摘要
在分析左右手复合传输线结构特性和微机电系统(Micro-Electro-Mechanical Systems,MEMS)技术基础上,设计分析了耦合蛇形线结构和横向热驱动MEMS开关。运用这两种设计,本论文主要进行了新型带通滤波器研究,带阻滤波器研究,微带平衡器研究,基于二极管开关的可调滤波器研究,MEMS开关研究,基于MEMS开关的可调滤波器研究。另外,也应用微加工工艺对具有2维左右手复合传输线结构特性的微型定向天线进行设计加工。在对各器件微型化的基础上,实现了各器件预期的功能。
(1)分析耦合蛇形线结构与插指电容结构的参数特性,基于耦合蛇形线结构设计了带通滤波器,微带平衡器和带阻滤波器以及电可调滤波器。以耦合蛇形线结构为基础并通过微加工工艺进行加工的带通滤波器在特定频带具有左手特性,而且该滤波器具有较宽的通频带。其主体耦合蛇形线结构的长度仅为中心工作波长的1/50。为避免接地结构带来的工艺复杂性以及可能引起的干扰,研究了一种多周期无接地耦合蛇形线微带平衡器。这种平衡器利用对称结构中心轴线处的虚拟地,可以在不需物理接地的情况下实现理想接地的效果,这也克服了使用大的电容实现接地时效果不理想的缺陷。通过电磁场仿真可以明显看到在耦合蛇形线中的电磁场反向传播,而且在模型的对称中心位置有明显的电壁存在。本论文也根据耦合蛇形线结构,设计了一种对偶性结构。为考察这种结构的特性,设计了一种传输线带阻滤波器,并使用微加工工艺加工制备了样品。测试结果表明,该对偶结构与普通左右手复合传输结构不同,在低频端为右手性,而在高频端呈现左手性。作为带阻滤波器,该滤波器在左手性区域具有较宽的通频带,这提高了该滤波器的工作频带宽度。结合耦合蛇形线左右手复合传输线结构及其对偶结构的特点,本论文设计了一种新型结构。通过切换这种结构中心线与两端口的通断,可以实现一种可调滤波器。此滤波器使用二极管做为开关,通过偏置电路切换二极管的通断状态,继而切换滤波器的工作状态。使用微加工工艺加工样品后,对样品进行了测试。测试结果表明,该器件可以在带通和带阻两种状态间切换。
(2)设计了一种新型横向热驱动MEMS开关,并将其用于可调滤波器中。MEMS开关结构主体包括一条“U”型热驱动臂和一条悬臂梁。“U”型热驱动臂的热变形通过悬臂梁放大,继而驱动悬臂梁端部的接触头。针对开关结构特点设计了加工工艺流程,对悬臂梁结构的牺牲层工艺进行了实验,最终确定使用氨水加双氧水的碱性刻蚀液刻蚀牺牲层铜,这种方式可以在刻蚀铜的时候,不对作为开关主体的镍结构造成破坏。另外以SU8胶作为隔离块,设计了驱动电路与射频微波电路隔离的射频MEMS开关。然后通过MEMS技术制备了开关样品。直流测试结果表明,该开关的消耗功率为170 mW,相对于同类开关,功率消耗较低。同时测得了开关的开启时间为12 ms,基本达到了开关的设计标准。使用所设计的射频MEMS开关,设计了一种可调滤波器。测试结果表明,使用MEMS开关可以减少射频损耗。
(3)使用微加工工艺加工了一种基于二维左右手复合传输线结构的定向天线。这种天线以左右手复合传输线理论为基础,将高阻抗基底用于微波谐振腔,使腔体厚度显著降低。在使用微加工工艺加工该天线后,天线尺寸明显减小。对样品进行了辐射测试,结果表明,样品具有较好的方向性。
本论文首次提出结合微加工工艺加工耦合蛇形线左右手复合传输线结构,并使用该结构设计了多种微型微波器件。本论文也设计了一种MEMS开关,并将其结合到耦合蛇形线结构中设计了一种可调滤波器。这些研究极大的缩小了器件的尺寸,使得所设计的微波器件更适于未来便携式无线电子设备应用。
Coupled meander lines and thermal driven lateral MEMS switch were designed, based on the analysis of composite left/right handed transmission line (CRLH TL) structure and Micro-Electro-Mechanical Systems (MEMS) technology. The band pass filter, band reject filter, micro strip balun, reconfigurable filter using PIN diode and reconfigurable filter based on the MEMS switch were designed by the coupled meander lines and MEMS technology. And also, a micro directional antenna which has the CRLH TL property was fabricated by MEMS technology.
(1) The characteristic of coupled meander lines and interdigital capacitor structure were analyzed. Band pass filter, microstrip balun, band rejected filter and also electro reconfigurable filter were designed based on the coupled meander lines structure. The band pass filter was fabricated by MEMS technology, which has left handed characteristic at special frequency, so it has a wide pass band. And also the size of the filter is small. The length of the main structure is about 1/50 of the working wavelength. To avoid the complexity of the metal via, a multi periods coupled meander lines micro balun without connecting ground was designed. It has a virtual ground at the axis of symmetry which was shown in simulation results, so a real ground is not needed. It was also be shown in the simulation results that the electromagnetic field transmits backward in special frequency. Besides these devices, a dual structure of the coupled meander lines was designed and was used in a band rejected filter. The sample was measured after fabricated by MEMS technology. The measurement and simulation results showed that the filter shows left handed characteristic at high frequency which is different with normal coupled meander lines. On the other hand, the left handed region is wide this is the same with normal coupled meander lines. A novel structure developed from coupled meander lines and its dual structure was studied, and was used as the main structure of a reconfigurable filter. The reconfigurable filter using diode as the switch can work as band pass filter and also band reject filter when the diode state is switched. After fabricating by MEMS technology the sample was measured. The measurement result is similar with the simulation results.
(2) A novel lateral thermal drive MEMS switch was designed, and was used in the reconfigurable filter. The switch is composed by a“U”shape beam and a cantilever beam. The cantilever beam is driven by the“U”shape beam which is placed vertically to the previous one. The Switch is based on the magnification of the thermal deformation of the“U”shape beam. The fabrication process was designed according the structure of the switch, especially the etching solution for removing the sacrifice layer. To design a switch that the DC circuit is isolated with RF circuits, SU8 was selected as the connecting part of the two circuits. The measurement results showed that the power consumption of the switch is about 170 mW and the switching time is about 12 ms. After the switch was fabricated, it was used in the reconfigurable filter. The simulation and measurement results showed that the reconfigurable filter can reduce the power leakage.
(3) A micro metamaterial directional antenna was fabricated by MEMS technology. A high resistance substrate based on CRLH TL theory was used as the substrate of the antenna. This can reduce the thickness of the antenna. After fabricated by MEMS technology, the sample was measured; the measurement and simulation results showed that the antenna has a good directional emitting characteristic.
Coupled meander lines CRLH TL structure and the fabrication methods by MEMS technology were proposed in this paper. Several microwave devices were designed and fabricated. A thermal drived MEMS switch was also designed and was used in the reconfigurable filter. These designs reduced the device size and make the device more suitable for the portable wireless electro system.
引文
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