摘要
超精密抛光技术作为制造业发展的标志之一,己深入到了航空航天、军事、集成电路、民用设备等诸多领域。随着光电子技术的发展,光学材料元件在行业中的作用越来越重要,利用光学材料制作超精密元器件的需求与日俱增。这类元器件不仅需要极高的精度和极低的表面粗糙度,还要求无次表面损伤。但目前国内发展水平仍处于较低阶段,对抛光原理了解不够深入,加工过程也过多的依赖经验,效率低下。因此,研究抛光机理和机构,开发稳定性好、加工精度高的抛光机是非常必要的。
本文介绍了虚拟制造的一些基本原理,并将虚拟样机技术引用于下摆式抛光机的研究开发中,分析了抛光机的工作原理、传动原理及待改进的问题,建立了抛光过程的数学模型,分析了抛光应力区的分布,得出了抛光机运动参数与CMP抛光材料去除率之间的关系；完成了下摆式抛光机数字化实体建模、虚拟装配、干涉检查、运动仿真及零部件强度、刚度、稳定性等的分析,从而获取大量实验室无法获取的抛光过程内在信息,并为后续的仿真分析奠定坚实的基础；利用ANSYS软件对设备进行了动态特性分析,分析预测了设备所具有的一些力学特性,为设计提供了理论依据；发现了虚拟设计制造上的缺陷,通过改进结构达到了优化设备的目的。
总之,本文采用虚拟样机技术对下摆式抛光机所进行的探索性研究是可行的,它为下摆式抛光机的进一步研究开发提供了一定的依据、方法和可供借鉴的经验。
As one of the hallmarks of the development of manufacturing, ultra-precision polishing has been applied in broad areas, such as aviation, spaceflight, military affairs, Integrate circuit, civilian equipment and so on. The components which are manufactured by optical materials are playing an important role in manufacturing with the development of optoelectronic technique and the demand for these components has kept rising. Such component requires not only high accuracy and extremely low surface roughness but also non-sub-surface damage. However, the level of domestic development of the technology is still at a low stage. We do not have a deeper understanding of the principle of polishing and polishing process is depended on experiences too much which lead to the low productivity. Therefore, it is very necessary to study mechanism and develop polishing machines which have good stability and high accuracy.
This paper introduced some basic principles of virtual manufacturing. It introduced working principle, transmission principle and questions to be improved of polishing machine by applying virtual prototyping technology into the research and development of sway downward polishing machine. The paper set up a mathematical model of polishing process and analyzed the stress distribution of polishing. The relationship between machine working parameters and CMP polishing material removal rate was given. The digital solid modeler, virtual assembly, interference check and motion simulation of sway downward polishing machine were finished and the strength, stiffness and stability of parts of the machine were analyzed. The inner information in polishing process which can not get from laboratory was obtained, and the foundation of follow-up simulation analysis was laid by doing that. The paper analyzed the dynamic characteristics of the equipment by ANSYS, and pridicted the mechanical strength characteristics of the equipment which provided a theoretical basis for the design. The defects in virtual design and manufacturing were found and the equipment could be optimized by improving the structure.
In short, the research which applies virtual prototyping technology into sway downward polishing machine is feasible, and it provides some references, methods and experiences for the further research and development of sway downward polishing machine.
引文
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