摘要
随着社会进步和科学技术的发展,气体放电等离子体技术在材料、微电子、化工、机械及环境保护等众多学科领域中发挥着越来越重要的作用。但是,由于真空状态下的气体等离子体放电,存在着操作系统工艺复杂、难以连续化生产、设备造价高等问题。因此,大气压下的辉光放电等离子体技术已逐渐成为研究的热点。虽然,大气压下的辉光放电具有较高的电子能量水平、且不需要真空系统,但是,实际应用还有一些关键技术,如大气压辉光放电液相沉积工艺系统、微观薄膜沉积过程作用机理、等离子体放电电源参数等与改性材料关联问题,有待于进一步研究探讨。本文针对纺织材料表面改性问题,在调查国内外相关研究的基础上,提出了“纺织材料表面改性大气压辉光放电液相沉积关键技术的研究”课题。
本论文共分七章,具体研究内容如下:
第一章,概论。本章先后论述了课题来源、研究目的和意义,国内外研究现状,关键技术,提出了本学位论文的主要研究内容。
第二章,大气压辉光放电液相沉积工艺过程研究。本章通过对等离子体液相沉积工艺过程的研究,围绕着怎样提高液相沉积过程效率问题,设计大气压辉光放电液相沉积工艺实验系统,通过对其作用机理的研究,构建了纺织材料表面改性微观薄膜沉积过程动力学模型。
第三章,等离子体液相沉积电压型PWM整流器的研究。本章针对大气压辉光放电电源电网侧功率因数低、谐波污染严重、直流侧电压不稳定及动态响应能力差等问题,从系统功率给定和抑制电流波动目的出发,通过对三相VSR控制系统所涉及到的PWM整流器拓扑结构及原理、PWM整流电路的控制策略、三相静止坐标系到两相旋转坐标系模型转换、三相VSR调制等问题的研究,设计了一种新型的三相电压型PWM整流器,给出了一种新的网侧电感设计方法。
第四章,等离子体液相沉积电压型PWM逆变器的研究。本章从介质阻挡大气压辉光放电等效电路出发,针对大气压辉光放电对高频放电电源的要求,选择了串联谐振式电源拓扑结构;通过对其工作模态的分析研究,设计了电压型串联谐振逆变器ZVS控制方式;采取一种动态软开关死区时间控制方法,解决了功率管延迟时间问题,降低了电源功率开关管损耗,及其浪涌电压/浪涌电流;通过对PS-PWM电路的研究,采用对逆变桥桥臂中点直流电压和变压器的初级电流幅值检测,将其转换为单向电压,并通过幅值叠加合成的方式,对PWM移相角进行微调的方法来达到抗偏磁的目的。
第五章,等离子体电源装置的试验研究。为了验证对电源的理论研究,本课题研究设计制作一台数字化控制等离子体电源样机。通过实验对相关参数进行了优化,优化后的等离子体电源装置在ZVS控制下,控制脉冲的触发时刻随着负载电流、直流电压和谐振频率的变化而自动动态变化,使开关器件的换流一直能够保持在零电压换流,证明了控制方法的可行性和高效性。
第六章,纺织材料APGDLD表面改性实验研究。为了验证模拟研究,通过实验装置对纺织材料表面改性大气压辉光放电液相沉积工艺系统参数进行实验研究,探讨放电功率、频率、处理时间、单体流速、He气流速等对薄膜沉积速率、接触角的影响等。采用本方法,分别在PE纤维、丝织物、棉织物等多种基材上成功地涂覆不同特征单体的膜层。应用此工艺可在基材表面沉积粘合性和耐洗性好的高性能膜层。通过工艺系统的实验研究证明了,APGDLD在大气压下运行,具有装置简单、能耗低、成膜速率快等特点。
第七章,结论。对论文的主要研究工作和创新点作了总结,本课题对于大气压辉光放电液相沉积处理纺织材料的表面改性技术的理论和实验研究,为该技术的实际应用奠定了理论和实验基础。并对未来的研究工作进行了展望。
With social progress and development of science and technology, the gas discharge plasma technology is playing an increasingly important role in material, microelectronics, chemical, mechanical, environmental protection and many other fields. However, the operating system contains many problems such as process complexity, difficult to achieve continuous production, equipment of higher cost etc. in practical use of discharge plasma under vacuum. Therefore, atmospheric pressure glow discharge plasma technology has gradually become the research hotspot. Although atmospheric pressure glow discharge possesses high electron energy levels, no vacuum system, some key issues still need to be further studied in practice. For example, atmospheric pressure glow discharge liquid deposition (APGDLD) process system, microscopic mechanism of thin film deposition process, plasma discharge power parameters association with the modified material and so on. On the basis of the investigation of relevant research at home and abroad, this dissertation presented the subject "key technology research on surface modification of textile material by atmospheric pressure glow discharge liquid deposition".
