摘要
微系统应用于自动化技术、交通工程、机械制造工程、医疗技术和分析技术等领域，将对国民经济产生巨大的影响。随着系统日益集成化和零件持续微小化，对微装配系统的精度要求越来越高。因此，近年来微操作机器人及微装配技术的发展非常迅速。论文主要研究工作如下：
①本文对压电陶瓷、形状记忆合金和超磁致伸缩材料的原理及其微驱动特性做了较深入的探讨。对这三种微驱动材料的合理使用进行了实验和分析。
②对三种3-DOF并联微操作机器人模型进行了运动学分析。在此基础上演化出六种3-DOF并联微操作机器人结构，并研制出了六种基于并联机器人结构的双指微动操作器样机。对并联微操作机器人的结构优化设计进行了较深入的讨论。用条件数法对并联微操作机器人的结构参数优化进行了研究。
③研制了两种以形状记忆合金驱动的，基于柔性铰链结构的双指型微机械手。对形状记忆合金作为驱动元件的若干应用技术问题进行了探讨。
④研制了磁致伸缩微驱动器和以这种驱动器驱动的2维微动平台。
⑤研制了五种结构形式的基于柔性铰链的微位移放大机构。对柔性铰链的设计方法进行了研究，对在本实验条件下柔性铰链的结构参数的合理取值范围及微位移放大机构的合理放大倍数进行了探讨。用有限元法和ANSIS软件对柔性铰链的受力状态和机械变形进行了计算和模拟。对钢丝代替铰链的替代作用提出新的观点。对用钢丝代替球铰链引起的误差进行了分析和计算。
⑥对并联微操作机器人进行了误差分析，分析了并联机构的结构参数误差对机器人在其工作空间内的位姿精度的影响。对现有的误差消除方法进行了分析比较。采用不考虑结构参数，把机器人作为一个黑箱进行整体标定的方法。
⑦对不同结构柔性铰链的误差进行分析比较，认为全部采用转副的结构是
北京工业大学工学博士学位论文
微操作机器人较好的结构形式。在此基础上提出了两种非传统并联微操作机器
人模型。
Micro-System applied in automation, traffic engineering, manufacturing, medical treatment, analytical technology will influence national economy greatly. With the development of MEMS, its components are becoming increasingly tiny and integrating. And then the components for the system need higher resolution and precision. Hence, the micro-robotic and micro-assembly technology develop quickly.
(1)This paper discussed the properties of piezoelectric ceramic, shape memory alloy and magenetostrictive material droved system. And experimental research and analysis of the three systems were carried out.
(2)In this dissertation, position kinematics of a micromanipulator with serial-parallel structure was studied. Based on this analysis, 6 prototypes were developed. The optimal parameters of the structures were studied with condition indexes.
(3)Two shape memory alloys actuated two-finger manipulators, which based on flexible joint, were developed. In addition a number of technologies of shape memory alloy acted as actuator were disscussed.
(4)Magenetostrictive actuator and 2-dimension micro-displacement platform were developed.
(5)Five structures of amplifier with flexible joints were developed. The design methods for flexible joint were studied also. The optimal structure parameters of flexible joint and amplifiers with flexible joint machinery were studied. The load and displacement of amplifier were calculated and simulated with ANSIS software. New modle using wire was put forward and the error of the joint was anlysed and calculated.
(6)This paper analized the error of the manipulator developed and the influence of the parameters. The method of error control was intruduced.
(7)Based on the analysis of the error of all kinds of flexible joints, a new structure of micro-manipulator, which only with turn joint, was suggestted.
引文
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136 许意华，刘德忠，费仁元，潘新文．3-PTT并联微操作机器人工作空间分析”机械科学与技术(接收)
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139 许意华，刘德忠，费仁元，潘新文．基于遗传算法的并联机器人机构位置正解求解．(待发表)
140 刘德忠，费仁元，许意华，潘新文，范欣男．柔性铰链微位移放大机构工作性能仿真．(待发表)
141 刘德忠，费仁元，许意华，潘新文．微机器人中替代球铰的定位误差．(待发表)
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