光栅式位移测头结构设计
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摘要
随着现代传感技术与微纳米测量技术的迅速发展,对高精度位移测量的需求与研究越来越多。光栅式位移传感器以其量程大、精度和分辨率高、能用于动态测量、易于实现数字化、便于安装和调整等众多独特的优点越来越普遍地受到人们的关注;而市场上有售的光栅测头仍多为国外产品,且价格昂贵,难以推广应用。因此研制低成本的高精度光栅测头具有较大的实用价值和很好的应用前景。
本学位论文自主研制了一种光栅式位移测头;在结构设计过程中,一方面遵循了阿贝原则,另一方面基于动态力平衡原理,提出了一种在一定测量范围内保持测量力近似恒定的结构设计方法;研制了一套包括电机驱动部分和支撑部分在内的试验装置;最后对测头进行了特性标定试验。试验结果表明,该测头在10mm示值范围内具有亚微米量级的测量不确定度,制造成本仅为同特性产品价格的1/5左右;若进一步提高零件的机械加工精度,该光栅测头的精度还可进一步提高。
With the rapid development of modern sensor technology and micro/nano measurement technology, the demand and research for high-precision displacement measurement has increased dramatically. Optical grating displacement sensor ,with its various unique virtues of long range, high precision and resolution, capability of dynamic measurement application, easily digital implementation, convenience for fixing and adjusting, etc, is attracting the attention from people more and more popularly. The optical grating probes sold in markets are still predominantly foreign products, which have expensive cost and are difficult for popularization. So developing low cost high-precision optical grating probes has great practical value and good application prospect.
An optical grating displacement probe was independently designed in this degree thesis. In the course of structure design, Abbe's principle was followed on the one hand; On the other hand, based on the principle of dynamic force balance, a structure design method of maintaining approximately constant measuring force in a certain range measurement was put forward. An experimental equipment involving motor drive and support structure was developed. A characteristic calibration experiment of the probe was completed at last. The test results indicated that the probe showed the measurement uncertainty of sub micrometer in the reading range of 10mm, and its manufacturing cost was only about one fifth of the prices of products with the same characteristics. If the mechanical processing accuracy of the parts were further enhanced, the precision of the optical grating probe would be further improved.
本学位论文自主研制了一种光栅式位移测头;在结构设计过程中,一方面遵循了阿贝原则,另一方面基于动态力平衡原理,提出了一种在一定测量范围内保持测量力近似恒定的结构设计方法;研制了一套包括电机驱动部分和支撑部分在内的试验装置;最后对测头进行了特性标定试验。试验结果表明,该测头在10mm示值范围内具有亚微米量级的测量不确定度,制造成本仅为同特性产品价格的1/5左右;若进一步提高零件的机械加工精度,该光栅测头的精度还可进一步提高。
With the rapid development of modern sensor technology and micro/nano measurement technology, the demand and research for high-precision displacement measurement has increased dramatically. Optical grating displacement sensor ,with its various unique virtues of long range, high precision and resolution, capability of dynamic measurement application, easily digital implementation, convenience for fixing and adjusting, etc, is attracting the attention from people more and more popularly. The optical grating probes sold in markets are still predominantly foreign products, which have expensive cost and are difficult for popularization. So developing low cost high-precision optical grating probes has great practical value and good application prospect.
An optical grating displacement probe was independently designed in this degree thesis. In the course of structure design, Abbe's principle was followed on the one hand; On the other hand, based on the principle of dynamic force balance, a structure design method of maintaining approximately constant measuring force in a certain range measurement was put forward. An experimental equipment involving motor drive and support structure was developed. A characteristic calibration experiment of the probe was completed at last. The test results indicated that the probe showed the measurement uncertainty of sub micrometer in the reading range of 10mm, and its manufacturing cost was only about one fifth of the prices of products with the same characteristics. If the mechanical processing accuracy of the parts were further enhanced, the precision of the optical grating probe would be further improved.
引文
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[2]王俊峰,孟令启等.现代传感器应用技术.机械工业出版社,2006.
