摘要
利用胶体刻蚀技术能够制备非常丰富的表面图案化结构(如纳米柱、纳米线、纳米锥、纳米坑等)，并且能够方便、精确地改变结构参数(如周期、高度、间距等)，在减反射、表面亲疏水、传感器以及能源方面都有很重要的作用。
本文以胶体刻蚀技术为基础，结合不同构筑微纳结构的工艺方法，通过调控结构参数实现最佳性能。构筑仿生硅锥阵列，利用其增强光学吸收性能来实现无基质干扰小分子检测及实际尿糖定量检测；构筑多尺度褶皱硅锥阵列，在更宽波段范围内实现更好的减反射效果，避免了传统减反射亚波长微结构对结构单元的尺寸和形貌的限制；构筑金字塔状硅坑阵列作为复制金属金字塔阵列的模板，应用于表面增强拉曼检测，该方法在获得优异拉曼增强基底的同时大大提高测试的重复性。
总之，本论文的出发点和目的地是利用传统的胶体刻蚀技术构筑出新颖、系统的微纳结构并使该构筑过程成为优化性能的途径。
Various surface structures can be fabricated based on colloidal lithographysuch as nanoring, nanowire, nanocone and nanowell and so on. These structurescan be applied in many subjects including antireflection, surface wetting, sensorsand energy-related areas. Their surface features can be precisely and easilycontrolled.
In this dissertation, we have fabricated various structures by combiningcolloidal lithography with other techniques such as reactive ion etching and KOHchemical etching. The surface features including height, period and morphologyare modulated to optimize their functions. First, Biomimetic silicon nanocones(SiNC) array with controllable photo-absorption ability has been obtained andused in laser desorption/ionization process. Successful detection of smallmolecules and real urine glucose can be performed on the optimized SiNC array.Second, multiscale corrugated SiNC array have been created to achieve excellentantireflection performance and superhydrophobic property by twice polystyrenespheres masked etching. With the multiscale corrugated arrangement,sub-wavelength structures with coloumn shape and low aspect ratio can alsoexhibit excellent antireflection property. Third, inverted silicon pyramidal pitsarray have been obtain with the SAM-masked KOH etching, which is a templateto fabricate surface-enhanced Raman spectrometry (SERS) substrate. The transferred Ag pyramids possess excellent Raman enhancement as well as highhomogeneity (a substate) and reproducibility (different substrates).
In summary, our goal is to fabricate novel nanostructures based ontraditional colloidal lithography. More importantly, the fabricating route should bethe way to improve their functions.
引文
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