摘要
本论文在制备出高性能的纳米复合Ti(C,N)基金属陶瓷基体表面上利用多弧离子镀技术分别沉积了(Ti,Al)N涂层和纳米多层膜。
本文首先综述了Ti(C,N)基金属陶瓷的发展概况和研究进展,总结了Ti(C,N)基金属陶瓷的制备技术和成分对Ti(C,N)基金属陶瓷组织和性能的影响;介绍了多弧离子镀技术及其特点;对(Ti,Al)N涂层及复合涂层的研究状况进行了总结和评述。在此基础上指出了本文研究的目的和意义。
采用扫描电镜(SEM)、X射线能谱(EDS)等实验手段系统地研究了Ti(C,N)基金属陶瓷成分、组织结构和性能之间的关系,得出如下实验结论:当C含量为0.7wt%时,可以获得较佳的微观组织和较高的力学性能;当Mo添加量为16wt%时,Ti(C,N)基金属陶瓷的抗弯强度和硬度分别可达1930Mpa和89.5HRA,Mo的添加量对硬度的影响不明显;Ni含量对粘结相中合金元素的溶解度有较大的影响,随金属陶瓷中Ni添加量的增加,粘结相中Ti、W、Mo等合金元素的含量均降低,且W、Mo含量变化不明显。
采用多弧离子镀技术在Ti(C,N)基金属陶瓷基体上制备了(Ti, Al)N涂层。研究了沉积工艺参数如靶材电流、基底偏压、氮气分压等对(Ti,Al)N涂层成份、相结构方面的影响规律,以及对(Ti,Al)N涂层的硬度、结合力和摩擦磨损性能的影响。结果表明:(Ti,Al)N涂层在常温磨损主要为磨粒磨损,随着基体偏压或者氮气分压的增大,(Ti,Al)N涂层的摩擦系数均减小。基体温度400℃,靶材电流IAl/ITi=70/80,基体偏压-100V,氮气分压1.0Pa,(Ti,Al)N涂层具有最佳的综合性能。
最后在沉积(Ti,Al)N涂层工艺的基础上分别制备了两种不同调制周期的TiN/AlN纳米多层膜和TiN/(Ti,Al)N纳米多层膜。研究了调制周期对纳米多层膜的组织和性能的影响。结果表明:载物台转速为12rpm时,AlN以亚稳态立方结构的形式存在,改善了TiN/AlN纳米多层膜的力学性能,膜/基结合力达到41.0N,显微硬度为3429Hv;调制周期越小,TiN/(Ti,Al)N纳米多层膜的(111)晶面择优取向愈加强烈,并且TiN/(Ti,Al)N多层膜硬度值比单层(Ti,Al)N的硬度值高。
(Ti,Al)N coating and nano-multilayers were deposited by multi-arc ion plating on the nano-composite Ti(C,N)-based cermets with high mechanical properties.
In the first part of the dissertation, the development and present research situation of Ti(C,N)-based cermets have been critically overviewed, which include the influence of manufacturing process and composition on the microstructures and properties of Ti(C,N)-based cermets. The multi-arc plating process and its characteristics have been introduced. The development of (Ti,Al)N coating and multilayers has been summarized. Based on above work, the purpose and significance of the dissertation have been pointed out.
The relationship among composition, microstructure and properties of Ti(C,N)-based cermets has been systematically investigated by scanning electron microscopy (SEM), energy dispersive X-ray analysis(EDS) and etc. The conclusions were obtained as follows: When the amount of C was 0.7wt%, the cermet had better microstructures and mechanical properties. The highest transverse rupture strength and hardness were found in the cermet with 16wt% Mo addition, which reached 1930MPa and 89.5 HRA, respectively. But the variation of hardness was not apparent. The influence of the addition amount of Ni on the solubility of metal elements in the binder phase has been studied, and there was a decrease of Ti, W and Mo, the variation of W and Mo was not obvious. (Ti,Al)N coating was deposited on the Ti(C,N)-based cermets by multi-arc ion plating. The influence of the deposition parameters such as target power, bias voltage and gas pressure on composition, phase structure, hardness, cohesion and friction wear of (Ti,Al)N coating. The results revealed that the abrasion of (Ti,Al)N coating was grain-abrasion at room temperature. The friction coefficient reduced with the increase of bias voltage or gas pressure. When the substrates temperature was 400℃, the ratio of target power of IAl/ITi=70/80, the bias voltage was -100V and the gas pressure was 1.0Pa, the properties of (Ti,Al)N coating was excellent.
Finally, the TiN/AlN and TiN/(Ti,Al)N nano-multilayers were deposited with different modulation periods by multi-arc ion plating, and the effects of modulation periods on the microstructures and mechanical properties of the nano-multilayers were also investigated. Some conclusions were drawn as follows: When the rotational speed of object stage was 12rpm, AlN was metastable cubic structure, which improved the mechanical properties of TiN/AlN nano- multilayers. The cohesion and hardness reached 41.0N and 3429HV, respectively. The less the modulation period varied, the stronger of the TiN/(Ti,Al)N phase grew along (111) crystal face by preferential orientation became. The hardness of TiN/(Ti,Al)N nano-multilayers was higher than that of (Ti,Al)N coating at the same processing condition.
引文
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