[3]何春娟.莫尔条纹技术在微小位移测量中的应用.西安工业学院学报,2005,第6期.
[4]Y.J.Chen,K.C.Fan,Y.S.Liu,F.Cheng.A High Precision Focus Probe for the Quality Assessment of Grating Pitches.Key Engineering Materials.2007,339(000):200-205
[5]张萌.称重传感器高精度自动检测系统设计.厦门大学学报(自然科学版),2005,第2期.
[6]杨树林.对万能测长机误差来源及提高测量精度的探讨.上海计量测试,2001,第1期.
[7]Y.F.Song,P.-C.Tseng,L.-R.Huang,S.-C.Chung,T.-E.Dann,C.T.Chen and K.-L.Tsang.Design of an ultra-high resolution and high flux cylindrical grating monochromator undulator beamline.Nuclear instruments and methods in physics research.Section A.2001,467-468(1):496-499
[8]高玲,史丽英,王英.化学传感器和纳米传感器新材料的应用现状.理化检验.化学分册,2006,第1期.
[9]美国金属学会.金属手册.第三卷,性能与选择:第九版.机械工业出版社,1991,2.
[10]徐昌杰,董威,刘缠牢,李林.长度测量中违背阿贝原则产生误差的平行尺补偿.光学技术,2002,第1期.
[11]甘永立,吕林森.公差原则与几何精度设计.国防工业出版社,1989,10.
[12]Xu,FY;Cao,BZ.An improvement for calculating precision of arbitrary groove guide.Journal of Electromagnetic Waves and Applications.2005,19(3):341-353
[13]孙健.工业测量过程中各要素对测量精度的影响.中原工学院学报,2002,13(4).
[14]任刚,王玉标.Xcell22010型三坐标测量机精度试验分析.机械工人.冷加工,2001.(4):42-43.
[15]张绍宗,陈智锋,张海峰.电磁式测量力加力装置:中国,CN01207540.X.2002.01.16.
[16]修世超,谭庆昌,孟慧琴.同轴环形磁铁磁作用力计算的等效磁荷法.沈阳黄金学院学报,1995.14(3):359-363.
[17]庞振基,黄其圣.精密机械设计.北京:机械工业出版社,2000:336-345.
[18]杨伯源.材料力学(I).北京:机械工业出版社,2002:6-12.
[19]L.A.Hough,H.D.Ou-Yang.A New Probe for Mechanical Testing of Nanostructures in Soft Materials.Journal of Nanoparticle Research.1999,1(4):495-499
[20]Zhang Xin-yue,Ishida Takeshi,Hidaka Teruaki,Sasahara Masakatsu,Kiyosawa Yoshihide,Maruyama Akira.Effect of assembly error on bending stress on flexible spline of strain wave gearing.Nippon Kikai Gakkai Ronbunshu,C Hen/Transactions of the Japan Society of Mechanical Engineers,Part C.1996,62(598):2442-2449
[21]孟刚,袁春兰.机械产品设计中零件装配工艺性的分析.机械研究与应用,2007,第3期.
[22]Dong-Soo Kim,Gi-Chul Kweon.Calibration of Testing Equipment for Peliable Small-Strain DeformationMeasurements Using Synthetic Specimens.Geotechnical Testing Journal.2000,23(4):454-463
[23]刘琦,姚英学,周亮.一种新型纳米硬度检测装置的研究.机械工程师,2005,第9期.
[24]卢泽生.温度对超精密微位移系统定位精度影响的研究.机床与液压,2006,第10期.
[25]钱国新,刘世杰,郁伟,祁建英.电磁离合(制动)器的动作特性与选用计算.机床电器,1999,第1期.
[26]唐庆顺.基于传动轴强度的可靠性设计.煤矿机械,2004,第9期.
[27]张勇.轴类零件在磨削加工中温度影响的研究.合肥工业大学学报(自然科学版),2004,第10期.
[28]陶勇坤,张旭.滚动轴承的装配.一重技术,2003,第3期.