The dissertation is divided into seven chapters, specific contents are as follows:
Chapter 1, Introduction. This chapter has presented and discussed the subject source, research purpose and significance, research at home and abroad, key technologies and the main study in this dissertation.
Chapter 2, Research on process of atmospheric pressure glow discharge liquid deposition. Aimed at how to improve the efficiency of liquid deposition process, atmospheric pressure glow discharge liquid deposition system was developed, through its mechanism research, the micro- kinetic model of thin film deposition process of the surface modification of materials was built.
Chapter 3, Research on voltage type PWM rectifier of plasma liquid deposition. Aimed at the problems such as the low power factor of atmospheric pressure glow discharge in the power grid side, serious harmonic pollution, instable DC side voltage and poor dynamic response capacity, for setting the given system power and curbing the current fluctuations, through the research on three-phase VSR control system involved in the PWM rectifier topology and principle, control strategy of PWM rectifier, model conversion from three-phase static coordinate system to two-phase rotating coordinate system, based on the analysis of flow converter approach of input voltage and current of space vector three-phase VSR, modulation of three-phase VSR, a new three-phase VSR was designed.
Chapter 4, Research on voltage type PWM inverter of plasma liquid deposition. From the equivalent circuit of dielectric barrier discharge, series resonant power topology was chosen for high-frequency discharge power supply of atmospheric pressure glow discharge, through analysis of its work modal, a voltage-type series resonant inverter ZVS control was designed; a dynamic soft-switching dead-time control method was adopted to solve the problem of delay time of power tube. Wear and tear of power switching tube and the higher surge voltage/current decreased; through research on the PS-PWM circuit, Through detection of DC voltage of the mid-point in the inverter bridge arm and amplitude of transformer primary current, one-way voltage will be converted. Anti-bias attained by means of superposition synthesis of amplitude and PWM phase-shifted angle fine-tuning.
Chapter 5, Experimental study on plasma power. In order to verify the theoretical study, a prototype of digital control of plasma power was designed. Through experiments the relevant parameters were optimized, the optimized plasma power can control the trigger pulse change dynamically and automatically with the change of the load current, DC voltage and the resonant frequency at ZVS control, so that the converter of switching components can maintain conversion at zero-voltage. That is, it proves that the control method is feasible and efficient.
Chapter 6, Research of APGDLD on surface modification of textile material. In order to verify the simulation study, through experiment study on process system parameters of APGDLD on surface modification of textile material, the effect of discharge power, frequency, treatment time, monomer flow rate, He flow rate on the film deposition rate and the contact angle etc. were explored. Coating of different monomer film was deposited successfully on PE fibers, silk fabrics, cotton fabrics respectively. Application of this technology can acquire adhesion and washable and high-performance deposition coating on the substrate surface. Through the experimental research, APGDLD system shows simple device, low power consumption and fast film-forming characteristics.
Chapter 7, Conclusion. The main research and innovation were concluded, the topic for surface modification technology of atmospheric pressure glow discharge liquid deposition treatment of textile material, the theoretical and experimental research laid the theoretical and experimental foundation for the practical application of technology. The future research work also has a prospect.
引文
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