摘要
微器件装配技术是获得三维微细结构、解决工艺兼容性问题和组件级分工合作问题的有效手段。这种技术采用有别于传统微细加工手段的整体加工方法，根据器件不同组成部分的工艺或功能进行划分，分别加工出这些组件后再进行组装。微装配技术降低了复杂结构的加工成本，把微细加工的生产组织方式向传统生产组织方式靠拢，是实现毫米或亚毫米大小复杂机器系统的关键技术之一。
目前，微装配技术中仍亟待解决的核心问题是进一步提高装配效率。由于微器件操纵的拾取、转移、释放三个阶段都深受粘附力的影响。对粘附力的应对直接关系到操纵的成败和微器件最终安装的位置精度。而粘附力的三种主要组成部分，范德华力、静电力和表面张力都受到环境参数特别是相对湿度的影响。所以研究环境参数如何影响微操纵成功率对于实现高效率的微器件装配有着重要意义。此外，对于一次完成上万个器件加工的并行微细加工技术来说，这种串行化的组装过程会是一个严重的速度瓶颈。所以还要缩短单个器件装配所消耗的时间。
本论文通过对环境参数如何影响微操纵成功率的研究，为不同的操纵原理和实验配置选择一个最优的环境相对湿度水平，以便在不改变其它实验装置的情况下获得最优的操纵成功率；并在视觉伺服系统的支持下，实现了微器件自动装配，以提高操作速度和可重复性。论文完成的具体研究工作可以概括为如下三方面：
1．基于动力学模型，用镀金的钨探针作为粘附型微操作器在大气环境下进行微操纵实验。并在恒温恒压条件下，研究不同环境相对湿度下进行微操纵的效率变化。实验结果的统计分析表明，环境相对湿度对操纵过程中的接触界面破坏和粘附两个阶段均有显著影响。虽然对于不同的实验配置(样品情况和基底情况)，操纵效率的具体数值会有不同，但对这种操纵方式来说，操纵效率受环境湿度的影响都表现出了类似的变化趋势。即随着环境适度的增加，释放微器件的效率会增加。而拾取微器件的效率先逐渐增加，在相对湿度大于85％后出现急剧下降，在相对湿度大于90％的环境下难于拾取任何物体。总的来说，对于我们的实验配置，在相对湿度处于65-85％之间时可以获得最优的操纵效率。在此研究基础上，本文用镀金的探针对高分子小球、随机形状的氧化硅颗粒、氮化硅覆盖的高分子小球等样品在硅片和镀金的粗糙硅片上进行了成功的操纵。然后用三维立体光刻技术在玻璃基底上制作了微型齿轮和齿轮轴，并用该装配技术将这些零件装配成互相啮合且传动良好的齿轮组。
2．研制了适合实现自动操作的微操作器。该机械夹持微操作器利用压电陶瓷双晶片驱动，能对球、立方体、圆柱体等多种形状的微小物体进行操纵。在视觉伺服系统的帮助下，实现了压电微操作器的位移视频反馈控制，并结合夹持臂的刚度实现了夹持力控制。该微操作器在70V的电压驱动下可以闭合约200μm的距离，适用于10μm到200μm之间的微小物体操纵。微操作器的位移控制精度为亚微米，夹持力控制精度约200 nN。
3．研制了环境可控的微器件自动装配系统。整个微装配系统的执行部件都放置在一个环境控制系统的工作腔内，该环境控制系统可以调节工作腔内的气压和温度，并可以通过调节腔内的气体成分来调节相对湿度。自动微装配系统采用视觉反馈，除了工作台的位置反馈之外，所有的工作场景信息均来自于视觉伺服系统。在视觉系统的支持下，能够完成显微镜系统的自动聚焦和定标，微操作器和微器件的识别和位置测量，以及微操作器的位移反馈控制和夹持力控制等。在18×的光学放大倍率下，本系统能够进行亚微米精度的显微镜系统定标，对物体的位置测量精度约1μm。自动微装配系统可以在10秒内完成一次微器件装配，操纵高分子小球时达到了约93％的成功率。
Micro assembly technology is used for producing 3D micro structures, solving the problem of process compatibility, and distributed manufacture. The micro components are devied by their different manufacture process or function. Then they are manufactured and followed by an assembly process. This process likes macro manufacture rather than traditional micro manufacture process. It is one of the key technologies to realize millimeter or sub-millimeter robotic systems.
After more than ten years research, the biggest problem remained of micro assembly is the unsatisfactory assembly efficiency. At microscopic level, the dominant adhesion forces between micro objects affect micro handling dramatically. The handing success rate and positioning accuracy of micro objects are influenced by them. However, the main component of adhesion forces, van der Waals force, electrostatic force and surface tension force are related to the ambient environmental relative humidity condition. In order to obtain an effective micro handling efficiency, we should understand how environmental parameters affect micro handling efficiency. Moreover, the speed of serial micro assembly is very slow comparing with that of parallel micro process. Hence we must reduce the time consuming of assembly a micro part.
This dissertation investigated the environment influences on micro handling efficiency. By choosing suitable environmental parameters, we could obtain the best handling efficiency while the experimental configuration is not changed. Furthermore, In order to improve the handling speed and stability, a vision servo automated micro assembly system was developed. The main research subjects of this dissertation are detailed as follows:
1. Micro objects are handled by an adhesive type micromanipulator (a gold coated tungsten tip) in atmosphere environment. And how the handling efficiency varies with the ambient environmental relative humidity level are investigated. The experimental results indicate that both the contact interface cracking process and adhering process during micro object handling operation are remarkably affected by the environmental humidity. The micro object release success rate increases with the environmental humidity, and the pickup success rate also shows a tendency of increase but followed by a rapid decrease. For our adhesive type manipulator, the best handling efficiency will be obtained when the environmental relative humidity is between 65% and 85%. It is possible to obtain a satisfactory handling efficiency by controlling the environmental humidity in a proper range.
2. A piezoelectric driven micromanipulator is developed. It can be used to handle micro objects with shapes of sphere, cubic, cylinder and so on. The displacement of the micromanipulator is measured by a vision feed back system. By considering the elastic ratio of the end-effectors, the grasping force is controlled by applying an extra driven voltage after the end-effectors contact a micro object. The micromanipulator generates a displacement of about 200μm while a driven voltage of 70 V is applied. The displacement resolution is sub-micron. The grasping force resolution is about 200 nN.
3. An environmental controllable automated micro assembly system is developed. The environmental control system can adjust the air pressure, temperature and relative humidity of the working chamber. The vision servo micro assembly system is full automated. It can focus and calibrate the microscope system, recognize micro objects and measure their positions, control the displacement and grasping force of the micromanipulator, and so on. The microscope calibration precision is sub-micron while the magnification ratio of the microscope is 18×. The system can assemble a micro object within 10 seconds automatically. The success rate of handling polymer spheres is about 93%.
引文
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