[29]Bao MH.;Yang H.;Yin H.;Sun YC.Energy transfer model for squeeze-film air damping in low vacuum.Journal of Micromechanics and Microengineering.2002,12(3)341-346
[30]王成焘.滚动轴承的配合与装拆工艺.北京:机械工业出版社,1993.
[31]Shuichi Dejima,Wei Gao,Hiroki Shimizu,Satoshi Kiyono,Yoshiyuki.Precision positioning of a five degree-of-freedom planar motion stage.Mechatronics.2005,15(8):969-987
[32]强锡富.传感器.机械工业出版社,2002:265-266.
[33]余文新,胡小唐,邹自强.一种高分辨率和高频响的光栅纳米测量细分方法.天津大学学报(自然科学与工程技术版),2002,第1期.
[34]A.Suryanto,E.van Groesen.A finite element scheme to study the nonlinear optical response of a finite grating without and with defect.Optical and Quantum Electronics,2003,35(4):313-332.
[35]http://cn.tangwenchen.cnele.com/
[36]尤林英.浅谈螺纹中径测量时测量力作用下压陷变形修正的必要性.工业计量,2006,第S1期。
[37]Ahonen,Hannu;de Souza,Paulo A.Junior;Garg,Vijayendra K.Genetic algorithm for fitting Lorentzian line shapes in Mossbauer spectra.Nuclear Instruments & Methods in Physics Research,Section B:Beam Interactions with Materials and Atoms.1997,124(4)633-638
[38]费业泰.误差理论与数据处理.机械工业出版社,2000:94-122.
[39]王占华.影响细长轴加工精度的原因及改进措施.石化技术,2003,第2期.
[40]李永波,胡旭东,曾宗云.温度对磁致伸缩液位传感器测量精度的影响.工业仪表与自动化装置,2007,第6期.
[41]浦昭邦,王宝光.测控仪器设计.机械工业出版社,2001:7-52.
[42]高性能的导向和驱动装置.现代制造,2007,第10期.
[2]王俊峰,孟令启等.现代传感器应用技术.机械工业出版社,2006.
[3]何春娟.莫尔条纹技术在微小位移测量中的应用.西安工业学院学报,2005,第6期.
[4]Y.J.Chen,K.C.Fan,Y.S.Liu,F.Cheng.A High Precision Focus Probe for the Quality Assessment of Grating Pitches.Key Engineering Materials.2007,339(000):200-205
[5]张萌.称重传感器高精度自动检测系统设计.厦门大学学报(自然科学版),2005,第2期.
[6]杨树林.对万能测长机误差来源及提高测量精度的探讨.上海计量测试,2001,第1期.
[7]Y.F.Song,P.-C.Tseng,L.-R.Huang,S.-C.Chung,T.-E.Dann,C.T.Chen and K.-L.Tsang.Design of an ultra-high resolution and high flux cylindrical grating monochromator undulator beamline.Nuclear instruments and methods in physics research.Section A.2001,467-468(1):496-499
[8]高玲,史丽英,王英.化学传感器和纳米传感器新材料的应用现状.理化检验.化学分册,2006,第1期.
[9]美国金属学会.金属手册.第三卷,性能与选择:第九版.机械工业出版社,1991,2.
[10]徐昌杰,董威,刘缠牢,李林.长度测量中违背阿贝原则产生误差的平行尺补偿.光学技术,2002,第1期.
[11]甘永立,吕林森.公差原则与几何精度设计.国防工业出版社,1989,10.
[12]Xu,FY;Cao,BZ.An improvement for calculating precision of arbitrary groove guide.Journal of Electromagnetic Waves and Applications.2005,19(3):341-353
[13]孙健.工业测量过程中各要素对测量精度的影响.中原工学院学报,2002,13(4).
[14]任刚,王玉标.Xcell22010型三坐标测量机精度试验分析.机械工人.冷加工,2001.(4):42-43.
[15]张绍宗,陈智锋,张海峰.电磁式测量力加力装置:中国,CN01207540.X.2002.01.16.
