摘要
MEMS(微机电系统)技术的发展带来了引信技术发展的新机遇,改变了引信设计者传统的引信设计思想,引信的智能化、集成化程度进一步提高;MEMS引信具有体积小、成本低、可靠性高等诸多优点,同时引信有更多的空间容纳多传感器探测电路和主装药,提高了弹药的精确度和杀伤力。
本文提出了一种新型MEMS引信安全与解除保险机构设计方案,重点对MEMS隔爆机构进行了详细设计。采用MEMS技术实现了MEMS隔爆机构的平面化与微型化设计,该隔爆机构依靠电磁吸力解除保险。
本文首先简要介绍了MEMS技术及其在军事和引信中的应用,介绍了国外的几种典型的MEMS引信安全与解除保险的结构特点和作用原理,在此基础上提出了电磁驱动式的MEMS引信安全与解除保险机构的设计方案。其次对MEMS隔爆机构进行了重点设计。MEMS隔爆机构是MEMS引信安全与解除保险装置的核心机构。本文主要是在初期MEMS隔爆机构设计的基础上进行了改进设计,针对结构设计中存在的问题,提出了两种改进设计方案,两种方案中MEMS隔爆机构的滑块驱动原理不同,其中涉及微弹簧、滑块、锁销等关键部件的设计。接下来对MEMS引信安全与解除保险机构的微驱动器的进行了设计。通过对LIGA工艺和UV-LIGA工艺进行比较分析,选用基于SU-8胶的UV-LIGA工艺制备本结构,并完成了基本技术路线的设计。最后对制备完成后的两套MEMS隔爆机构进行微驱动、拉力测试以及抗高过载实验,实验显示电磁微驱动器能成功驱动锁销和滑块解除保险,两套隔爆机构的锁销最大驱动力为10mN和18mN,方案一MEMS隔爆机构的滑块最大驱动拉力为13mN,且均能承受20000g以上的冲击加速度。
The development of MEMS technology is bringing fuze technology's new opportunity, and the traditional conception of fuze design is being changed. The degree of fuze's intelligentization and integration is progressed further; MEMS fuze has the advantage of small volume, low cost, high reliability and so on, meantime fuze has more room to accommodate more sensor circuits and main charge, so the ammunition's precision and execution are improved.
This thesis presents a new MEMS fuze safety & arming (S&A) device mechanism, the MEMS interrupter mechanism of safety & arming device mechanism was designed in detail. It uses the MEMS technology to realize the complanation and the microminiaturized design, and it depends on the electromagnetism arming the S&A.
A short introduction of MEMS technology and the applications in military industry and fuze was depicted firstly, several typical MEMS S&A structure characteristic and effect principle abroad were analyzed, and then a electromagnetism actuated MEMS fuze S&A design project on this basis was proposed. Secondly, the MEMS interrupter mechanism of safety & arming device mechanism was designed in detail. The improvement design of MEMS interrupter mechanism based on the initial design was mainly finished. For the existing problem in the structure design, two kinds of interrupter mechanisms whose working principles were different were designed. The structures of micro-spring, slider, lockpin and so on were mainly designed. The MEMS S&A electromagnetic actuator was designed in the next step. And LIGA and UV-LIGA technology were analyzed, and then the UV-LIGA technology based on SU-8 was chosen to fabricate the MEMS interrupter mechanism. At last, the experiments of micro actuating, pulling testing and standing over overload impact testing for two kinds of MEMS interrupter were carried on. It was demonstrated that two kinds of MEMS interrupter mechanisms could be armed by electromagnetic actuators, the largest actuating-force of lockpins was 10mN and 18mN, the largest actuating-force of slider for the first kind of MEMS interrupter mechanism was 13mN, and two kinds of MEMS interrupter mechanisms both could stand over 20000g impact acceleration.
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