激光圆度仪研究
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摘要
圆度误差是指在垂直于回转轴线截面上的轮廓对理想圆的变动量。圆度误差可以用多种方法测量,如V型块法、气动法、光干涉法等。其中以精密主轴回转式圆度仪精度高、测量方便、测量速度快,因而应用最为广泛。圆度仪按主轴的布局可分为转台式和转轴式两种。然而随着科技的发展,精度要求越来越高,接触式的测量方式已不能满足要求,于是以非接触方式测量的光电检测技术以其高速、高精度、自动化、智能化的优点广泛应用于各个领域。而圆度误差的非接触测量也成为一个必然趋势。本文论述的激光圆度仪即是采用非接触测量的仪器。主要论述了转台式激光圆度仪的总体设计,将圆度仪的工作原理、机械结构和设计要求作一定的阐述并对此圆度仪的空气静压轴系、精密立柱材料的选择、结构设计以及电机的选择作了进一步的分析,尤其在圆度仪的激光测头——非接触激光测头的工作原理、构成原理、结构形式以及误差分析等作了更为全面和深刻的讨论。
The circular error can be measured by lots of methods. Such as pneumatic,interference of light and so on. the accuracy of rotary precision circularinstrument is high measurement, its quick speed of measurement. So it isapplied, in many fields. According to the layout of chief axis. the circularinstrument can be divided turn plate and rotary axis. However, as thedevelopment of science and technology, the requirement of accuracy is moreprecise. Therefore, the non-contact measurement of photoelectric detectingtechnology is widely applied in each field, because of it is advantage ofquick speed precise accuracy, automation, intelligence and so on.. Thenon-contact measurement of circular error will become one of certaintendencies.
     The text discusses the design of turn plate of laser circular instrumentincluding the working principle, the construction and the designrequirement.
     The choice of air static axis and the material of precise vertical prismare introduced in this text. The structural design and the choice of electricmachine are analyzed in the text. Particularly the working principle ofnon-contact laser measurement, its structure and the accuracy analysis andso on are discussed in the text.
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