摘要
随着微技术的迅速发展，微机械电子系统（MEMS）在航空航天、精密仪器、
生物医学等领域有着广阔的应用潜力，因而受到各国的高度重视。但是，实现
MEMS的商品化、产业化面临着一些困难，因此，人们正致力寻求新的生产模式
以满足MEMS的生产需要。微小型生产系统由于具有节省能源和空间，机动性强
等优点成为其中的一个发展方向，而微型工厂（Micro-factory）是其中的典型代
表。
本文结合CIMS、FMS等思想和研究经验，提出了桌面式微型工厂的概念；
并以生产集成微机构（IMM）为最终产品，建立了微型工厂的原型框架结构。并
对其几个重要组成部分包括加工中心、微检测部分、控制部分、软件平台等进行
了描述。特别是就其核心部分加工中心的几个不同的功能单元组成：材料部件供
应单元、加工预装配单元和精密装配、封装单元等进行了详细的描述。
同时，为了便于实现过程仿真和微型工厂虚拟环境的建立，提出了微型工厂的
多Agent的系统结构，并对多Agent系统实现方法进行了研究。采用Agent分析和
设计方法，将复杂的微型工厂划分为多个相互关联的Agent，使系统建模和仿真
更接近实际系统。
在建立的体系结构的基础之上，讨论了微型工厂加工过程的仿真，重点描述
了仿真过程中系统模型、工艺模型、产品模型和过程模型的建立，并介绍了仿真
校验和结果分析方法。
针对微型工厂这一个比较复杂的系统，对其原型系统的实现进行了合理规
划，提出了微型工厂原型系统的开发应遵循：集成化原则、开放性原则、人机和
谐原则。
最后详细描述了微型工厂原型系统实现方法，并采用VRML语言，详细介绍
了设备几何模型、模型的开发、实现方法。
Along with the rapid development of the micro-technology,
Micro-Electro-Mechanical-System (MEMS) is very potential, which is applied in the
aviation, aerospace, precision instrument, biomedicine domain, etc. Hence, it is paid
great attention by many developed countries. But, there are so many difficulties in
commercialization and industrialization of MEMS that researches and manufacturers
have to find some new production patterns to meet needs of MEMS products.
Micro-product system is a hopeful way because of the saving of energy and space and
of the flexibility. The Micro-factory is a typical representation of it.
In this thesis, succeed to the idea and research experience of CIMS and FMS, the
concept of desktop micro-factory was proposed and the visual prototyping and
framework of micro-factory is set up, in which the Integrated Micro-Mechanism (1MM)
can be produced. The different functional units of micro-factory were described in
detail, which comprises of machining center, micro-detection system, control system
and software system. Especially, the machining center is the hardcore and consists of
parts supply unit, machining and pre-assembly unit and precision assembly unit etc.
The system structure based on multi-Agent was presented, because it can simplify
the implement of the process simulation and virtual environment of micro-factory.
Simultaneity, the implement methods about multi-Agent was investigated. With the
based-Agent analyses and design, micro-factory was separate into many international
Agents, therefore, modeling and simulation is simplified.
Depend on the system structure founded, the simulation of machining process was
proposed, in particular, it was described in detail to constitute the system model,
process model, product model and machining process model. Moreover, the method of
validation and verification of simulation models and result analyses were introduced.
In order to reduction the complicated micro-factory, the development of
prototyping of micro-factory should comply with some principles such as integration,
opening and harmonious between human and computer.
Finally, the implement methods of prototype system were described. And
recurring to VRML tool, with the emphasis on equipment geometry model and Agent
realization, an example of prototype system was developed.
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