteles E S. Electron Lett, 1999, 35(9): 737
[26] Kim H M, Kim D C, Kim J S et al . Journal of the Korean Physical Society, 2001, 38(3): 173
[27] Yamada H, Sanjoh H , Konhtoku M et al J Lightwave Technol, 2000, 18(9): 1309
[28] LU Xin-jie, YANG Jun, MING Hai, Optoelectronic Technology & information, 2004Dec ,17(6), 6
[29] Crist B, March M E, Raviv G, J. Appl. Phys., 1980, 51, 1160
[30] 甄珍(Zhen Z), 刘新厚(Liu X H), 王凤岐(Wang F Q)等,Progress in Chemistry, 1997, 1, 48.
[31] Sasak I. S, Matsuura T, Sawada T. N TT R&D , 1998, 47 (9), 937
[32] Boutevin B, Bosc D, Rousseau A, American Chemical Society, 1997, 489
[33] 禹忠, 汪敏强, 姚熹, 化学通报, 2001, 1, 5
[34] Resnick P R, Buck W H, Modern Fluoropolymers, John Wiley & Sons Ltd, 1997, 397
[35] Koeppen C, Shi P F, Chen W D, Garito A F, J. Opt. Soc. Am. B, 1998, 15, 727
[36] B. L. Booth, J. Lightwave Technol .1989, 7, 1445
[37] L. W. Shacklette, R. A. Norwood, L. Sldada, C. Glass, D. Nguyen, C. Poga, B. P. Xu, S. Yin, J. T. Yardley, Proc.SPIE-Int.Soc.Opt.Eng.1997, 3006,344
[38] R. Yoshimyra, M. Hikita, S. Tomaru, S. Imamura, J. Lightwave Technol. 1998, 16,1030
[39] Y. S. Liu, R. J. Wojnarowski, W. A. Hennessy, in Optoelectronic Interconnects and Packaging, Vol.CR62,SPIE, Bellingham, MA 1996, P.405
[40] T. Matsuura, S. Ando, S. Sasaki, F. Yamamoto, Electron.Lett.1993, 29, 269
[41] J. Kobayashi, T. Matsuura, S. Ando, T. Maruno, Appl.Opt.1998,37,1032
[42] T. Matsuura, J. Kobayashi, S. Ando, T. Maruno, S. Sasaki, F. Yamamoto, Appl. Opt. 1999,38,966
[43] Lee H J, LEE E M, Lee M H, Journal of Polymer Science, Part A:Polymer Chemistry, 1998,36:2881
[44] Usui M, Hikita M, Waranabe T, Journal of Lightwave technology, 1996, 14(10), 2338
[45] Knoche Th., Müller L, Klein R, Electronics Letters, 1996, 32(14),1284
[46] Eunkyoung Kim, Song Yun Cho, Dong-in Yeu and Sang-Yung Shin, Chem.Mater, 2005, 17, 962
[47] T. Matsuura, N. Tamada, S. Nishinori,Macromolecules, 1993, 26, 419
[48] T. Matsuura, N. Tamada, S. Nishinori,Macromolecules, 1994, 27, 6665
[49] Badara, C.; Wang, Z. Y, Macromolecules, 2004, 37, 147
[50] Jae-Wook Kany, Tae- pil Kim, Jang-Joo Kim , et al., J. of Lightwave Technology, 2001, 19, 872
[51] D. Schonfeld, O. Rosch, P. Dannberg, Proc.SPIE, 1997, 53, 3135
[52] Sharon Wong, Hong Ma, Alex K. –Y. Jen, Rick Barto and Curtis W. Frank, Macromolecules, 2003, 36, 8001
[53] H. Ma, S. Woog, J. D. Luo, S. H. Kang, A. K. -Y. Jen, R. Barto, C. W. Frank, Polym.Prepr. 2002, 43(2), 493
[54] Hong Ma, Jingdong Luo, Seok Ho Kang, Sharon Wong, Jae Wook Kang, Alex K. –Y. Jen, Rick Barto, Curtis W. Frank, Macromolecular Rapid Communications, 2004, 25, 1667
[55] D. W. Smith, D. A. Babb, Macromolecules, 1996, 29, 852
[56] Seok Ho Kang, Jing dong Luo, Hong Ma, Richard R .Barto, Curtis W. Frank, Larry R. Dalton, and Alex K. –Y. Jen, Macromolecules, 2003, 36, 4355
[57] Yinghua. Qi, Jianfu. Ding, Michael Day, Jia. Jiang, and Claire L. Callender, Chem Mater, 2005, 17, 676
[58] A. Donval, E. Toussaere, J. Zyss, G. Levy-Yurista, E. Jonsson, A. A. Friesem, Synth. Metals 124 (2001) 19
[59] B.Bêche, Npelletier, E. Gaviot, J. Zyss, Optics Communications, 230 (2004) 91
[60] K.K.TUNG, W.H.WONG, E.Y.B.PUN, Appl. Phys. A, 2003
[61] Amane Mochizuki, Kazunori Mune, Ryuusuke Naitou, Takahiro Fukuoka, and Ken-ichi Tagawa, J .Photopolym. Sci. Technol.,2003, 16, 243
[62] J. M. Hagerhorst-Trewhella, J .D. Gelorme, Proc. SPIE-Int. Soc. Opt. Eng. 1989, 1177, 379
[63] J. H. Kim, E. J. Kim, H. C. Choi, C. W. Kim, J. H. Cho, Y. W. Lee, B. G. You, S. Y. Yi, H. J. Lee, K. Han, W. H. Jang, T. H. Rhee, J. W. Lee, S. J. Pearton, Thin Solid Films 1999, 341, 192
[64] K. Han, J. Kim, W. H. Jang, J. Appl. Polym. Sci. 2001, 79, 176
[65] Okamoto K, Moriwaki K, Suzuki S. Electron Lett, 1995, 31 (3) : 184.
[66] Zirngibl M , Joyner C H, Stulz L W , et al. Electron Lett, 1993, 29 (2), 201.
[67] Takahashi H, Hibino Y, Ohmori Y, et al. IEEE Photon Techno l Lett, 1993, 5, 707.
[68] Hida Y, Inoue Y, Imamura S. Electron Lett, 1994, 30, 959.
[69] Diemeer M B J , Spickerman L H, Smit M K, et al. Electron Lett, 1996, 32, 1132.
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