摘要
热流测量是热工测量中的难点，特别是瞬态热流的测量是热工测试中一直
没有得到解决的问题。因此瞬态热流计的研制填补了国内在瞬态热流测量上某
些方面的不足。瞬态热流计在建筑工程和航空航天事业中具有广泛的工业应用
前景。
本文在综合评述前人工作成果的基础上，借鉴国外的制作和研究经验，利
用薄膜技术，在石英基片上溅射铜、镍和二氧化硅薄膜，形成薄膜热流计。该
薄膜热流计是由28对热电偶组成的热电堆，大小为38×22mm~2，总体厚度为
1mm。本文运用了先进的数据采集系统和计算机技术，采用了绝对法和相对法
相结合的标定方法，对所制作出的热流计进行了标定，确定了热流——热电势
的关系曲线。在此基础上对薄膜热流计进行了稳态响应测试和瞬态响应测试，
并与国外的结果进行了比较，结果表明，该热流计在响应速度方面较快，在灵
敏度方面稍低。
对于标定曲线中的非线性，本文进行了初步的研究。同时，对于薄膜热流
计测试中的误差进行了分析，得出了一些有益的结论。
Heat flux is difficult to measure especially transient heat flux, which has not been resolved until now. So the research and development of transient heat flux sensor fills the domestic gap of measurement of transient heat flux in some aspects. The sensor has an extensive prospect of industrial application in the construction engineering and aeronautics and space fields.
Upon comprehensively reviews of the predecessors?results, using the experience of other countries for reference, and implementing thin film technology, the author have developed the microsensor in this thesis by sputtering metal material on a silex substrate. The temperature sensing layers each constructed of 28 copper and nickel thermocouples placed in series to form a differential thermopile. The thermocouple layers are separated by a thin layer of silicon oxide, which is the thermal resistance. It is nominally 38mm long by 22mm wide by 1mm thick. Advanced data acquisition and switch unit and computer technology are applied in the research. The sensor is calibrated, then the relative curve of heat flux vs thermal voltage is determined. Moreover, the test of responses of steady state and transient state has been done and the results are compared with predecessors?results, and proved to be advanced in response speed.
The non-linearities of the calibration curve is primarily discussed. At the same time, the errors in the test of heat flux microsensor are analyzed, and some beneficial conclusions are drawn.
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