阶梯结构微梁传感器优化设计
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摘要
为了实现微悬臂梁传感器的自驱动自感知功能,设计了嵌套式阶梯结构微悬臂梁传感器。采用有限元分析的方法对其微梁的自由端弯曲位移和固有频率进行了仿真,研究了阶梯结构对微悬臂梁传感器性能的改善,确定了微悬臂梁传感器的阶梯结构参数。结果表明,经优化设计后的微梁传感器,微悬臂梁自由端弯曲位移可达566 nm,提高了2倍;固有频率可达385 k Hz,提高了1. 45倍。阶梯式微梁的成功设计为传感器的集成与小型化奠定了基础。
In order to make the micro-cantilever sensor realize the function of self-drive and self-sensing,a nested ladder micro-cantilever sensor was designed. The free end bending displacement and natural frequency of the micro-beam were simulated by finite element analysis. The improvement of the performance of the micro-cantilever sensor by stepped structure was studied,and the ladder structural parameters of the micro-cantilever sensor were determined. The results show that the bending moment of free end of micro-cantilever can reach 566 nm,which is increased by 2 times. The natural frequency can reach 385 k Hz,which is1. 45 times higher. The successful design of the stepped micro-beam lays the foundation for the integration and miniaturization of the sensor.
In order to make the micro-cantilever sensor realize the function of self-drive and self-sensing,a nested ladder micro-cantilever sensor was designed. The free end bending displacement and natural frequency of the micro-beam were simulated by finite element analysis. The improvement of the performance of the micro-cantilever sensor by stepped structure was studied,and the ladder structural parameters of the micro-cantilever sensor were determined. The results show that the bending moment of free end of micro-cantilever can reach 566 nm,which is increased by 2 times. The natural frequency can reach 385 k Hz,which is1. 45 times higher. The successful design of the stepped micro-beam lays the foundation for the integration and miniaturization of the sensor.
引文
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[10]刘庆海,黄见秋.表面微机械MEMS温度传感器研究[J].传感技术学报,2015(3):325-329.
[2]徐文奎,黄海波,李相鹏.微悬臂梁传感器用于测量酵母菌弹性模量[J].微纳电子技术,2016,1(53):25-30.
[3] RUST P,CEREGHETTI D,DUAL J. Viscometric real-time monitoring of the rolling circle amplification with a micromachined cantilever[J]. Sensor&Actuators,2017,239:1118-1123.
[4] ELTAHER M A,AGWA M A,MAHMOUD FF. Nanobeam sensor for measuring a zeptogram mass[J]. International Journal of Mechanics and Materials in Design,2016,12(2):211-221.
[5] ZHU Q. Micro-cantilever sensors in biological and chemical detection[J]. Sensor and Transducers,2011,125(2):125-131.
[6]矣雷阳,孙晨,胡宗达,等.一种用于地震检波器的新型MEMS加速度传感器[J].微纳电子技术,2015,52(7):433-445.
[7]陈婷婷,关新峰,杨杰,等.基于压电效应的MEMS振动式微能源器件[J].微纳电子技术,2014,51(2):110-114.
[8] LEE J,JUNG M,BARTHWAL S. MEMS gas preconcentrator filled with CNT foam for exhaled VOC gas detection[J]. BioChip Journal,2015,9(1):44-49.
[9]王海,童云华,夏小品,等.用于扫描刻蚀加工的微悬臂梁优化设计[J].传感器与系统,2012,31(10):109-112.
[10]刘庆海,黄见秋.表面微机械MEMS温度传感器研究[J].传感技术学报,2015(3):325-329.