[16]修世超,谭庆昌,孟慧琴.同轴环形磁铁磁作用力计算的等效磁荷法.沈阳黄金学院学报,1995.14(3):359-363.
[17]庞振基,黄其圣.精密机械设计.北京:机械工业出版社,2000:336-345.
[18]杨伯源.材料力学(I).北京:机械工业出版社,2002:6-12.
[19]L.A.Hough,H.D.Ou-Yang.A New Probe for Mechanical Testing of Nanostructures in Soft Materials.Journal of Nanoparticle Research.1999,1(4):495-499
[20]Zhang Xin-yue,Ishida Takeshi,Hidaka Teruaki,Sasahara Masakatsu,Kiyosawa Yoshihide,Maruyama Akira.Effect of assembly error on bending stress on flexible spline of strain wave gearing.Nippon Kikai Gakkai Ronbunshu,C Hen/Transactions of the Japan Society of Mechanical Engineers,Part C.1996,62(598):2442-2449
[21]孟刚,袁春兰.机械产品设计中零件装配工艺性的分析.机械研究与应用,2007,第3期.
[22]Dong-Soo Kim,Gi-Chul Kweon.Calibration of Testing Equipment for Peliable Small-Strain DeformationMeasurements Using Synthetic Specimens.Geotechnical Testing Journal.2000,23(4):454-463
[23]刘琦,姚英学,周亮.一种新型纳米硬度检测装置的研究.机械工程师,2005,第9期.
[24]卢泽生.温度对超精密微位移系统定位精度影响的研究.机床与液压,2006,第10期.
[25]钱国新,刘世杰,郁伟,祁建英.电磁离合(制动)器的动作特性与选用计算.机床电器,1999,第1期.
[26]唐庆顺.基于传动轴强度的可靠性设计.煤矿机械,2004,第9期.
[27]张勇.轴类零件在磨削加工中温度影响的研究.合肥工业大学学报(自然科学版),2004,第10期.
[28]陶勇坤,张旭.滚动轴承的装配.一重技术,2003,第3期.
[29]Bao MH.;Yang H.;Yin H.;Sun YC.Energy transfer model for squeeze-film air damping in low vacuum.Journal of Micromechanics and Microengineering.2002,12(3)341-346
[30]王成焘.滚动轴承的配合与装拆工艺.北京:机械工业出版社,1993.
[31]Shuichi Dejima,Wei Gao,Hiroki Shimizu,Satoshi Kiyono,Yoshiyuki.Precision positioning of a five degree-of-freedom planar motion stage.Mechatronics.2005,15(8):969-987
[32]强锡富.传感器.机械工业出版社,2002:265-266.
[33]余文新,胡小唐,邹自强.一种高分辨率和高频响的光栅纳米测量细分方法.天津大学学报(自然科学与工程技术版),2002,第1期.
[34]A.Suryanto,E.van Groesen.A finite element scheme to study the nonlinear optical response of a finite grating without and with defect.Optical and Quantum Electronics,2003,35(4):313-332.
[35]http://cn.tangwenchen.cnele.com/
[36]尤林英.浅谈螺纹中径测量时测量力作用下压陷变形修正的必要性.工业计量,2006,第S1期。
[37]Ahonen,Hannu;de Souza,Paulo A.Junior;Garg,Vijayendra K.Genetic algorithm for fitting Lorentzian line shapes in Mossbauer spectra.Nuclear Instruments & Methods in Physics Research,Section B:Beam Interactions with Materials and Atoms.1997,124(4)633-638
[38]费业泰.误差理论与数据处理.机械工业出版社,2000:94-122.
[39]王占华.影响细长轴加工精度的原因及改进措施.石化技术,2003,第2期.
[40]李永波,胡旭东,曾宗云.温度对磁致伸缩液位传感器测量精度的影响.工业仪表与自动化装置,2007,第6期.
[41]浦昭邦,王宝光.测控仪器设计.机械工业出版社,2001:7-52.
[42]高性能的导向和驱动装置.现代制造,2007,第10期.