多晶硅产品中碳质量分数的影响因素及控制措施
|
摘要
通过对多晶硅各生产工艺过程中碳元素来源、分离提纯、转化分布等情况进行分析,找出控制硅粉中碳质量分数,优化提纯工艺参数等措施来控制氯硅烷中碳质量分数从而控制产品多晶硅中的碳质量分数,同时严格控制氢气中甲烷质量分数也可以降低产品中碳质量分数、提升产品质量。
Carbon elements in polysilicon products are studied over the whole polysilicon production process. It is found through analysis on carbon source,separation and purification and transformation that the carbon content in trichlorosilane can be controlled by controlling the carbon content in silicon powder and optimizing the purification process parameters. Carbon content in polysilicon product can be reduced and the polysilicon product quality can be improved through controlling strictly methane content in hydrogen.
Carbon elements in polysilicon products are studied over the whole polysilicon production process. It is found through analysis on carbon source,separation and purification and transformation that the carbon content in trichlorosilane can be controlled by controlling the carbon content in silicon powder and optimizing the purification process parameters. Carbon content in polysilicon product can be reduced and the polysilicon product quality can be improved through controlling strictly methane content in hydrogen.
引文
[1]Reimann C,Trempa M,Friedrich J,et al.About the formation and avoidance of C and N related precipitates during directional solidification of multi-crystalline silicon from contaminated feedstock[J].Journal of Crystal Growth,2010,312(9):1510-1516.
[2]Reimann C,Trempa M,Jung T,et al.Modeling of incorporation of O,N,C and formation of related precipitates during directional solidification of silicon under consideration of variable processing parameters[J].Journal of Crystal Growth,2010,312(7):878-885.
[3]蔡延国,魏东亮,祝永强,等.多晶硅碳含量对产品质量的影响及处理工艺[J].化学反应工程与工艺,2016,(4):373-377.
[4]许红霞.多晶硅生产中废气处理工艺设计[J].轻金属,2013,(4):71-73.
[2]Reimann C,Trempa M,Jung T,et al.Modeling of incorporation of O,N,C and formation of related precipitates during directional solidification of silicon under consideration of variable processing parameters[J].Journal of Crystal Growth,2010,312(7):878-885.
[3]蔡延国,魏东亮,祝永强,等.多晶硅碳含量对产品质量的影响及处理工艺[J].化学反应工程与工艺,2016,(4):373-377.
[4]许红霞.多晶硅生产中废气处理工艺设计[J].轻金属,2013,(4):71-73.