摘要
本论文是利用直流电弧等离子体方法在10—20 kPa的N2气压条件下,合成纳米级TiN粉末及首次合成多孔状TiN颗粒。主要分析了气压条件及温度场对多孔状TiN孔径形成及纳米粉末颗粒大小的影响,并对纳米级TiN粉末和多孔状TiN进行了X射线、透射电镜、扫描电镜等分析。此外还测量了纳米TiN陶瓷的硬度。
Titanium nitride is an important technological material for applications in various fields because of its good combination of physical and chemical properties, such as high melting point, high hardness, relatively low density, high wear resisitance and high corrosion resistance. And it is a grateful material because of its golden color. TiN belongs to the cubic lattice system and has a compact framework. TiN is a useful material for optimizing cutting tools and semiconductor packaging. Therefore it is very important on practical application to prepare the TiN particles which have high purity, size uniformity and shape integrity features.
Similarly, nano-sized titanium nitride with special morphologies, which has an excellent and unique performance, is a very promising material. And it has attracted great interest in the nanotechnology field. People have prepared nano-sized titanium nitride with special morphologies by using different materials, different preparation methods and have studied their performances. Despite that the preparation methods have their characteristics, there are still many issues to be resolved. It has a great significance to develop the preparation and to study the applications and performances of these nano-sized titanium nitride with special morphologies.
In this paper, we take titanium nitride as the research object. Using an effective synthesized method, direct current (DC) arc discharge plasma method, we synthesize porous titanium nitride and titanium nitride nanopowders. We use XRD, SEM and TEM to characterize the porous titanium nitride and titanium nitride nanopowders.
The diameter of the nanopowders is 10-20 nm. We also make porous titanium nitride in the same method. The diameter of the pores is 0.5-1.5μm. The shape of the pores is quadrilateral or pentagonal. Finally, we expound the law of the pores forming. And we also discuss the influence of temperature field and gas pressure to the pores forming.
引文
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