摘要
本文介绍了常用的微区电阻测试方法,通过比较各种方法的优劣,选择四探针方法进行研究,分析了常规直线四探针法的基本原理、测准条件、电流量的选择、边缘和厚度的修正以及测量区域的选择。从常规直线四探针法入手,引进了改进的范德堡法,即斜置式四探针法,阐述了该方法优于常规直线四探针法的测量原理及测试条件,然后基于常规直线四探针法和改进的范德堡法,探讨了用于测量薄层电阻率的斜置式方形Rymaszewski四探针法的原理,用该方法测定了4吋圆形硅片的电阻率分布。
从电阻率的统计分布出发,确定了电阻率的分割数和差值,并且选择合适的门槛值,利用模糊数学将电阻率数据归于不同的模糊集,同一模糊集对应相同的电阻率,这样使得电阻率能以一定间隔分布,然后应用MATLAB软件画出电阻率的图形,以构成Mapping图。选取的Mapping图表示方法有:径向图、径向对比图、彩图、灰度图和等值线图。比较各种薄层电阻分布图的表示方法,优选出最理想的表征薄层电阻的Mapping图,即灰度显示,对样品的测试结果进行表示。表征薄层电阻的Mapping图的研究目的在于使薄层电阻分布情况一目了然,提高对测试结果的分析效果。本课题拟以改进原有样机对处理结果的表示方法为目标,改进后的处理结果直观、具体。
This paper introduced common methods of micro-resistance test. We choose the four-probe method to study after comparing the merits of each method. The basic principle, measured quasi-conditions, current selection, edge and thickness of the amendment, the choice of measurement region of conventional linear four-probe method was analyzed. Started with the conventional linear four-probe method, the improved Vanderbilt law was introduced, which is also called oblique four-probe method. The measurement principle and test conditions were described, which is better than conventional linear four-probe method. Then the principle of Rymaszewski oblique style square four-probe method for sheet resistivity test was discussed, and the resistivity distribution of 4-inch silicon wafers was determined using this method.
The division number and difference of the resistivity was identified and the appropriate threshold was selected from the statistical distribution of resistivity. The resistivity data were attributed to different fuzzy sets according to the fuzzy mathematics theory, the same fuzzy sets corresponding to same resistivity, so the resistance can make the intervals distribution, at last, mapping graph was formed by resistivity graphics drawn with MaTlab software. The express methods selected for mapping diagram are: radial diagram, radial comparison chart, color pictures, gray scale and contour map. Gray scale method, which is determined as the best characterization of sheet resistance for mapping graph by comparing the representation of different sheet resistance graph, was choosen to express the samples test results. The purpose of characterized sheet resistance mapping graph study is to make it clear of the sheet resistance distribution, and increase the analysis effect of test results. This research was intended to improve the representations of the results using original prototype, after the improvement, the representation of results is more intuitive and specific.
引文
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